公开(公告)号：US12078922B2

公开(公告)日：2024-09-03

申请号：US17472387

申请日：2021-09-10

Applicant: Kioxia Corporation

Inventor： Takashi Sato ,  Takeshi Suto ,  Satoshi Mitsugi

IPC: G03F1/42 ,  G01B11/27 ,  G03F7/00 ,  G03F9/00 ,  H01L23/544

CPC classification number: G03F1/42 ,  G01B11/27 ,  G03F7/0002 ,  G03F9/7042 ,  H01L23/544 ,  H01L2223/54426 ,  H01L2223/54466

Abstract: A template of one embodiment includes an alignment mark. The alignment mark includes a first main pattern and a first auxiliary pattern. In the first main pattern, a first part and a second part are disposed according to a predetermined repeating pattern. The first auxiliary pattern is configured as a pattern opposite to the repeating pattern in a region outside an end of the first main pattern.