公开(公告)号：US20070097694A1

公开(公告)日：2007-05-03

申请号：US11263313

申请日：2005-10-31

申请人： Kenneth Faase ,  James McKinnell ,  Arthur Piehl ,  Murali Chaparala ,  James Przybyla ,  Bao Yeh ,  Adel Jilani ,  Eric Nikkel

发明人： Kenneth Faase ,  James McKinnell ,  Arthur Piehl ,  Murali Chaparala ,  James Przybyla ,  Bao Yeh ,  Adel Jilani ,  Eric Nikkel

IPC分类号： F21V17/02

CPC分类号： G02B26/001 ,  G01J3/26

摘要： Systems, methodologies, and other embodiments associated with a micro-electrical-mechanical system (MEMS) Fabry-Perot interferometric device (FPID) are described. Fabricating a MEMS FPID may include fabricating a pixel plate and a reflector plate so a Fabry-Perot cavity is defined therebetween. Fabrication may include producing a capacitor plate that facilitates electrostatically moving the pixel plate. Fabrication may include producing electrical connections between plates and producing circuitry to control plate voltages to facilitate creating an electrostatic force between plates. The MEMS FPID may include stops fabricated from a conductive material and circuitry for maintaining the stops and plates at an electrical potential that will yield a zero electric field contact event.

摘要翻译： 描述了与微机电系统（MEMS）法布里 - 珀罗干涉仪（FPID）相关联的系统，方法和其它实施例。 制造MEMS FPID可以包括制造像素板和反射板，从而在其间限定法布里 - 珀罗腔。 制造可以包括制造有助于静电移动像素板的电容器板。 制造可以包括在板之间产生电连接并产生电路以控制板电压以便于在板之间产生静电力。 MEMS FPID可以包括由导电材料制成的止动件和用于将止动器和板保持在将产生零电场接触事件的电势的电路。

公开(公告)号：US20060227404A1

公开(公告)日：2006-10-12

申请号：US11093835

申请日：2005-03-29

申请人： Kenneth Faase ,  Adel Jilani

发明人： Kenneth Faase ,  Adel Jilani

IPC分类号： G02B26/00

CPC分类号： G02B26/001 ,  A61K31/19 ,  A61K33/00 ,  A61K33/06 ,  A61K33/08 ,  A61K33/30 ,  A61K33/38 ,  A61K47/6949 ,  B82Y5/00

摘要： A light modulator device includes a bottom charge plate, a top charge plate, and a pixel plate supported by at least one flexure, wherein the flexure is a piece-wise linear flexure.

公开(公告)号：US20060056004A1

公开(公告)日：2006-03-16

申请号：US10940948

申请日：2004-09-14

申请人： Adel Jilani ,  Charles Schmidt ,  Kenneth Faase

发明人： Adel Jilani ,  Charles Schmidt ,  Kenneth Faase

IPC分类号： G02B26/00

CPC分类号： B81C1/00182 ,  B81B2201/047 ,  G02B26/0841 ,  Y10S345/903 ,  Y10S345/905

摘要： An apparatus includes a first member, a second member and a flexure. The flexure has a central portion connected to the first member, outer portions connected to the second member and an intermediate portion spaced from the first member and the second member.

公开(公告)号：US06894824B2

公开(公告)日：2005-05-17

申请号：US10678007

申请日：2003-10-02

申请人： James Guo ,  Adel Jilani ,  Kenneth Faase

发明人： James Guo ,  Adel Jilani ,  Kenneth Faase

IPC分类号： G02B26/08 ,  G02B26/00 ,  G02B5/08 ,  G02B26/02

CPC分类号： G02B26/0841 ,  Y10S359/904

摘要： A method and apparatus providing a micro-mirror device configured to increase a switching frequency thereof. The micro-mirror device includes a substrate with at least one address electrode positioned over the substrate to provide an electrostatic force and includes at least one support member positioned over the substrate and extending upward above the substrate. The micro-mirror device also includes a mirror and a spring member. The mirror is disposed over the at least one address electrode and coupled to the at least one support member. The mirror is configured to deflect toward the substrate in response to the at least one address electrode applying the electrostatic force to the mirror. The spring member is spaced apart between the substrate and the mirror and coupled to the at least one support member. The spring member is operable to deflect separately from the mirror and toward the substrate.

摘要翻译： 提供构造成增加其开关频率的微镜装置的方法和装置。 微反射镜装置包括具有至少一个地址电极的衬底，该至少一个寻址电极位于衬底上方以提供静电力，并且包括定位在衬底上并在衬底上方向上延伸的至少一个支撑构件。 微镜装置还包括反射镜和弹簧构件。 镜子设置在至少一个地址电极上并且耦合到至少一个支撑构件。 响应于至少一个寻址电极将反射镜施加静电力，镜被配置为朝向衬底偏转。 弹簧构件在衬底和反射镜之间间隔开并且联接到至少一个支撑构件。 弹簧构件可操作以与镜子分离地朝向衬底偏转。

公开(公告)号：US20050073736A1

公开(公告)日：2005-04-07

申请号：US10678007

申请日：2003-10-02

申请人： James Guo ,  Adel Jilani ,  Kenneth Faase

发明人： James Guo ,  Adel Jilani ,  Kenneth Faase

IPC分类号： G02B26/08 ,  G02B26/00

CPC分类号： G02B26/0841 ,  Y10S359/904

摘要： A method and apparatus providing a micro-mirror device configured to increase a switching frequency thereof. The micro-mirror device includes a substrate with at least one address electrode positioned over the substrate to provide an electrostatic force and includes at least one support member positioned over the substrate and extending upward above the substrate. The micro-mirror device also includes a mirror and a spring member. The mirror is disposed over the at least one address electrode and coupled to the at least one support member. The mirror is configured to deflect toward the substrate in response to the at least one address electrode applying the electrostatic force to the mirror. The spring member is spaced apart between the substrate and the mirror and coupled to the at least one support member. The spring member is operable to deflect separately from the mirror and toward the substrate.

摘要翻译： 提供构造成增加其开关频率的微镜装置的方法和装置。 微反射镜装置包括具有至少一个地址电极的衬底，该至少一个寻址电极位于衬底上方以提供静电力，并且包括定位在衬底上并在衬底上方向上延伸的至少一个支撑构件。 微镜装置还包括反射镜和弹簧构件。 镜子设置在至少一个地址电极上并且耦合到至少一个支撑构件。 响应于至少一个寻址电极将反射镜施加静电力，镜被配置为朝向衬底偏转。 弹簧构件在衬底和反射镜之间间隔开并且联接到至少一个支撑构件。 弹簧构件可操作以与镜子分离地朝向衬底偏转。

公开(公告)号：US20070064295A1

公开(公告)日：2007-03-22

申请号：US11233225

申请日：2005-09-21

申请人： Kenneth Faase ,  Adel Jilani ,  James McKinnell ,  Eric Nikkel ,  Arthur Piehl ,  James Przybyla ,  Bao-Sung Yeh

发明人： Kenneth Faase ,  Adel Jilani ,  James McKinnell ,  Eric Nikkel ,  Arthur Piehl ,  James Przybyla ,  Bao-Sung Yeh

IPC分类号： G02F1/03

CPC分类号： G02B26/001

摘要： An electronic light modulator device for at least partially displaying a pixel of an image, the device comprising first and second reflectors defining an optical cavity therebetween, the optical cavity being selective of an electromagnetic wavelength at an intensity by optical interference, the device having at least first and second optical states, at least one of the optical states being tunable and the other not tunable.

摘要翻译： 一种用于至少部分地显示图像的像素的电子光调制器装置，所述装置包括在其间限定光腔的第一和第二反射器，所述光腔具有通过光学干涉的强度的电磁波长的选择性，所述装置至少具有 第一和第二光学状态，光学状态中的至少一个是可调谐的，另一个不可调谐。

公开(公告)号：US07046415B2

公开(公告)日：2006-05-16

申请号：US10719222

申请日：2003-11-21

申请人： Adel Jilani ,  James Guo ,  Kenneth Faase

发明人： Adel Jilani ,  James Guo ,  Kenneth Faase

IPC分类号： G02F1/03 ,  G02F1/07

CPC分类号： G02B26/0841

摘要： A micro-mirror device includes a micro-mirror and a flexure spring supporting the micro-mirror. The flexure spring is configured to store potential energy during movement of the micro-mirror that is released as kinetic energy to drive movement of the micro-mirror when the micro-mirror is re-oriented.

摘要翻译： 微镜装置包括微镜和支撑微镜的​​挠曲弹簧。 弯曲弹簧构造成在微反射镜移动期间存储势能，作为动能释放，以在微反射镜被重新定向时驱动微反射镜的移动。

公开(公告)号：US20050122562A1

公开(公告)日：2005-06-09

申请号：US11039418

申请日：2005-01-19

申请人： James Guo ,  Adel Jilani ,  Kenneth Faase

发明人： James Guo ,  Adel Jilani ,  Kenneth Faase

IPC分类号： G02B26/08 ,  G02B26/00

CPC分类号： G02B26/0841 ,  Y10S359/904

摘要： A method and apparatus providing a micro-mirror device configured to increase a switching frequency thereof. The micro-mirror device includes a substrate with at least one address electrode positioned over the substrate to provide an electrostatic force and includes at least one support member positioned over the substrate and extending upward above the substrate. The micro-mirror device also includes a mirror and a spring member. The mirror is disposed over the at least one address electrode and coupled to the at least one support member. The mirror is configured to deflect toward the substrate in response to the at least one address electrode applying the electrostatic force to the mirror. The spring member is spaced apart between the substrate and the mirror and coupled to the at least one support member. The spring member is operable to deflect separately from the mirror and toward the substrate.

公开(公告)号：US20050111069A1

公开(公告)日：2005-05-26

申请号：US10719222

申请日：2003-11-21

申请人： Adel Jilani ,  James Guo ,  Kenneth Faase

发明人： Adel Jilani ,  James Guo ,  Kenneth Faase

IPC分类号： G02B26/08 ,  G02F1/03 ,  G02F1/07

CPC分类号： G02B26/0841

摘要： A micro-mirror device includes a micro-mirror and a flexure spring supporting the micro-mirror. The flexure spring is configured to store potential energy during movement of the micro-mirror that is released as kinetic energy to drive movement of the micro-mirror when the micro-mirror is re-oriented.

摘要翻译： 微镜装置包括微镜和支撑微镜的​​挠曲弹簧。 弯曲弹簧构造成在微反射镜移动期间存储势能，作为动能释放，以在微反射镜被重新定向时驱动微反射镜的移动。

公开(公告)号：US06999228B2

公开(公告)日：2006-02-14

申请号：US10793977

申请日：2004-03-05

申请人： Kenneth Faase ,  Adel Jilani ,  James Guo ,  Tony S. Cruz-Uribe

发明人： Kenneth Faase ,  Adel Jilani ,  James Guo ,  Tony S. Cruz-Uribe

IPC分类号： G02B26/00 ,  G02B26/08

CPC分类号： G02B26/0841 ,  B81B3/0045 ,  B81B2201/042 ,  B81B2203/0109 ,  B81B2203/058 ,  G02B1/06 ,  Y10S359/904

摘要： A method and apparatus providing a micro-mirror device configured to increase actuation speed thereof. The micro-mirror device includes a substrate, a mirror, a spring member and at least one adjacent micro-mirror device. The mirror is suspended over the substrate and configured to deflect in response to an actuation force. The spring member is suspended between the substrate and the mirror. Further, the spring member is configured to store energy upon being deflected by the mirror and is configured to release the stored energy to force the mirror to another position. The at least one adjacent micro-mirror device is positioned over the substrate adjacent the mirror and is configured to suspend the spring member.

摘要翻译： 提供构造成增加其致动速度的微镜装置的方法和装置。 微反射镜装置包括基板，反射镜，弹簧构件和至少一个相邻的微反射镜装置。 反射镜悬挂在基板上并被配置为响应于致动力而偏转。 弹簧构件悬挂在基板和反射镜之间。 此外，弹簧构件构造成在被反射镜偏转时存储能量，并且被配置为释放存储的能量以迫使反射镜进入另一位置。 所述至少一个相邻的微反射镜装置位于与所述反射镜相邻的所述基板上方并且被配置为悬挂所述弹簧构件。