公开(公告)号：US20080099855A1

公开(公告)日：2008-05-01

申请号：US11969019

申请日：2008-01-03

申请人： Kouichi NAGAI ,  Katsuhiro SATO ,  Kaoru SUGAWARA ,  Makoto TAKAHASHI ,  Masahito KUDOU ,  Kazuhiro ASAI ,  Yukimasa MIYAZAKI ,  Kaoru SAIGOH

发明人： Kouichi NAGAI ,  Katsuhiro SATO ,  Kaoru SUGAWARA ,  Makoto TAKAHASHI ,  Masahito KUDOU ,  Kazuhiro ASAI ,  Yukimasa MIYAZAKI ,  Kaoru SAIGOH

IPC分类号： H01L29/94 ,  H01L29/76 ,  H01L31/00 ,  H01L21/44

CPC分类号： H01L27/11502 ,  H01L27/11507 ,  H01L28/57 ,  H01L28/65 ,  H01L2924/0002 ,  H01L2924/00

摘要： A protective film (56) having a water/hydrogen blocking function is formed so as to cover the periphery of a pad electrode (54a) while being electrically isolated from the pad electrode. A material selected in the embodiment for composing the protective film is a highly moisture-proof material having a water/hydrogen blocking function considerably superior to that of the insulating material, such as palladium (Pd) or palladium-containing material, and iridium (Ir) or iridium oxide (IrOx: typically x=2) or an iridium- or iridium oxide-containing material. An FeRAM capable of reliably preventing water/hydrogen from entering inside, and of maintaining high performance of the ferroelectric capacitor structure (30) may be realized only by a simple configuration.

摘要翻译： 形成具有水/氢阻断功能的保护膜（56），以便在与焊盘电极电隔离的同时覆盖焊盘电极（54a）的外围。 用于构成保护膜的实施方案中选择的材料是具有显着优于绝缘材料（例如钯（Pd）或含钯材料）和铱（Ir）的防氢/阻氢功能的高度防潮材料 ）或氧化铱（IrO x x：通常为x = 2）或含铱或氧化铱的材料。 可以通过简单的结构来实现能够可靠地防止水/氢进入内部并且保持铁电电容器结构（30）的高性能的FeRAM。