摘要:
A method for manufacturing a planar optical waveguide device of which a core includes a plurality of alternatively arranged fin portions and valley portions to form a grating structure, in which the core widths of the valley portions vary along the longitudinal direction, the method including: a high refractive index material layer forming step of forming a high refractive index material layer; a photoresist layer forming step of forming a photoresist layer on the high refractive index material layer; a first exposure step of forming shaded portions on the photoresist layer using a phase-shifting photomask; a second exposure step of forming shaded portions on the photoresist layer using a binary photomask; a development step of developing the photoresist layer; and an etching step of etching the high refractive index material layer using the photoresist pattern resulted from the development step.
摘要:
A method for manufacturing a planar optical waveguide device of which a core includes a plurality of alternatively arranged fin portions and valley portions to form a grating structure, in which the core widths of the valley portions vary along the longitudinal direction, the method including: a high refractive index material layer forming step of forming a high refractive index material layer; a photoresist layer forming step of forming a photoresist layer on the high refractive index material layer; a first exposure step of forming shaded portions on the photoresist layer using a phase-shifting photomask; a second exposure step of forming shaded portions on the photoresist layer using a binary photomask; a development step of developing the photoresist layer; and an etching step of etching the high refractive index material layer using the photoresist pattern resulted from the development step.
摘要:
There is provided a planar optical waveguide element comprises a core of an optical waveguide; and first Bragg grating pattern and second Bragg grating pattern that are provided on the core, wherein the first Bragg grating pattern and the second Bragg grating pattern are mutually parallel along a propagation direction of guided light.
摘要:
There is provided an optical waveguide element comprises: a core of an optical waveguide; and a Bragg grating pattern that is provided on the core, wherein a pitch of the Bragg grating pattern takes a value from among three or more predetermined discrete values; the pitches that take the respective discrete values are present in a plurality of locations over an entire length of the optical waveguide respectively; and if a value from among all of the discrete values which has the highest distribution frequency is taken as M, and if the closest value to the M which is larger than the M is taken as A, and if the closest value to the M which is smaller than the M is taken as B, then a difference expressed as A−M is equal to a difference expressed as M−B.
摘要:
There is provided a planar optical waveguide element in which an optical waveguide comprises a core, and a gap portion that is positioned in a center of a width direction of the core so as to extend in a propagation direction of guided light, and that has a lower refractive index than that of the core; and wherein the core comprises two areas that are separated by the gap portion, and a single mode optical waveguide, in which a single mode is propagated span crossing these two areas, is formed.
摘要:
There is provided a planar optical waveguide element in which an optical waveguide core comprises an inner side core having protruding portions that form a rib structure, and an outer side core that is provided on top of the inner side core and that covers circumferential surfaces of the protruding portions, wherein a refractive index of the outer side core is lower than an average refractive index of the inner side core. The structure of the planar optical waveguide element can be applied even when the core is formed from a material having a higher refractive index than that of a silica glass-based material such as silicon (Si) or silicon nitride (SixNy).
摘要:
A method for manufacturing a planar optical waveguide device including a core of which a top face is provided with a groove section filled with a groove section filler made of a low refractive index material having a refractive index lower than that of the core, the method including; a first high refractive index material layer forming step of forming a high refractive index material layer; a low refractive index material layer forming step of forming a low refractive index material layer made of the low refractive index material on the high refractive index material layer; a groove section filler forming step of forming the groove section filler by trimming both lateral portions of the low refractive index material layer; and a second high refractive index material layer forming step of forming a high refractive index material layer so as to fill the both sides of the lateral portions of the groove section filler.
摘要:
There is provided a planar optical waveguide element in which an optical waveguide core comprises an inner side core having protruding portions that form a rib structure, and an outer side core that is provided on top of the inner side core and that covers circumferential surfaces of the protruding portions, wherein a refractive index of the outer side core is lower than an average refractive index of the inner side core. The structure of the planar optical waveguide element can be applied even when the core is formed from a material having a higher refractive index than that of a silica glass-based material such as silicon (Si) or silicon nitride (SixNy).
摘要:
A dipole antenna of the present invention is more compact and has a wider bandwidth as compared with a conventional dipole antenna. A dipole antenna (DP) includes antenna elements (E1) and (E2) on a single plane. (E1) includes a linear section (E1a) extending from an end of (E1) in a first direction, and a linear section (E1b) connected to (E1a) via a bending section (E1c), (E1b) extending from (E1c) in a direction opposite to the first direction. (E2) includes a linear section (E2a) extending from an end of (E2) in the direction opposite to the first direction, and a linear section (E2b) connected to (E2a) via a bending section (E2c), (E2b) extending from (E2c) in the first direction. (E1) and (E2) are such that (E1a) is provided between (E2a) and (E2b), and (E2a) is provided between (E1a) and (E1b).
摘要:
This invention provides a reflection-type bandpass filter for ultra-wideband wireless data communication, in which are provided, on the surface of a dielectric substrate, a center conductor and side conductors, provided on both sides of the center conductor, securing a prescribed distance between conductors with non-conducting portions intervening therebetween. The center conductor width or the distances between conductors, or both, are distributed non-uniformly in a length direction of the center conductor.