摘要:
In a semiconductor device having a repetitive pattern area in which a unitary wiring pattern is repeatedly arranged and covered with a multilayer insulator film composed of a silicon oxide film and a TEOSBPSG film, dummy conductors formed of the same layer as that of conductors of the wiring pattern are formed in an area adjacent to an edge zone of the repetitive pattern area. Thus, the outermost conductor positioned at the edge of the repetitive pattern area is no longer the outermost patterned conductor in an extended repetitive pattern area including the dummy conductors. Thus, the stress which acts on the outermost conductor of the repetitive pattern area because of the shrinkage of the silicon oxide film caused for the difference in thermal shrinkage coefficient between the silicon oxide film and the TEOSBPSG film, is relaxed, so that the shifting of the outermost conductor is prevented, and therefore, a short-circuiting caused by shifting of the outermost conductor is also prevented.
摘要:
A computer-readable recording medium stores therein a spreadsheet generating program that causes a computer to execute acquiring information related to layout positions of items in a form; column-sorting the items in ascending order, according to column-related coordinate values of the items; determining a column width for each of the items, based on a distance to the previous item in the column-sorted items; row-sorting the items in ascending order, according to row-related coordinate values of the items; determining a row height for each of the items, based on a distance to the previous item in the row-sorted items; designating, for each of the items and from among cells having the determined column widths and the determined row heights, a cell corresponding to a layout position indicated in the acquired information; and outputting a spreadsheet related to layout of the form by a provision of the items to the designated cells.