公开(公告)号：US20120074316A1

公开(公告)日：2012-03-29

申请号：US13195927

申请日：2011-08-02

申请人： Kenji WATANABE ,  Masahiro HATAKEYAMA ,  Yoshihiko NAITO ,  Tatsuya KOHAMA ,  Kenji TERAO ,  Takeshi MURAKAMI ,  Takehide HAYASHI ,  Kiwamu TSUKAMOTO ,  Hiroshi SOBUKAWA ,  Norio KIMURA

发明人： Kenji WATANABE ,  Masahiro HATAKEYAMA ,  Yoshihiko NAITO ,  Tatsuya KOHAMA ,  Kenji TERAO ,  Takeshi MURAKAMI ,  Takehide HAYASHI ,  Kiwamu TSUKAMOTO ,  Hiroshi SOBUKAWA ,  Norio KIMURA

IPC分类号： G01N23/20 ,  G01N23/00

CPC分类号： H01J37/22 ,  H01J37/265 ,  H01J37/29 ,  H01J2237/004 ,  H01J2237/022 ,  H01J2237/24495 ,  H01J2237/24564 ,  H01J2237/2817

摘要： An electro-optical inspection apparatus is provided that is capable of preventing adhesion of dust or particles to the sample surface as much as possible. A stage (100) on which a sample (200) is placed is disposed inside a vacuum chamber (112) that can be evacuated to vacuum, and a dust collecting electrode (122) is disposed to surround a periphery of the sample (200). The dust collecting electrode (122) is applied with a voltage having the same polarity as a voltage applied to the sample (200) and an absolute value that is the same or larger than an absolute value of the voltage. Thus, because dust or particles such as particles adhere to the dust collecting electrode (122), adhesion of the dust or particles to the sample surface can be reduced. Instead of using the dust collecting electrode, it is possible to form a recess on a wall of the vacuum chamber containing the stage, or to dispose on the wall a metal plate having a mesh structure to which a predetermined voltage is applied. In addition, adhesion of dust or particles can be further reduced by disposing a gap control plate (124) having a through hole (124a) at the center above the sample (200) and the dust collecting electrode (122).

摘要翻译： 提供一种电光检查装置，其能够尽可能地防止灰尘或颗粒附着到样品表面。 将其上放置有样品（200）的载物台（100）设置在能够抽真空的真空室（112）的内部，并且设置集尘电极（122）以包围样品（200）的周围， 。 集尘电极（122）施加与施加到样品（200）的电压相同极性的电压和与电压的绝对值相同或更大的绝对值。 因此，由于灰尘或颗粒例如颗粒附着在集尘电极122上，所以可以降低灰尘或颗粒对样品表面的粘附。 代替使用集尘电极，可以在包含载物台的真空室的壁上形成凹部，或者在壁上配置具有施加了预定电压的网状结构的金属板。 此外，通过在样品（200）上方的中心和集尘电极（122）设置具有通孔（124a）的间隙控制板（124），可以进一步减少灰尘或颗粒的附着。

公开(公告)号：US20080251718A1

公开(公告)日：2008-10-16

申请号：US12103354

申请日：2008-04-15

申请人： Toru KAGA ,  Kenji TERAO ,  Masahiro HATAKEYAMA ,  Kenji WATANABE ,  Yoshihiko NAITO ,  Takeshi MURAKAMI ,  Norio KIMURA

发明人： Toru KAGA ,  Kenji TERAO ,  Masahiro HATAKEYAMA ,  Kenji WATANABE ,  Yoshihiko NAITO ,  Takeshi MURAKAMI ,  Norio KIMURA

IPC分类号： G01N23/225

CPC分类号： G01N23/203 ,  G01N23/2251 ,  G01N2223/6116 ,  H01J37/28 ,  H01J2237/004 ,  H01J2237/022 ,  H01J2237/2446 ,  H01J2237/2817

摘要： The electron beam apparatus is provided with a stage for mounting a sample thereon, a primary optical system for generating an electron beam having an irradiation area and irradiating the electron beam onto the sample, a secondary optical system for detecting electrons which have been generated through the irradiation of the electron beam onto the sample and have acquired structural information of the sample and acquiring an image of the sample about a viewing area and an irradiation area changing section for changing the position of the irradiation area with respect to the viewing area.

摘要翻译： 电子束装置设置有用于在其上安装样品的载物台，用于产生具有照射区域并将电子束照射到样品上的电子束的主光学系统，用于检测通过 将电子束照射到样品上并获取样品的结构信息并获取关于观察区域的样品的图像和用于改变照射区域相对于观察区域的位置的照射区域改变部分。

公开(公告)号：US20090090863A1

公开(公告)日：2009-04-09

申请号：US12244139

申请日：2008-10-02

申请人： Kenji WATANABE ,  Masahiro HATAKEYAMA ,  Yoshihiko NAITO ,  Kenji TERAO

发明人： Kenji WATANABE ,  Masahiro HATAKEYAMA ,  Yoshihiko NAITO ,  Kenji TERAO

IPC分类号： G01N23/00

CPC分类号： G01N23/2251

摘要： A surface of a sample is observed by acquiring an image of the surface of the sample. An electron beam I irradiated onto the surface of the sample in which wiring including an insulation material and an electrically conductive material is formed. Electrons that acquired structure information regarding a structure of the surface of the sample are detected. An image of the surface of the sample is acquired by a result of the detection of electrons. The surface of the sample is observed using the acquired image of the surface of the sample. The electron beam is irradiated onto the surface of the sample in a state where a brightness of the insulation material and a brightness of the electrically conductive material in the image of the surface of the sample are set equal to each other.

摘要翻译： 通过获取样品表面的图像来观察样品的表面。 辐射到样品表面上的电子束I，其中形成了包括绝缘材料和导电材料的布线。 检测获取关于样品表面结构的结构信息的电子。 通过电子检测的结果获得样品表面的图像。 使用获取的样品表面的图像观察样品的表面。 在将样品表面的图像中的绝缘材料的亮度和导电材料的亮度设定为相等的状态下，将电子束照射在样品的表面上。