MANUFACTURING METHOD OF PLANAR OPTICAL WAVEGUIDE DEVICE WITH GRATING STRUCTURE
    1.
    发明申请
    MANUFACTURING METHOD OF PLANAR OPTICAL WAVEGUIDE DEVICE WITH GRATING STRUCTURE 有权
    具有光栅结构的平面光波导器件的制造方法

    公开(公告)号:US20110049735A1

    公开(公告)日:2011-03-03

    申请号:US12547115

    申请日:2009-08-25

    IPC分类号: G02B6/10

    CPC分类号: G02B6/124

    摘要: A method for manufacturing a planar optical waveguide device of which a core includes a plurality of alternatively arranged fin portions and valley portions to form a grating structure, in which the core widths of the valley portions vary along the longitudinal direction, the method including: a high refractive index material layer forming step of forming a high refractive index material layer; a photoresist layer forming step of forming a photoresist layer on the high refractive index material layer; a first exposure step of forming shaded portions on the photoresist layer using a phase-shifting photomask; a second exposure step of forming shaded portions on the photoresist layer using a binary photomask; a development step of developing the photoresist layer; and an etching step of etching the high refractive index material layer using the photoresist pattern resulted from the development step.

    摘要翻译: 一种平面光波导装置的制造方法,其特征在于,芯体具有多个交替设置的翅片部和谷部,以形成其中谷部的芯宽沿纵向变化的格栅结构,该方法包括: 形成高折射率材料层的高折射率材料层形成步骤; 在高折射率材料层上形成光致抗蚀剂层的光致抗蚀剂层形成步骤; 使用相移光掩模在光致抗蚀剂层上形成阴影部分的第一曝光步骤; 第二曝光步骤,使用二元光掩模在所述光致抗蚀剂层上形成阴影部分; 显影光致抗蚀剂层的显影步骤; 以及使用由显影步骤产生的光致抗蚀剂图案来蚀刻高折射率材料层的蚀刻步骤。

    Manufacturing method of planar optical waveguide device with grating structure
    2.
    发明授权
    Manufacturing method of planar optical waveguide device with grating structure 有权
    具有光栅结构的平面光波导器件的制造方法

    公开(公告)号:US08404133B2

    公开(公告)日:2013-03-26

    申请号:US12547115

    申请日:2009-08-25

    IPC分类号: C03C15/00

    CPC分类号: G02B6/124

    摘要: A method for manufacturing a planar optical waveguide device of which a core includes a plurality of alternatively arranged fin portions and valley portions to form a grating structure, in which the core widths of the valley portions vary along the longitudinal direction, the method including: a high refractive index material layer forming step of forming a high refractive index material layer; a photoresist layer forming step of forming a photoresist layer on the high refractive index material layer; a first exposure step of forming shaded portions on the photoresist layer using a phase-shifting photomask; a second exposure step of forming shaded portions on the photoresist layer using a binary photomask; a development step of developing the photoresist layer; and an etching step of etching the high refractive index material layer using the photoresist pattern resulted from the development step.

    摘要翻译: 一种平面光波导装置的制造方法,其特征在于,芯体具有多个交替设置的翅片部和谷部,以形成其中谷部的芯宽沿纵向变化的格栅结构,该方法包括: 形成高折射率材料层的高折射率材料层形成步骤; 在高折射率材料层上形成光致抗蚀剂层的光致抗蚀剂层形成步骤; 使用相移光掩模在光致抗蚀剂层上形成阴影部分的第一曝光步骤; 第二曝光步骤,使用二元光掩模在所述光致抗蚀剂层上形成阴影部分; 显影光致抗蚀剂层的显影步骤; 以及使用由显影步骤产生的光致抗蚀剂图案来蚀刻高折射率材料层的蚀刻步骤。

    Manufacturing method of planar optical waveguide device with grating structure
    7.
    发明授权
    Manufacturing method of planar optical waveguide device with grating structure 有权
    具有光栅结构的平面光波导器件的制造方法

    公开(公告)号:US08227178B2

    公开(公告)日:2012-07-24

    申请号:US12547146

    申请日:2009-08-25

    IPC分类号: G03F7/20

    CPC分类号: G02B6/124 G02B6/132 G02B6/136

    摘要: A method for manufacturing a planar optical waveguide device including a core of which a top face is provided with a groove section filled with a groove section filler made of a low refractive index material having a refractive index lower than that of the core, the method including; a first high refractive index material layer forming step of forming a high refractive index material layer; a low refractive index material layer forming step of forming a low refractive index material layer made of the low refractive index material on the high refractive index material layer; a groove section filler forming step of forming the groove section filler by trimming both lateral portions of the low refractive index material layer; and a second high refractive index material layer forming step of forming a high refractive index material layer so as to fill the both sides of the lateral portions of the groove section filler.

    摘要翻译: 一种平面光波导器件的制造方法,其特征在于,具有芯部,其上表面设置有填充有折射率低于芯的低折射率材料的槽部填充物的槽部,该方法包括 ; 形成高折射率材料层的第一高折射率材料层形成步骤; 低折射率材料层形成步骤,在所述高折射率材料层上形成由所述低折射率材料制成的低折射率材料层; 槽部填料形成工序,通过对所述低折射率材料层的两个侧面进行修整而形成所述槽部填料; 以及形成高折射率材料层的第二高折射率材料层形成步骤,以便填充槽部填料的侧部的两侧。

    Dipole antenna
    9.
    发明授权
    Dipole antenna 有权
    偶极天线

    公开(公告)号:US09093748B2

    公开(公告)日:2015-07-28

    申请号:US13356296

    申请日:2012-01-23

    IPC分类号: H01Q9/26 H01Q5/357 H01Q5/40

    CPC分类号: H01Q9/26 H01Q5/357 H01Q5/40

    摘要: A dipole antenna of the present invention is more compact and has a wider bandwidth as compared with a conventional dipole antenna. A dipole antenna (DP) includes antenna elements (E1) and (E2) on a single plane. (E1) includes a linear section (E1a) extending from an end of (E1) in a first direction, and a linear section (E1b) connected to (E1a) via a bending section (E1c), (E1b) extending from (E1c) in a direction opposite to the first direction. (E2) includes a linear section (E2a) extending from an end of (E2) in the direction opposite to the first direction, and a linear section (E2b) connected to (E2a) via a bending section (E2c), (E2b) extending from (E2c) in the first direction. (E1) and (E2) are such that (E1a) is provided between (E2a) and (E2b), and (E2a) is provided between (E1a) and (E1b).

    摘要翻译: 本发明的偶极天线与传统的偶极天线相比更紧凑并且具有更宽的带宽。 偶极天线(DP)在单个平面上包括天线元件(E1)和(E2)。 (E1)包括从(E1)的端部沿第一方向延伸的线性部分(E1a)和经由弯曲部分(E1c)连接到(E1a)的线性部分(E1b),从(E1c)延伸的(E1b) )沿与第一方向相反的方向。 (E2)包括从(E2)的端部沿与第一方向相反的方向延伸的线性部分(E2a)和经由弯曲部分(E2c)连接到(E2a)的线性部分(E2b),(E2b) 从(E2c)沿第一方向延伸。 (E1)和(E2)使得(E2a)和(E2b)之间提供(E1a),并且(E1a)和(E1b)之间提供(E2a)。

    Reflection-type bandpass filter
    10.
    发明授权
    Reflection-type bandpass filter 有权
    反射式带通滤波器

    公开(公告)号:US07852173B2

    公开(公告)日:2010-12-14

    申请号:US11867378

    申请日:2007-10-04

    申请人: Ning Guan

    发明人: Ning Guan

    IPC分类号: H01P1/203

    CPC分类号: H01P1/203 H01P1/2013

    摘要: This invention provides a reflection-type bandpass filter for ultra-wideband wireless data communication, in which are provided, on the surface of a dielectric substrate, a center conductor and side conductors, provided on both sides of the center conductor, securing a prescribed distance between conductors with non-conducting portions intervening therebetween. The center conductor width or the distances between conductors, or both, are distributed non-uniformly in a length direction of the center conductor.

    摘要翻译: 本发明提供一种用于超宽带无线数据通信的反射型带通滤波器,其中在介质基片的表面上设置中心导体和设置在中心导体两侧的侧导体,固定一定距离 在介于其间的非导电部分的导体之间。 中心导体宽度或导体之间的距离或两者在中心导体的长度方向上不均匀地分布。