公开(公告)号：US20230026608A1

公开(公告)日：2023-01-26

申请号：US17749174

申请日：2022-05-20

Applicant: Keyence Corporation

Inventor： Kaoru KANAYAMA ,  Takashi ATORO

IPC: G01B11/02 ,  G06T7/60 ,  G01B11/25

Abstract: Provided are a shape inspection device, a processing device, a height image processing method, and a height image processing program capable of accurately inspecting a measurement object. A profile data generation unit sequentially generates a plurality of pieces of profile data as the measurement object relatively moves in a Y-axis direction. A height image generation unit extracts characteristic points for the respective pieces of profile data, and moves the respective pieces of profile data in a plane intersecting with a Y axis such that the extracted characteristic points are aligned in a line in a direction corresponding to the Y axis. Then, the height image generation unit arranges the moved profile data in a direction corresponding to the Y axis to correct a height image.

公开(公告)号：US20250076032A1

公开(公告)日：2025-03-06

申请号：US18780601

申请日：2024-07-23

Applicant: Keyence Corporation

Inventor： Akira FUYUNO ,  Tatsuro HOMMA ,  Kaoru KANAYAMA

IPC: G01B11/25

Abstract: An optical displacement meter that measures a cross-sectional profile of a workpiece, and includes: a light projecting/receiving module including a light projecting unit that emits slit light extending in an X direction, a light receiving lens that collects reflected light of the slit light reflected by the workpiece, and an imaging unit that receives light collected by the light receiving lens; a motor that integrally rotates the light projecting/receiving module; and a control unit that controls the motor to scan the slit light in a direction orthogonal to the X direction. A rotation angle is limited to prevent specularly reflected light reflected from a specular reflection surface from being captured by the imaging unit when the light projecting unit irradiates the workpiece having the specular reflection surface parallel to an X-Y plane extending in the X direction and a Y direction with the slit light.

公开(公告)号：US20240271925A1

公开(公告)日：2024-08-15

申请号：US18644184

申请日：2024-04-24

Applicant: Keyence Corporation

Inventor： Kaoru KANAYAMA ,  Takashi ATORO

IPC: G01B11/02 ,  G01B11/25 ,  G06T7/50 ,  G06T7/60

CPC classification number: G01B11/022 ,  G01B11/2518 ,  G06T7/50 ,  G06T7/60 ,  G06T2207/10016

Abstract: Provided are a shape inspection device, a processing device, a height image processing method, and a height image processing program capable of accurately inspecting a measurement object. A profile data generation unit sequentially generates a plurality of pieces of profile data as the measurement object relatively moves in a Y-axis direction. A height image generation unit extracts characteristic points for the respective pieces of profile data, and moves the respective pieces of profile data in a plane intersecting with a Y axis such that the extracted characteristic points are aligned in a line in a direction corresponding to the Y axis. Then, the height image generation unit arranges the moved profile data in a direction corresponding to the Y axis to correct a height image.