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公开(公告)号：US20120262689A1
公开(公告)日：2012-10-18
申请号：US13517480
申请日：2010-11-19
IPC分类号： G03B27/54
CPC分类号： G03F7/70116 , G03F7/70075
摘要： In a lithographic apparatus, an illumination mode is set using a field mirror that includes a plurality of movable facets to direct radiation to selectable positions on a pupil facet mirror. A base illumination mode is selected from a set of predetermined illumination modes and the movable facets are set to effect that mode. In order to adjust an imaging parameter, a fraction of the movable facets are set to different positions. The determination of which facets to set to different positions is based on summing the effects of setting each facet to a different position.
摘要翻译： 在光刻设备中，使用包括多个可移动小面的场反射镜来设置照明模式，以将辐射引导到瞳孔面反射镜上的可选位置。 从一组预定照明模式中选择基本照明模式，并且可移动小面被设置为实现该模式。 为了调整成像参数，可移动小面的一部分被设定为不同的位置。 确定哪些面设置到不同的位置是基于将每个方面设置为不同位置的效果的总和。
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2.发明授权Illumination system, lithographic apparatus and method of forming an illumination mode 有权照明系统，光刻设备和形成照明模式的方法公开(公告)号：US09134629B2
公开(公告)日：2015-09-15
申请号：US13203773
申请日：2010-02-25
申请人： Erik Roelof Loopstra , Koen Van Ingen Schenau , Jan Bernard Plechelmus Van Schoot , Christian Wagner , Gosse Charles De Vries
发明人： Erik Roelof Loopstra , Koen Van Ingen Schenau , Jan Bernard Plechelmus Van Schoot , Christian Wagner , Gosse Charles De Vries
IPC分类号： G03F7/20
CPC分类号： G03F7/70825 , G03F7/70075 , G03F7/70116
摘要： An illumination system of a lithographic apparatus includes a plurality of reflective elements arranged to receive radiation from a radiation source, the reflective elements being movable between different orientations. In the different orientations, the reflective elements direct radiation towards different locations at a reflective component in a pupil plane of the illumination system, thereby forming different illumination modes. Each reflective element is moveable between a first orientation, which directs radiation towards a first location the pupil plane, and a second orientation, which directs radiation towards a second location in the pupil plane. The first orientation and the second orientation of the reflective element are defined by end stops.
摘要翻译： 光刻设备的照明系统包括被布置成接收来自辐射源的辐射的多个反射元件，所述反射元件可在不同取向之间移动。 在不同的取向中，反射元件将辐射定向到照明系统的光瞳平面中的反射分量处的不同位置，从而形成不同的照明模式。 每个反射元件可以在将辐射引导到瞳孔平面的第一位置的第一取向和朝向瞳孔平面中的第二位置引导辐射的第二取向之间移动。 反射元件的第一方向和第二方向由端点限定。
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公开(公告)号：US20120229787A1
公开(公告)日：2012-09-13
申请号：US13510518
申请日：2010-09-08
IPC分类号： G03B27/72
CPC分类号： G03F7/70425 , G02B26/0833 , G02B27/0068 , G03F7/70075 , G03F7/70116 , G03F7/70191
摘要： In a lithographic apparatus, an illumination mode is set using a field mirror comprising a plurality of movable facets to direct radiation to selectable positions on a pupil facet mirror. In the event that a field facet mirror is defective and cannot be set to a desired position, another of the movable facet mirrors is set to a corrective position, different than its desired position, to at least partially ameliorate a deleterious effect of the defective facet mirror.
摘要翻译： 在光刻设备中，使用包括多个可移动小面的场反射镜来设置照明模式，以将辐射引导到瞳孔面反射镜上的可选位置。 在场面反射镜有缺陷并且不能被设置到期望位置的情况下，可移动刻面镜中的另一个被设置为与其期望位置不同的校正位置，以至少部分地改善缺陷面的有害影响 镜子。
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4.发明申请ILLUMINATION SYSTEM, LITHOGRAPHIC APPARATUS AND METHOD OF FORMING AN ILLUMINATION MODE 有权照明系统，光刻设备和形成照明模式的方法公开(公告)号：US20120013882A1
公开(公告)日：2012-01-19
申请号：US13203773
申请日：2010-02-25
申请人： Erik Roelof Loopstra , Koen Van Ingen Schenau , Jan Bernard Plechelmus Van Schoot , Christian Wagner , Gosse Charles De Vries
发明人： Erik Roelof Loopstra , Koen Van Ingen Schenau , Jan Bernard Plechelmus Van Schoot , Christian Wagner , Gosse Charles De Vries
CPC分类号： G03F7/70825 , G03F7/70075 , G03F7/70116
摘要： An illumination system of a lithographic apparatus includes a plurality of reflective elements arranged to receive radiation from a radiation source, the reflective elements being movable between different orientations. In the different orientations, the reflective elements direct radiation towards different locations at a reflective component in a pupil plane of the illumination system, thereby forming different illumination modes. Each reflective element is moveable between a first orientation, which directs radiation towards a first location the pupil plane, and a second orientation, which directs radiation towards a second location in the pupil plane. The first orientation and the second orientation of the reflective element are defined by end stops.
摘要翻译： 光刻设备的照明系统包括被布置成接收来自辐射源的辐射的多个反射元件，所述反射元件可在不同取向之间移动。 在不同的取向中，反射元件将辐射定向到照明系统的光瞳平面中的反射分量处的不同位置，从而形成不同的照明模式。 每个反射元件可以在将辐射引导到瞳孔平面的第一位置的第一取向和朝向瞳孔平面中的第二位置引导辐射的第二取向之间移动。 反射元件的第一方向和第二方向由端点限定。
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5.发明授权Lithographic apparatus and device manufacturing method with corrective positioning of reflective element 有权平版印刷设备和反射元件校正定位的器件制造方法公开(公告)号：US09170500B2
公开(公告)日：2015-10-27
申请号：US13510518
申请日：2010-09-08
CPC分类号： G03F7/70425 , G02B26/0833 , G02B27/0068 , G03F7/70075 , G03F7/70116 , G03F7/70191
摘要： In a lithographic apparatus, an illumination mode is set using a field mirror comprising a plurality of movable facets to direct radiation to selectable positions on a pupil facet mirror. In the event that a field facet mirror is defective and cannot be set to a desired position, another of the movable facet mirrors is set to a corrective position, different than its desired position, to at least partially ameliorate a deleterious effect of the defective facet mirror.
摘要翻译： 在光刻设备中，使用包括多个可移动小面的场反射镜来设置照明模式，以将辐射引导到瞳孔面反射镜上的可选位置。 在场面反射镜有缺陷并且不能被设置到期望位置的情况下，可移动刻面镜中的另一个被设置为与其期望位置不同的校正位置，以至少部分地改善缺陷面的有害影响 镜子。
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6.发明授权Illumination system for lithographic apparatus with control system to effect an adjustment of an imaging parameter 有权用于具有控制系统的光刻设备的照明系统以实现成像参数的调整公开(公告)号：US09052605B2
公开(公告)日：2015-06-09
申请号：US13517480
申请日：2010-11-19
IPC分类号： G03F7/20
CPC分类号： G03F7/70116 , G03F7/70075
摘要： In a lithographic apparatus, an illumination mode is set using a field mirror that includes a plurality of movable facets to direct radiation to selectable positions on a pupil facet mirror. A base illumination mode is selected from a set of predetermined illumination modes and the movable facets are set to effect that mode. In order to adjust an imaging parameter, a fraction of the movable facets are set to different positions. The determination of which facets to set to different positions is based on summing the effects of setting each facet to a different position.
摘要翻译： 在光刻设备中，使用包括多个可移动小面的场反射镜来设置照明模式，以将辐射引导到瞳孔面反射镜上的可选位置。 从一组预定照明模式中选择基本照明模式，并且可移动小面被设置为实现该模式。 为了调整成像参数，可移动小面的一部分被设定为不同的位置。 确定哪些面设置到不同的位置是基于将每个方面设置为不同位置的效果的总和。
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7.发明申请ILLUMINATION SYSTEM, LITHOGRAPHIC APPARATUS AND METHOD OF ADJUSTING AN ILLUMINATION MODE 有权照明系统，平面设备和调节照明模式的方法公开(公告)号：US20120154777A1
公开(公告)日：2012-06-21
申请号：US13392022
申请日：2010-03-18
申请人： Gosse Charles De Vries , Edwin Johan Buis , Marinus Johannes Maria Vandam , Jan Bernard Plechelmus Van Schoot , Fidelus Adrianus Boon , Hermanus Johannes Maria Kreuwel
发明人： Gosse Charles De Vries , Edwin Johan Buis , Marinus Johannes Maria Vandam , Jan Bernard Plechelmus Van Schoot , Fidelus Adrianus Boon , Hermanus Johannes Maria Kreuwel
CPC分类号： G03F7/70116 , G03F7/70075
摘要： An illumination system is disclosed that had a plurality of moveable reflective elements and associated actuators which may be configured to form an illumination mode. One or more of the actuators is arranged to move between first, second and third positions, and so move an associated moveable reflective element between first, second and third orientations, the first and second orientations being such that radiation reflected from the moveable reflective element forms part of the illumination mode, and the third orientation being such that radiation reflected from the moveable reflective element does not form part of the illumination mode.
摘要翻译： 公开了一种照明系统，其具有多个可移动反射元件和相关联的致动器，其可被配置为形成照明模式。 一个或多个致动器布置成在第一，第二和第三位置之间移动，并且因此在第一，第二和第三取向之间移动相关联的可移动反射元件，第一和第二取向使得从可移动反射元件反射的辐射形成 照明模式的一部分，并且第三取向使得从可移动反射元件反射的辐射不会形成照明模式的一部分。
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8.发明授权Illumination system, lithographic apparatus and method of adjusting an illumination mode 有权照明系统，光刻设备和调节照明模式的方法公开(公告)号：US08867021B2
公开(公告)日：2014-10-21
申请号：US13392022
申请日：2010-03-18
申请人： Gosse Charles De Vries , Edwin Johan Buis , Marinus Johannes Maria Van Dam , Jan Bernard Plechelmus Van Schoot , Fidelus Adrianus Boon , Hermanus Johannes Maria Kreuwel
发明人： Gosse Charles De Vries , Edwin Johan Buis , Marinus Johannes Maria Van Dam , Jan Bernard Plechelmus Van Schoot , Fidelus Adrianus Boon , Hermanus Johannes Maria Kreuwel
CPC分类号： G03F7/70116 , G03F7/70075
摘要： An illumination system is disclosed that had a plurality of moveable reflective elements and associated actuators which may be configured to form an illumination mode. One or more of the actuators is arranged to move between first, second and third positions, and so move an associated moveable reflective element between first, second and third orientations, the first and second orientations being such that radiation reflected from the moveable reflective element forms part of the illumination mode, and the third orientation being such that radiation reflected from the moveable reflective element does not form part of the illumination mode.
摘要翻译： 公开了一种照明系统，其具有多个可移动反射元件和相关联的致动器，其可被配置为形成照明模式。 一个或多个致动器布置成在第一，第二和第三位置之间移动，并且因此在第一，第二和第三取向之间移动相关联的可移动反射元件，第一和第二取向使得从可移动反射元件反射的辐射形成 照明模式的一部分，并且第三取向使得从可移动反射元件反射的辐射不会形成照明模式的一部分。
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公开(公告)号：US20120105818A1
公开(公告)日：2012-05-03
申请号：US13378913
申请日：2010-06-07
CPC分类号： G03F7/702 , G03F7/70075 , G03F7/70116
摘要： An illumination system having a plurality of reflective elements, the reflective elements being movable between different orientations which direct radiation towards different locations in a pupil plane, thereby forming different illumination modes. Each reflective element is moveable to a first orientation in which it directs radiation to a location in an inner illumination location group, to a second orientation in which it directs radiation to a location in an intermediate illumination location group, and to a third orientation in which it directs radiation to a location in an outer illumination location group. The reflective elements are configured to be oriented to direct equal amounts of radiation towards the inner, intermediate and outer illumination location groups, and are configured to be oriented such that they can direct substantially no radiation into the outer illumination location group and direct substantially equal amounts of radiation towards the inner and intermediate illumination location groups.
摘要翻译： 一种具有多个反射元件的照明系统，所述反射元件可在不同取向之间移动，所述不同取向将辐射导向光瞳平面中的不同位置，从而形成不同的照明模式。 每个反射元件可移动到第一取向，其中它将辐射引导到内照明位置组中的位置，到第二方向，其中它将辐射引导到中间照明位置组中的位置，并且其中第三方向 它将辐射引导到外部照明位置组中的位置。 反射元件被配置为被定向成将等量的辐射引导到内部，中间和外部照明位置组，并且被配置为被定向成使得它们可以基本上不将辐射引导到外部照明位置组中并且引导基本相等的量 的辐射朝向内部和中间照明位置组。
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公开(公告)号：US20120262690A1
公开(公告)日：2012-10-18
申请号：US13518301
申请日：2010-11-29
申请人： Wilhelmus Petrus De Boeij , Erik Roelof Loopstra , Uwe Mickan , Jan Bernard Plechelmus Van Schoot , Gosse Charles De Vries
发明人： Wilhelmus Petrus De Boeij , Erik Roelof Loopstra , Uwe Mickan , Jan Bernard Plechelmus Van Schoot , Gosse Charles De Vries
IPC分类号： G03B27/54
CPC分类号： G03F7/70116 , G03F7/70075
摘要： An illumination system includes a field-facet mirror-device and a pupil mirror configured to condition a beam of radiation incident on the field-facet mirror-device. The field-facet mirror-device includes reflective field facets movable between first and second orientations relative to the incident beam. The field facets in their first orientations are effective to reflect the incident radiation towards respective reflective pupil facets so as to form part of a conditioned beam reflected from the pupil-facet mirror-device. The field facets in their second orientations are effective to reflect the incident radiation onto respective areas of the pupil-facet mirror-device designated as beam dump areas. The areas are arranged to prevent radiation incident on the areas from forming part of the conditioned beam and are arranged between the limits of an annular area on the pupil-facet mirror-device effective to define the inner and outer regions of the conditioned beam reflected from the pupil-facet mirror-device.
摘要翻译： 照明系统包括场分面镜装置和配置成调节入射在场面镜装置上的辐射束的光瞳镜。 场面反射镜装置包括相对于入射光束在第一和第二取向之间移动的反射场面。 其第一取向中的场小面有效地将入射辐射反射到各个反射光瞳面，以便形成从瞳孔面反射镜装置反射的条件光束的一部分。 其第二取向中的场面有效地将入射的辐射反射到被指定为光束聚集区域的瞳孔面反射镜装置的相应区域上。 这些区域被布置成防止入射到区域上的辐射形成调节梁的一部分，并且被布置在瞳孔面反射镜装置上的环形区域的极限之间，有效地限定条件束的内部和外部区域从 瞳孔面反射镜。
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