Pellicle, pressure-sensitive adhesive for pellicle, photomask with pellicle, and method for manufacturing semiconductor device
    1.
    发明授权
    Pellicle, pressure-sensitive adhesive for pellicle, photomask with pellicle, and method for manufacturing semiconductor device 有权
    薄膜,防护薄膜的压敏粘合剂,防护薄膜的光掩模和半导体装置的制造方法

    公开(公告)号:US09310673B2

    公开(公告)日:2016-04-12

    申请号:US14118106

    申请日:2012-05-18

    IPC分类号: G03F1/64 C09J133/08

    CPC分类号: G03F1/64 C09J133/08

    摘要: To provide a pellicle having a an adhesive, wherein adhesive residue is decreased at the time of peeling the pellicle from a mask after lithographic exposure and outgassing from the adhesive is suppressed The pellicle according to the present invention is a pellicle comprising a pellicle frame, a tensioned pellicle film placed on one end surface of the pellicle frame and an adhesive applied to the other end surface thereof, in which the adhesive contains a (meth)acrylic alkyl ester copolymer and a silane compound, and the (meth)acrylic alkyl ester copolymer is a copolymer of a (meth)acrylic alkyl ester having an alkyl group of 4 to 14 carbon atoms and a monomer having a functional group reactive to at least either one of an isocyanate group or an epoxy group.

    摘要翻译: 提供具有粘合剂的防护薄膜组件,其中在光刻曝光之后从掩模剥离防护薄膜时,粘合剂残留物减少,并且从粘合剂中脱气。防护薄膜组件包括防护薄膜组件框架,防护薄膜组件 将防粘膜框架的一个端面上的张紧防护薄膜和粘贴在其另一端面上的粘合剂,其中粘合剂含有(甲基)丙烯酸烷基酯共聚物和硅烷化合物,和(甲基)丙烯酸烷基酯共聚物 是具有4〜14个碳原子的烷基的(甲基)丙烯酸烷基酯与具有与异氰酸酯基或环氧基中的至少一个反应的官能团的单体的共聚物。

    PELLICLE, PRESSURE-SENSITIVE ADHESIVE FOR PELLICLE, PHOTOMASK WITH PELLICLE, AND METHOD FOR MANUFACTURING SEMICONDUCTOR DEVICE
    2.
    发明申请
    PELLICLE, PRESSURE-SENSITIVE ADHESIVE FOR PELLICLE, PHOTOMASK WITH PELLICLE, AND METHOD FOR MANUFACTURING SEMICONDUCTOR DEVICE 有权
    薄膜,压敏粘合剂用于薄膜,带有薄膜的光电胶片和制造半导体器件的方法

    公开(公告)号:US20140170535A1

    公开(公告)日:2014-06-19

    申请号:US14118106

    申请日:2012-05-18

    IPC分类号: G03F1/64 C09J133/08

    CPC分类号: G03F1/64 C09J133/08

    摘要: To provide a pellicle having a an adhesive, wherein adhesive residue is decreased at the time of peeling the pellicle from a mask after lithographic exposure and outgassing from the adhesive is suppressed The pellicle according to the present invention is a pellicle comprising a pellicle frame, a tensioned pellicle film placed on one end surface of the pellicle frame and an adhesive applied to the other end surface thereof, in which the adhesive contains a (meth)acrylic alkyl ester copolymer and a silane compound, and the (meth)acrylic alkyl ester copolymer is a copolymer of a (meth)acrylic alkyl ester having an alkyl group of 4 to 14 carbon atoms and a monomer having a functional group reactive to at least either one of an isocyanate group or an epoxy group.

    摘要翻译: 提供具有粘合剂的防护薄膜组件,其中在光刻曝光之后从掩模剥离防护薄膜时,粘合剂残留物减少,并且从粘合剂中脱气。防护薄膜组件包括防护薄膜组件框架,防护薄膜组件 将防粘膜框架的一个端面上的张紧防护薄膜和粘贴在其另一端面上的粘合剂,其中粘合剂含有(甲基)丙烯酸烷基酯共聚物和硅烷化合物,和(甲基)丙烯酸烷基酯共聚物 是具有4〜14个碳原子的烷基的(甲基)丙烯酸烷基酯与具有与异氰酸酯基或环氧基中的至少一个反应的官能团的单体的共聚物。

    Toner, developer, and image forming method
    8.
    发明授权
    Toner, developer, and image forming method 有权
    调色剂,显影剂和成像方法

    公开(公告)号:US08679714B2

    公开(公告)日:2014-03-25

    申请号:US12878750

    申请日:2010-09-09

    IPC分类号: G03G9/087

    摘要: A toner including: a first binder resin; a colorant; a releasing agent; and a crystalline organic compound, wherein the first binder resin contains an amorphous polyester resin (a) having a polyhydroxycarboxylic acid skeleton derived from optically active monomers in a part of a main chain of the amorphous polyester resin, and the polyhydroxycarboxylic acid skeleton has an optical purity X, calculated on the monomer basis, of 80% or less, and the optical purity X is determined from the equation, Optical Purity X (%)=|X(L-form)−X(D-form)| wherein the crystalline organic compound is any one of a crystalline polyester resin (b) and a crystalline low molecular compound having a melting point of 60° C. to 100° C., and being selected from a group consisting of fatty acid having 16 to 24 carbon atoms, alcohol having 16 to 24 carbon atoms, a fatty acid ester compound, and aliphatic carboxylic acid amide.

    摘要翻译: 一种调色剂,包括:第一粘合剂树脂; 着色剂 脱模剂; 和结晶有机化合物,其中所述第一粘合剂树脂含有在所述无定形聚酯树脂的主链的一部分中衍生自光学活性单体的聚羟基羧酸骨架的非晶性聚酯树脂(a),并且所述聚羟基羧酸骨架具有光学 光学纯度X(%)= | X(L型)-X(D-型)| X(%)= 其中所述结晶有机化合物是结晶聚酯树脂(b)和熔点为60℃至100℃的结晶低分子化合物中的任何一种,并且选自由16至 24个碳原子,具有16至24个碳原子的醇,脂肪酸酯化合物和脂肪族羧酸酰胺。