公开(公告)号：US07518676B2

公开(公告)日：2009-04-14

申请号：US11369953

申请日：2006-03-08

申请人： Kiyoshi Minoura ,  Shun Ueki ,  Yasuhisa Itoh ,  Ichiroh Ihara ,  Yutaka Sawayama ,  Kohji Taniguchi

发明人： Kiyoshi Minoura ,  Shun Ueki ,  Yasuhisa Itoh ,  Ichiroh Ihara ,  Yutaka Sawayama ,  Kohji Taniguchi

IPC分类号： G02F1/1335 ,  G02B5/124

CPC分类号： G02F1/133553 ,  G02B5/124 ,  G02F1/1334

摘要： A method of making a micro corner cube array includes the steps of: preparing a substrate, at least a surface portion of which consists of cubic single crystals and which has a surface that is substantially parallel to {111} planes of the crystals; and etching the surface of the substrate anisotropically, thereby forming a plurality of unit elements for the micro corner cube array on the surface of the substrate. Each of these unit elements is made up of a number of crystal planes that have been formed at a lower etch rate than the {111} planes of the crystals.

摘要翻译： 制造微角立方体阵列的方法包括以下步骤：制备基底，其至少其表面部分由立方单晶构成，并具有基本平行于晶体{111}面的表面; 并且各向异性地蚀刻衬底的表面，从而在衬底的表面上形成多个用于微角形立方体阵列的单元元件。 这些单位元件中的每一个由已经以比晶体的{111}平面更低的蚀刻速率形成的多个晶面构成。

公开(公告)号：US07098976B2

公开(公告)日：2006-08-29

申请号：US10171651

申请日：2002-06-17

申请人： Kiyoshi Minoura ,  Shun Ueki ,  Yasuhisa Itoh ,  Ichiroh Ihara ,  Yutaka Sawayama ,  Kohji Taniguchi

发明人： Kiyoshi Minoura ,  Shun Ueki ,  Yasuhisa Itoh ,  Ichiroh Ihara ,  Yutaka Sawayama ,  Kohji Taniguchi

IPC分类号： G02F1/1335 ,  G02B5/122 ,  G02B5/124

CPC分类号： G02F1/133553 ,  G02B5/124 ,  G02F1/1334

摘要： A method of making a micro corner cube array includes the steps of: preparing a substrate, at least a surface portion of which consists of cubic single crystals and which has a surface that is substantially parallel to {111} planes of the crystals; and etching the surface of the substrate anisotropically, thereby forming a plurality of unit elements for the micro corner cube array on the surface of the substrate. Each of these unit elements is made up of a number of crystal planes that have been formed at a lower etch rate than the {111} planes of the crystals.

公开(公告)号：US20060146237A1

公开(公告)日：2006-07-06

申请号：US11369953

申请日：2006-03-08

申请人： Kiyoshi Minoura ,  Shun Ueki ,  Yasuhisa Itoh ,  Ichiroh Ihara ,  Yutaka Sawayama ,  Kohji Taniguchi

发明人： Kiyoshi Minoura ,  Shun Ueki ,  Yasuhisa Itoh ,  Ichiroh Ihara ,  Yutaka Sawayama ,  Kohji Taniguchi

IPC分类号： G02F1/1335

CPC分类号： G02F1/133553 ,  G02B5/124 ,  G02F1/1334

摘要： A method of making a micro corner cube array includes the steps of: preparing a substrate, at least a surface portion of which consists of cubic single crystals and which has a surface that is substantially parallel to {111} planes of the crystals; and etching the surface of the substrate anisotropically, thereby forming a plurality of unit elements for the micro corner cube array on the surface of the substrate. Each of these unit elements is made up of a number of crystal planes that have been formed at a lower etch rate than the {111} planes of the crystals.