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公开(公告)号:US11780728B2
公开(公告)日:2023-10-10
申请号:US16896864
申请日:2020-06-09
Applicant: Konica Minolta, Inc.
Inventor: Jinichi Kasuya , Kazunari Tada , Yasushi Mizumachi
CPC classification number: B81C1/00396 , G02B1/115
Abstract: A forming method of a thin layer with a pore is provided. The method includes forming a thin layer on a substrate, stacking a first mask and a second mask on the thin layer in this order, and forming a pore in the thin layer by dry etching. The first mask includes at least a self-assembling material. The second mask is more resistant to reactive etching or physical etching than the first mask.
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公开(公告)号:US11575080B2
公开(公告)日:2023-02-07
申请号:US16484141
申请日:2018-03-05
Applicant: KONICA MINOLTA, INC.
Inventor: Naoki Shimizu , Kazunari Tada
IPC: H01L41/047 , H01L41/08 , A61B8/00 , H01L41/193 , H01L41/33
Abstract: A piezoelectric member including metal electrodes with improved adhesiveness to piezoelectric elements is to be provided. A piezoelectric member 102 includes a piezoelectric element 21, and a pair of electrodes 41, 42 respectively formed on a pair of opposing surfaces 21b, 21c of the piezoelectric element 21. The electrodes 41, 42 includes: a base film 41a that is formed on the opposing surfaces 21b, 21c of the piezoelectric element 21 and contains a thiol group; a metal adhesive film 41b formed on the base film 41a; and an electrode film 41c that is formed on the metal adhesive film 41b and is for applying voltage to the piezoelectric element 21. The metal adhesive film 41b is formed with a different material from the electrode film 41c, and has a thickness of 1 to 10 nm.
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公开(公告)号:US11623247B2
公开(公告)日:2023-04-11
申请号:US16076011
申请日:2017-02-15
Applicant: Konica Minolta, Inc.
Inventor: Kazunari Tada , Naoki Shimizu
IPC: B06B1/06 , G01N29/24 , H01L41/187 , H01L41/332 , H01L41/338 , H01L41/37 , H04R31/00
Abstract: There is provided a method for producing a piezoelectric element, which allows for forming a columnar microstructure with a small width and a high aspect ratio. The method is intended to produce a piezoelectric element 102 including a three-dimensional structure group 20 having a plurality of the three-dimensional structures 21 and 321 formed in a plate-like or columnar shape with a width of 30 μm or less and a height of 80 μm or more. The production method includes a first process of fabricating a plurality of plate-like or columnar precursor shapes 82a on a bulk material 81 formed of a Pb-based piezoelectric material, and a second process of reducing the width of the precursor shapes 82a to a predetermined value using an etching liquid.
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公开(公告)号:US12024767B2
公开(公告)日:2024-07-02
申请号:US17312925
申请日:2019-10-31
Applicant: Konica Minolta, Inc.
Inventor: Jinichi Kasuya , Kazunari Tada
CPC classification number: C23C14/10 , C23C14/024 , C23C14/081 , C23C14/083 , C23C14/30 , C23C14/34 , G02B1/115
Abstract: A dielectric film is provided on a transparent substrate. The dielectric film has at least one low refractive index layer. An uppermost layer of the dielectric film contains SiO2 and has a film density of 92% or more. The uppermost layer contains an element having an electronegativity smaller than Si.
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公开(公告)号:US11081639B2
公开(公告)日:2021-08-03
申请号:US16302817
申请日:2017-04-25
Applicant: KONICA MINOLTA, INC.
Inventor: Kazunari Tada , Naoki Shimizu
IPC: H04R17/00 , H01L41/338 , H01L41/18 , H01L41/332 , H01L21/306 , H01L21/308
Abstract: The present invention provides a piezoelectric element manufacturing method. The manufacturing method is a method of manufacturing a piezoelectric element comprising a piezoelectric body composite in which a piezoelectric body configured from a Pb-based piezoelectric material and a resin are alternately arranged, and comprises a step of etching, using an etching liquid, a plurality of parallel piezoelectric body segments formed by dicing. The etching liquid comprises a liquid which contains 0.1 to 20 mass % of hexafluorosilicic acid.
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