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1.发明授权Manufacturing method of planar optical waveguide device with grating structure 有权具有光栅结构的平面光波导器件的制造方法公开(公告)号：US08404133B2
公开(公告)日：2013-03-26
申请号：US12547115
申请日：2009-08-25
申请人： Ken Sakuma , Kensuke Ogawa , Kazuhiro Goi , Yong Tsong Tan , Ning Guan , Mingbin Yu , Hwee Gee Teo , Guo-Qiang Lo
发明人： Ken Sakuma , Kensuke Ogawa , Kazuhiro Goi , Yong Tsong Tan , Ning Guan , Mingbin Yu , Hwee Gee Teo , Guo-Qiang Lo
IPC分类号： C03C15/00
CPC分类号： G02B6/124
摘要： A method for manufacturing a planar optical waveguide device of which a core includes a plurality of alternatively arranged fin portions and valley portions to form a grating structure, in which the core widths of the valley portions vary along the longitudinal direction, the method including: a high refractive index material layer forming step of forming a high refractive index material layer; a photoresist layer forming step of forming a photoresist layer on the high refractive index material layer; a first exposure step of forming shaded portions on the photoresist layer using a phase-shifting photomask; a second exposure step of forming shaded portions on the photoresist layer using a binary photomask; a development step of developing the photoresist layer; and an etching step of etching the high refractive index material layer using the photoresist pattern resulted from the development step.
摘要翻译： 一种平面光波导装置的制造方法，其特征在于，芯体具有多个交替设置的翅片部和谷部，以形成其中谷部的芯宽沿纵向变化的格栅结构，该方法包括： 形成高折射率材料层的高折射率材料层形成步骤; 在高折射率材料层上形成光致抗蚀剂层的光致抗蚀剂层形成步骤; 使用相移光掩模在光致抗蚀剂层上形成阴影部分的第一曝光步骤; 第二曝光步骤，使用二元光掩模在所述光致抗蚀剂层上形成阴影部分; 显影光致抗蚀剂层的显影步骤; 以及使用由显影步骤产生的光致抗蚀剂图案来蚀刻高折射率材料层的蚀刻步骤。
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2.发明申请MANUFACTURING METHOD OF PLANAR OPTICAL WAVEGUIDE DEVICE WITH GRATING STRUCTURE 有权具有光栅结构的平面光波导器件的制造方法公开(公告)号：US20110049735A1
公开(公告)日：2011-03-03
申请号：US12547115
申请日：2009-08-25
申请人： Ken Sakuma , Kensuke Ogawa , Kazuhiro Goi , Yong Tsong Tan , Ning Guan , Mingbin Yu , Hwee Gee Teo , Guo-Qiang Lo
发明人： Ken Sakuma , Kensuke Ogawa , Kazuhiro Goi , Yong Tsong Tan , Ning Guan , Mingbin Yu , Hwee Gee Teo , Guo-Qiang Lo
IPC分类号： G02B6/10
CPC分类号： G02B6/124
摘要： A method for manufacturing a planar optical waveguide device of which a core includes a plurality of alternatively arranged fin portions and valley portions to form a grating structure, in which the core widths of the valley portions vary along the longitudinal direction, the method including: a high refractive index material layer forming step of forming a high refractive index material layer; a photoresist layer forming step of forming a photoresist layer on the high refractive index material layer; a first exposure step of forming shaded portions on the photoresist layer using a phase-shifting photomask; a second exposure step of forming shaded portions on the photoresist layer using a binary photomask; a development step of developing the photoresist layer; and an etching step of etching the high refractive index material layer using the photoresist pattern resulted from the development step.
摘要翻译： 一种平面光波导装置的制造方法，其特征在于，芯体具有多个交替设置的翅片部和谷部，以形成其中谷部的芯宽沿纵向变化的格栅结构，该方法包括： 形成高折射率材料层的高折射率材料层形成步骤; 在高折射率材料层上形成光致抗蚀剂层的光致抗蚀剂层形成步骤; 使用相移光掩模在光致抗蚀剂层上形成阴影部分的第一曝光步骤; 第二曝光步骤，使用二元光掩模在所述光致抗蚀剂层上形成阴影部分; 显影光致抗蚀剂层的显影步骤; 以及使用由显影步骤产生的光致抗蚀剂图案来蚀刻高折射率材料层的蚀刻步骤。
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3.发明授权Manufacturing method of planar optical waveguide device with grating structure 有权具有光栅结构的平面光波导器件的制造方法公开(公告)号：US08227178B2
公开(公告)日：2012-07-24
申请号：US12547146
申请日：2009-08-25
申请人： Ken Sakuma , Kensuke Ogawa , Kazuhiro Goi , Yong Tsong Tan , Ning Guan , Mingbin Yu , Hwee Gee Teo , Guo-Qiang Lo
发明人： Ken Sakuma , Kensuke Ogawa , Kazuhiro Goi , Yong Tsong Tan , Ning Guan , Mingbin Yu , Hwee Gee Teo , Guo-Qiang Lo
IPC分类号： G03F7/20
摘要： A method for manufacturing a planar optical waveguide device including a core of which a top face is provided with a groove section filled with a groove section filler made of a low refractive index material having a refractive index lower than that of the core, the method including; a first high refractive index material layer forming step of forming a high refractive index material layer; a low refractive index material layer forming step of forming a low refractive index material layer made of the low refractive index material on the high refractive index material layer; a groove section filler forming step of forming the groove section filler by trimming both lateral portions of the low refractive index material layer; and a second high refractive index material layer forming step of forming a high refractive index material layer so as to fill the both sides of the lateral portions of the groove section filler.
摘要翻译： 一种平面光波导器件的制造方法，其特征在于，具有芯部，其上表面设置有填充有折射率低于芯的低折射率材料的槽部填充物的槽部，该方法包括 ; 形成高折射率材料层的第一高折射率材料层形成步骤; 低折射率材料层形成步骤，在所述高折射率材料层上形成由所述低折射率材料制成的低折射率材料层; 槽部填料形成工序，通过对所述低折射率材料层的两个侧面进行修整而形成所述槽部填料; 以及形成高折射率材料层的第二高折射率材料层形成步骤，以便填充槽部填料的侧部的两侧。
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4.发明授权公开(公告)号：US08270790B2
公开(公告)日：2012-09-18
申请号：US12870748
申请日：2010-08-27
申请人： Kensuke Ogawa , Ning Guan , Ken Sakuma
发明人： Kensuke Ogawa , Ning Guan , Ken Sakuma
CPC分类号： G02B6/124 , G02B6/29325 , G02B6/29394
摘要： There is provided a planar optical waveguide element comprises a core of an optical waveguide; and first Bragg grating pattern and second Bragg grating pattern that are provided on the core, wherein the first Bragg grating pattern and the second Bragg grating pattern are mutually parallel along a propagation direction of guided light.
摘要翻译： 提供了一种包括光波导芯体的平面光波导元件; 以及设置在芯上的第一布拉格光栅图案和第二布拉格光栅图案，其中第一布拉格光栅图案和第二布拉格光栅图案沿着导光的传播方向相互平行。
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5.发明授权公开(公告)号：US08270789B2
公开(公告)日：2012-09-18
申请号：US12870647
申请日：2010-08-27
申请人： Kensuke Ogawa , Ning Guan , Ken Sakuma
发明人： Kensuke Ogawa , Ning Guan , Ken Sakuma
CPC分类号： G02B6/12007 , G02B6/124 , G02B6/29394 , G02F1/225 , G02F2001/213 , G02F2201/02 , G02F2201/307
摘要： There is provided an optical waveguide element comprises: a core of an optical waveguide; and a Bragg grating pattern that is provided on the core, wherein a pitch of the Bragg grating pattern takes a value from among three or more predetermined discrete values; the pitches that take the respective discrete values are present in a plurality of locations over an entire length of the optical waveguide respectively; and if a value from among all of the discrete values which has the highest distribution frequency is taken as M, and if the closest value to the M which is larger than the M is taken as A, and if the closest value to the M which is smaller than the M is taken as B, then a difference expressed as A−M is equal to a difference expressed as M−B.
摘要翻译： 提供了一种光波导元件，包括：光波导的芯; 以及设置在所述芯上的布拉格光栅图案，其中所述布拉格光栅图案的间距取三个或更多个预定离散值中的值; 采用相应离散值的间距分别存在于光波导的整个长度上的多个位置中; 并且如果将具有最高分布频率的所有离散值中的值作为M，并且如果与M相比较的M的最接近的值被视为A，并且如果与M的最接近的值 小于M取为B，则表示为A-M的差等于表示为M-B的差。
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6.发明申请PLANAR OPTICAL WAVEGUIDE ELEMENT, CHROMATIC DISPERSION COMPENSATOR, OPTICAL FILTER, OPTICAL RESONATOR AND METHODS FOR DESIGNING THE ELEMENT, CHROMATIC DISPERSION COMPENSATOR, OPTICAL FILTER AND OPTICAL RESONATOR 审中-公开平面光学元件，色散补偿器，光学滤波器，光学谐振器和设计元件，色散补偿器，光学滤波器和光学谐振器的方法公开(公告)号：US20100322559A1
公开(公告)日：2010-12-23
申请号：US12870684
申请日：2010-08-27
申请人： Kensuke Ogawa , Ning Guan , Ken Sakuma
发明人： Kensuke Ogawa , Ning Guan , Ken Sakuma
CPC分类号： G02B6/10 , G02B6/124 , G02B6/29325 , G02B6/29394
摘要： There is provided a planar optical waveguide element in which an optical waveguide comprises a core, and a gap portion that is positioned in a center of a width direction of the core so as to extend in a propagation direction of guided light, and that has a lower refractive index than that of the core; and wherein the core comprises two areas that are separated by the gap portion, and a single mode optical waveguide, in which a single mode is propagated span crossing these two areas, is formed.
摘要翻译： 提供了一种平面光波导元件，其中光波导包括芯，以及间隙部，其位于芯的宽度方向的中心，以沿着导光的传播方向延伸，并且具有 折射率低于芯的折射率; 并且其中芯包括由间隙部分分开的两个区域，并且形成单模模式传播跨越这两个区域的单模光波导。
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7.发明授权公开(公告)号：US08824044B2
公开(公告)日：2014-09-02
申请号：US12870671
申请日：2010-08-27
申请人： Kensuke Ogawa , Ning Guan , Ken Sakuma
发明人： Kensuke Ogawa , Ning Guan , Ken Sakuma
CPC分类号： G02B6/12007 , G02B6/02085 , G02B6/122 , G02B6/124 , G02B6/29394 , G02B2006/02166 , G02F2001/0151 , G02F2201/063 , G02F2201/307
摘要： There is provided a planar optical waveguide element in which an optical waveguide core comprises an inner side core having protruding portions that form a rib structure, and an outer side core that is provided on top of the inner side core and that covers circumferential surfaces of the protruding portions, wherein a refractive index of the outer side core is lower than an average refractive index of the inner side core. The structure of the planar optical waveguide element can be applied even when the core is formed from a material having a higher refractive index than that of a silica glass-based material such as silicon (Si) or silicon nitride (SixNy).
摘要翻译： 提供了一种平面光波导元件，其中光波导芯包括具有形成肋结构的突出部分的内侧芯和设置在内侧芯的顶部上的外侧芯，并且覆盖 突出部分，其中外侧芯的折射率低于内侧芯的平均折射率。 平面光波导元件的结构即使当芯由具有比硅（Si）或氮化硅（SixNy）的二氧化硅玻璃基材料的折射率高的材料形成时也可应用。
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8.发明申请PLANAR OPTICAL WAVEGUIDE ELEMENT, CHROMATIC DISPERSION COMPENSATOR, OPTICAL FILTER, OPTICAL RESONATOR AND METHODS FOR DESIGNING THE ELEMENT, CHROMATIC DISPERSION COMPENSATOR, OPTICAL FILTER AND OPTICAL RESONATOR 有权平面光学元件，色散补偿器，光学滤波器，光学谐振器和设计元件，色散补偿器，光学滤波器和光学谐振器的方法公开(公告)号：US20110013269A1
公开(公告)日：2011-01-20
申请号：US12870671
申请日：2010-08-27
申请人： Kensuke OGAWA , Ning Guan , Ken Sakuma
发明人： Kensuke OGAWA , Ning Guan , Ken Sakuma
CPC分类号： G02B6/12007 , G02B6/02085 , G02B6/122 , G02B6/124 , G02B6/29394 , G02B2006/02166 , G02F2001/0151 , G02F2201/063 , G02F2201/307
摘要： There is provided a planar optical waveguide element in which an optical waveguide core comprises an inner side core having protruding portions that form a rib structure, and an outer side core that is provided on top of the inner side core and that covers circumferential surfaces of the protruding portions, wherein a refractive index of the outer side core is lower than an average refractive index of the inner side core. The structure of the planar optical waveguide element can be applied even when the core is formed from a material having a higher refractive index than that of a silica glass-based material such as silicon (Si) or silicon nitride (SixNy).
摘要翻译： 提供了一种平面光波导元件，其中光波导芯包括具有形成肋结构的突出部分的内侧芯和设置在内侧芯的顶部上的外侧芯，并且覆盖 突出部分，其中外侧芯的折射率低于内侧芯的平均折射率。 平面光波导元件的结构即使当芯由具有比硅（Si）或氮化硅（SixNy）的二氧化硅玻璃基材料的折射率高的材料形成时也可应用。
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公开(公告)号：US09093748B2
公开(公告)日：2015-07-28
申请号：US13356296
申请日：2012-01-23
申请人： Ning Guan , Hiroiku Tayama
发明人： Ning Guan , Hiroiku Tayama
摘要： A dipole antenna of the present invention is more compact and has a wider bandwidth as compared with a conventional dipole antenna. A dipole antenna (DP) includes antenna elements (E1) and (E2) on a single plane. (E1) includes a linear section (E1a) extending from an end of (E1) in a first direction, and a linear section (E1b) connected to (E1a) via a bending section (E1c), (E1b) extending from (E1c) in a direction opposite to the first direction. (E2) includes a linear section (E2a) extending from an end of (E2) in the direction opposite to the first direction, and a linear section (E2b) connected to (E2a) via a bending section (E2c), (E2b) extending from (E2c) in the first direction. (E1) and (E2) are such that (E1a) is provided between (E2a) and (E2b), and (E2a) is provided between (E1a) and (E1b).
摘要翻译： 本发明的偶极天线与传统的偶极天线相比更紧凑并且具有更宽的带宽。 偶极天线（DP）在单个平面上包括天线元件（E1）和（E2）。 （E1）包括从（E1）的端部沿第一方向延伸的线性部分（E1a）和经由弯曲部分（E1c）连接到（E1a）的线性部分（E1b），从（E1c）延伸的（E1b） ）沿与第一方向相反的方向。 （E2）包括从（E2）的端部沿与第一方向相反的方向延伸的线性部分（E2a）和经由弯曲部分（E2c）连接到（E2a）的线性部分（E2b），（E2b） 从（E2c）沿第一方向延伸。 （E1）和（E2）使得（E2a）和（E2b）之间提供（E1a），并且（E1a）和（E1b）之间提供（E2a）。
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公开(公告)号：US07852173B2
公开(公告)日：2010-12-14
申请号：US11867378
申请日：2007-10-04
申请人： Ning Guan
发明人： Ning Guan
IPC分类号： H01P1/203
CPC分类号： H01P1/203 , H01P1/2013
摘要： This invention provides a reflection-type bandpass filter for ultra-wideband wireless data communication, in which are provided, on the surface of a dielectric substrate, a center conductor and side conductors, provided on both sides of the center conductor, securing a prescribed distance between conductors with non-conducting portions intervening therebetween. The center conductor width or the distances between conductors, or both, are distributed non-uniformly in a length direction of the center conductor.
摘要翻译： 本发明提供一种用于超宽带无线数据通信的反射型带通滤波器，其中在介质基片的表面上设置中心导体和设置在中心导体两侧的侧导体，固定一定距离 在介于其间的非导电部分的导体之间。 中心导体宽度或导体之间的距离或两者在中心导体的长度方向上不均匀地分布。
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