公开(公告)号：US11112344B2

公开(公告)日：2021-09-07

申请号：US16807459

申请日：2020-03-03

申请人： Kioxia Corporation ,  RION Co., Ltd.

发明人： Hiroshi Tomita ,  Hidekazu Hayashi ,  Eishi Shiobara ,  Kaoru Kondo ,  Takuya Tabuchi ,  Kazuna Bando ,  Sota Kondo

IPC分类号： G01N15/14 ,  G01N15/02 ,  G01N21/53 ,  G01N15/00

摘要： According to one embodiment, a particle measuring method is disclosed. The method includes irradiating a detection liquid with light. The detection liquid contains methyl salicylate. The method further includes converting scattered light from the detection liquid into an electric signal by using photoelectric conversion after irradiating the detection liquid with the light. The method further includes performing a particle measurement on the detection liquid by using the electric signal.

公开(公告)号：US11366380B2

公开(公告)日：2022-06-21

申请号：US17003929

申请日：2020-08-26

申请人： KIOXIA CORPORATION

发明人： Eishi Shiobara

IPC分类号： G03F1/24

摘要： According to one embodiment, a reflective mask comprises a reflection layer including a first region having a plurality of first patterns, a second region surrounding the first region, and a third region within the second region. The reflection layer includes a stack of alternating first layers and second layers. An absorber film covers the second region and has a second pattern that includes an opening exposing a portion of the third region. In some examples, the third region can include a plurality of third patterns therein.