Displacement measuring method and apparatus
    3.
    发明授权
    Displacement measuring method and apparatus 失效
    位移测量方法和装置

    公开(公告)号:US06313915B1

    公开(公告)日:2001-11-06

    申请号:US09383236

    申请日:1999-08-26

    IPC分类号: G01B1114

    CPC分类号: G01B11/306 G01B11/026

    摘要: A displacement measuring method and apparatus can measure positions and displacements of measurement objects with high precision without regard to surface roughness. Optical beams emitted from a light source are converged through an objective lens, are incident on a surface of the measurement object, are reflected off the surface of the measurement object, and are received by an optical detector. In measurement of the surface of the measurement object, optical-intensity curves are defined while the objective lens is being shifted in the optical-axis direction. According to optical-intensity curves thus defined, a threshold Pth is defined, a center of gravity of a graph region surrounded by the optical-intensity curve is defined, and the focal point of the objective lens, when positioned at the center of gravity, is determined to be the position of a surface of the measurement object.

    摘要翻译: 位移测量方法和装置可以高精度地测量测量对象的位置和位移,而不考虑表面粗糙度。 从光源发射的光束通过物镜会聚,入射在测量对象的表面上,被测量对象的表面反射,并由光学检测器接收。 在测量对象的表面的测量中,在物镜在光轴方向上偏移的同时,限定光强度曲线。 根据如此定义的光强度曲线,定义阈值Pth,定义由光强度曲线包围的曲线图区域的重心,并且物镜的焦点在位于重心时, 被确定为测量对象的表面的位置。