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公开(公告)号：US07185697B2
公开(公告)日：2007-03-06
申请号：US10933068
申请日：2004-09-02
申请人： Kenneth E. Goodson , Chuan-Hua Chen , David E. Huber , Linan Jiang , Thomas W. Kenny , Jae-Mo Koo , Daniel J. Laser , James C. Mikkelsen , Juan G. Santiago , Evelyn Ning-Yi Wang , Shulin Zeng , Lian Zhang
发明人： Kenneth E. Goodson , Chuan-Hua Chen , David E. Huber , Linan Jiang , Thomas W. Kenny , Jae-Mo Koo , Daniel J. Laser , James C. Mikkelsen , Juan G. Santiago , Evelyn Ning-Yi Wang , Shulin Zeng , Lian Zhang
CPC分类号： H01L23/473 , F04B19/006 , F28D15/00 , F28F2260/02 , H01L2224/16225 , H01L2224/32145 , H01L2224/32225 , H01L2224/45169 , H01L2224/48227 , H01L2224/73265 , H01L2225/06562 , H01L2924/01078 , H01L2924/01322 , H01L2924/09701 , H01L2924/10158 , H01L2924/10253 , H01L2924/1461 , H01L2924/3011 , H01L2924/00
摘要： Apparatus and methods according to the present invention preferably utilize electroosmotic pumps that are capable of generating high pressure and flow without moving mechanical parts and the associated generation of unacceptable electrical and acoustic noise, as well as the associated reduction in reliability. These electroosmotic pumps are preferably fabricated with materials and structures that improve performance, efficiency, and reduce weight and manufacturing cost relative to presently available micropumps. These electroosmotic pumps also preferably allow for recapture of evolved gases and deposited materials, which may provide for long-term closed-loop operation. Apparatus and methods according to the present invention also allow active regulation of the temperature of the device through electrical control of the flow through the pump and can utilize multiple cooling loops to allow independent regulation of the special and temporal characteristics of the device temperature profiles. Novel microchannel structures are also described.
摘要翻译： 根据本发明的装置和方法优选地利用电渗泵，其能够在不移动机械部件的情况下产生高压和流动，并且相关联地产生不可接受的电和噪声噪声以及相关联的可靠性降低。 这些电渗泵优选地由相对于目前可用的微量泵提高性能，效率以及降低重量和制造成本的材料和结构来制造。 这些电渗泵还优选地允许重新捕获可能提供长期闭环操作的放出气体和沉积材料。 根据本发明的装置和方法还允许通过电流控制通过泵的流动来主动调节装置的温度，并且可以利用多个冷却回路来允许独立调节装置温度曲线的特殊和时间特性。 还描述了新颖的微通道结构。
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公开(公告)号：US06991024B2
公开(公告)日：2006-01-31
申请号：US10607615
申请日：2003-06-27
申请人： Kenneth E. Goodson , Chuan-Hua Chen , David E. Huber , Linan Jiang , Thomas W. Kenny , Jae-Mo Koo , Daniel J. Laser , James C. Mikkelsen , Juan G. Santiago , Evelyn Ning-Yi Wang , Shulin Zeng , Lian Zhang
发明人： Kenneth E. Goodson , Chuan-Hua Chen , David E. Huber , Linan Jiang , Thomas W. Kenny , Jae-Mo Koo , Daniel J. Laser , James C. Mikkelsen , Juan G. Santiago , Evelyn Ning-Yi Wang , Shulin Zeng , Lian Zhang
IPC分类号： F28F7/00
CPC分类号： H01L23/473 , F04B19/006 , F28D15/00 , F28F2260/02 , H01L2224/16225 , H01L2224/32145 , H01L2224/32225 , H01L2224/45169 , H01L2224/48227 , H01L2224/73265 , H01L2225/06562 , H01L2924/01078 , H01L2924/01322 , H01L2924/09701 , H01L2924/10158 , H01L2924/10253 , H01L2924/1461 , H01L2924/3011 , H01L2924/00
摘要： Apparatus and methods according to the present invention preferably utilize electroosmotic pumps that are capable of generating high pressure and flow without moving mechanical parts and the associated generation of unacceptable electrical and acoustic noise, as well as the associated reduction in reliability. These electroosmotic pumps are preferably fabricated with materials and structures that improve performance, efficiency, and reduce weight and manufacturing cost relative to presently available micropumps. These electroosmotic pumps also preferably allow for recapture of evolved gases and deposited materials, which may provide for long-term closed-loop operation. Apparatus and methods according to the present invention also allow active regulation of the temperature of the device through electrical control of the flow through the pump and can utilize multiple cooling loops to allow independent regulation of the special and temporal characteristics of the device temperature profiles. Novel microchannel structures are also described.
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公开(公告)号：US07334630B2
公开(公告)日：2008-02-26
申请号：US11136793
申请日：2005-05-25
申请人： Kenneth E. Goodson , Chuan-Hua Chen , David E. Huber , Linan Jiang , Thomas W. Kenny , Jae-Mo Koo , Daniel J. Laser , James C. Mikkelsen , Juan G. Santiago , Evelyn Ning-Yi Wang , Shulin Zeng , Lian Zhang
发明人： Kenneth E. Goodson , Chuan-Hua Chen , David E. Huber , Linan Jiang , Thomas W. Kenny , Jae-Mo Koo , Daniel J. Laser , James C. Mikkelsen , Juan G. Santiago , Evelyn Ning-Yi Wang , Shulin Zeng , Lian Zhang
IPC分类号： H05K7/20
CPC分类号： H01L23/473 , F04B19/006 , F28D15/00 , F28F2260/02 , H01L2224/16225 , H01L2224/32145 , H01L2224/32225 , H01L2224/45169 , H01L2224/48227 , H01L2224/73265 , H01L2225/06562 , H01L2924/01078 , H01L2924/01322 , H01L2924/09701 , H01L2924/10158 , H01L2924/10253 , H01L2924/1461 , H01L2924/3011 , H01L2924/00
摘要： Apparatus and methods according to the present invention utilize micropumps that are capable of generating high pressure and flow without moving mechanical parts and the associated generation of unacceptable electrical and acoustic noise, as well as the associated reduction in reliability. These micropumps are fabricated with materials and structures that improve performance, efficiency, and reduce weight and manufacturing cost relative to presently available micropumps. These micropumps also can allow for recapture of evolved gases and deposited materials, which may provide for long-term closed-loop operation. Apparatus and methods according to the present invention also allow active regulation of the temperature of the device through electrical control of the flow through the pump and can utilize multiple cooling loops to allow independent regulation of the spatial and temporal characteristics of the device temperature profiles. Novel enclosed microchannel structures are also described.
摘要翻译： 根据本发明的装置和方法利用能够在不移动机械部件的情况下产生高压和流动以及相关的不可接受的电和噪声噪声的产生以及相关的可靠性降低的微型泵。 这些微型泵用与目前可用的微型泵相比提高性能，效率以及降低重量和制造成本的材料和结构制造。 这些微型泵还可以重新捕获可能提供长期闭环操作的演化气体和沉积材料。 根据本发明的装置和方法还允许通过电流控制通过泵的流动来主动调节装置的温度，并且可以利用多个冷却回路来允许独立调节装置温度曲线的空间和时间特性。 还描述了新的封闭微通道结构。
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公开(公告)号：US06942018B2
公开(公告)日：2005-09-13
申请号：US10053859
申请日：2002-01-19
申请人： Kenneth E. Goodson , Chuan-Hua Chen , David E. Huber , Linan Jiang , Thomas W. Kenny , Jae-Mo Koo , Daniel J. Laser , James C. Mikkelsen , Juan G. Santiago , Evelyn Ning-Yi Wang , Shulin Zeng , Lian Zhang
发明人： Kenneth E. Goodson , Chuan-Hua Chen , David E. Huber , Linan Jiang , Thomas W. Kenny , Jae-Mo Koo , Daniel J. Laser , James C. Mikkelsen , Juan G. Santiago , Evelyn Ning-Yi Wang , Shulin Zeng , Lian Zhang
IPC分类号： B81B1/00 , F04B19/00 , F04F99/00 , F25D1/02 , F25D9/00 , F28D15/00 , H01L23/473 , H05K7/20 , F28F7/00
CPC分类号： H01L23/473 , F04B19/006 , F28D15/00 , F28F2260/02 , H01L2224/16225 , H01L2224/32145 , H01L2224/32225 , H01L2224/45169 , H01L2224/48227 , H01L2224/73265 , H01L2225/06562 , H01L2924/01078 , H01L2924/01322 , H01L2924/09701 , H01L2924/10158 , H01L2924/10253 , H01L2924/1461 , H01L2924/3011 , H01L2924/00
摘要： Apparatus and methods according to the present invention preferably utilize electroosmotic pumps that are capable of generating high pressure and flow without moving mechanical parts and the associated generation of unacceptable electrical and acoustic noise, as well as the associated reduction in reliability. These electroosmotic pumps are preferably fabricated with materials and structures that improve performance, efficiency, and reduce weight and manufacturing cost relative to presently available micropumps. These electroosmotic pumps also preferably allow for recapture of evolved gases and deposited materials, which may provide for long-term closed-loop operation. Apparatus and methods according to the present invention also allow active regulation of the temperature of the device through electrical control of the flow through the pump and can utilize multiple cooling loops to allow independent regulation of the special and temporal characteristics of the device temperature profiles. Novel microchannel structures are also described.
摘要翻译： 根据本发明的装置和方法优选地利用电渗泵，其能够在不移动机械部件的情况下产生高压和流动，并且相关联地产生不可接受的电和噪声噪声以及相关联的可靠性降低。 这些电渗泵优选地由相对于目前可用的微量泵提高性能，效率以及降低重量和制造成本的材料和结构来制造。 这些电渗泵还优选地允许重新捕获可能提供长期闭环操作的放出气体和沉积材料。 根据本发明的装置和方法还允许通过电流控制通过泵的流动来主动调节装置的温度，并且可以利用多个冷却回路来允许独立调节装置温度曲线的特殊和时间特性。 还描述了新颖的微通道结构。
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公开(公告)号：US07131486B2
公开(公告)日：2006-11-07
申请号：US10385086
申请日：2003-03-10
申请人： Kenneth E. Goodson , Chuan-Hua Chen , David E. Huber , Linan Jiang , Thomas W. Kenny , Jae-Mo Koo , Daniel J. Laser , James C. Mikkelsen , Juan G. Santiago , Evelyn Ning-Yi Wang , Shulin Zeng , Lian Zhang
发明人： Kenneth E. Goodson , Chuan-Hua Chen , David E. Huber , Linan Jiang , Thomas W. Kenny , Jae-Mo Koo , Daniel J. Laser , James C. Mikkelsen , Juan G. Santiago , Evelyn Ning-Yi Wang , Shulin Zeng , Lian Zhang
IPC分类号： F28F7/00
CPC分类号： H01L23/473 , F04B19/006 , F28D15/00 , F28F2260/02 , H01L2224/16225 , H01L2224/32145 , H01L2224/32225 , H01L2224/45169 , H01L2224/48227 , H01L2224/73265 , H01L2225/06562 , H01L2924/01078 , H01L2924/01322 , H01L2924/09701 , H01L2924/10158 , H01L2924/10253 , H01L2924/1461 , H01L2924/3011 , H01L2924/00
摘要： Apparatus and methods according to the present invention preferably utilize electroosmotic pumps that are capable of generating high pressure and flow without moving mechanical parts and the associated generation of unacceptable electrical and acoustic noise, as well as the associated reduction in reliability. These electroosmotic pumps are preferably fabricated with materials and structures that improve performance, efficiency, and reduce weight and manufacturing cost relative to presently available micropumps. These electroosmotic pumps also preferably allow for recapture of evolved gases and deposited materials, which may provide for long-term closed-loop operation. Apparatus and methods according to the present invention also allow active regulation of the temperature of the device through electrical control of the flow through the pump and can utilize multiple cooling loops to allow independent regulation of the special and temporal characteristics of the device temperature profiles. Novel microchannel structures are also described.
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