公开(公告)号：US20070188748A1

公开(公告)日：2007-08-16

申请号：US11703095

申请日：2007-02-07

申请人： Koung-Su Shin ,  Dong-Su Ha ,  Chung-Sam Jun

发明人： Koung-Su Shin ,  Dong-Su Ha ,  Chung-Sam Jun

IPC分类号： G01J3/00

CPC分类号： G01J3/10 ,  G01J3/02 ,  G01J3/0267 ,  G01J3/0291 ,  G01N21/255

摘要： An apparatus for examining spectral characteristics of an object may include a chuck configured to support and releasably fix the object, wherein the chuck is larger than the object, a first light source assembly integral with the chuck and configured to illuminate a bottom surface of the object with light having a predetermined spectrum and intensity, and a transmission analysis unit for collecting and analyzing light transmitted through the object. The first light source assembly may include multiple and/or adjustable light sources. A second light source assembly may illuminate a top surface of the object, and a reflection analysis unit may collect resultant reflected light.

摘要翻译： 用于检查物体的光谱特性的装置可以包括配置成支撑和可释放地固定物体的卡盘，其中卡盘大于物体;第一光源组件，与卡盘一体并且被构造成照射物体的底面 具有预定的光谱和强度的光，以及用于收集和分析透过物体的光的透射分析单元。 第一光源组件可以包括多个和/或可调光源。 第二光源组件可以照亮物体的顶表面，并且反射分析单元可以收集所得到的反射光。

公开(公告)号：US07646478B2

公开(公告)日：2010-01-12

申请号：US11703095

申请日：2007-02-07

申请人： Koung-Su Shin ,  Dong-Su Ha ,  Chung-Sam Jun

发明人： Koung-Su Shin ,  Dong-Su Ha ,  Chung-Sam Jun

IPC分类号： G01N21/00

CPC分类号： G01J3/10 ,  G01J3/02 ,  G01J3/0267 ,  G01J3/0291 ,  G01N21/255

摘要： An apparatus for examining spectral characteristics of an object may include a chuck configured to support and releasably fix the object, wherein the chuck is larger than the object, a first light source assembly integral with the chuck and configured to illuminate a bottom surface of the object with light having a predetermined spectrum and intensity, and a transmission analysis unit for collecting and analyzing light transmitted through the object. The first light source assembly may include multiple and/or adjustable light sources. A second light source assembly may illuminate a top surface of the object, and a reflection analysis unit may collect resultant reflected light.

摘要翻译： 用于检查物体的光谱特性的装置可以包括配置成支撑和可释放地固定物体的卡盘，其中卡盘大于物体;第一光源组件，与卡盘一体并且被构造成照射物体的底面 具有预定的光谱和强度的光，以及用于收集和分析透过物体的光的透射分析单元。 第一光源组件可以包括多个和/或可调光源。 第二光源组件可以照亮物体的顶表面，并且反射分析单元可以收集所得到的反射光。