摘要:
There is provided a method for evaluating an insulating film entirely provided on a conductor layer for the characteristics or dimensions thereof. A measuring member having conductor bumps arranged thereon to be connected to wires is disposed above the insulating film on the conductor layer. Then, the conductor bumps are pressed against the insulating film with a given pressing force. By applying a voltage (electric stress) between the conductor bumps and the conductor layer, the characteristics including I-V characteristic, gate leakage current, and TDDB or the dimensions including thickness are evaluated.
摘要:
There is provided a method for evaluating an insulating film entirely provided on a conductor layer for the characteristics or dimensions thereof. A measuring member having conductor bumps arranged thereon to be connected to wires is disposed above the insulating film on the conductor layer. Then, the conductor bumps are pressed against the insulating film with a given pressing force. By applying a voltage (electric stress) between the conductor bumps and the conductor layer, the characteristics including I-V characteristic, gate leakage current, and TDDB or the dimensions including thickness are evaluated.
摘要:
Disclosed is a reactive working material for use in a process of producing hydrogen by splitting water based on a two-step thermochemical water-splitting cycle through the utilization of solar heat, industrial waste heat or the like, which comprises a ferrite fine powder and a cubic zirconia supporting the ferrite fine powder. This reactive working material makes it possible to prevent scaling off of the ferrite fine powder from the zirconia fine powder due to volumetric changes of the ferrite fine powder during repeated use, and suppress growth of FeO grains due to repetition of melting and solidification when used as a reactive working material for a cyclic reaction under a high temperature of 1400° C. or more.
摘要:
Disclosed is a reactive working material for use in a process of producing hydrogen by splitting water based on a two-step thermochemical water-splitting cycle through the utilization of solar heat, industrial waste heat or the like, which comprises a ferrite fine powder and a cubic zirconia supporting the ferrite fine powder. This reactive working material makes it possible to prevent scaling off of the ferrite fine powder from the zirconia fine powder due to volumetric changes of the ferrite fine powder during repeated use, and suppress growth of FeO grains due to repetition of melting and solidification when used as a reactive working material for a cyclic reaction under a high temperature of 1400° C. or more.