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1.发明授权Methods for forming micro-texture on an air bearing surface of a magnetic read/write slider and a magnetic read/write slider with micro-texture 有权在磁读/写滑块的空气轴承表面上形成微纹理的方法和具有微纹理的磁读/写滑块公开(公告)号：US07965471B2
公开(公告)日：2011-06-21
申请号：US11218710
申请日：2005-09-06
申请人： Kunihiro Ueda , HongTao Ma , Hong Xin Fang , Xiao Feng Qiao , Heng Qiao , Yong Zhu
发明人： Kunihiro Ueda , HongTao Ma , Hong Xin Fang , Xiao Feng Qiao , Heng Qiao , Yong Zhu
CPC分类号： G11B5/1871 , G11B5/3163 , G11B5/6005 , Y10T29/49032 , Y10T29/49041
摘要： A method for forming micro-texture on an air bearing surface of a magnetic read/write slider, includes: positioning sliders arranged in arrays on a tray, each slider having a pole tip facing upward; loading the tray into a processing chamber, which is then evacuated to a preset pressure; and introducing a processing gas containing oxygen into the processing chamber; exposing the sliders to etch the surface of the slider so as to form a clear two-step structure thereon.
摘要翻译： 一种用于在磁读/写滑块的空气轴承表面上形成微纹理的方法，包括：将排列成阵列的滑块定位在托盘上，每个滑块具有朝上的极尖; 将托盘装载到处理室中，然后将其抽真空至预设压力; 并将含有氧气的处理气体引入所述处理室中; 暴露滑块以蚀刻滑块的表面，以便在其上形成清晰的两步结构。
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2.发明申请Method of fabricating magnetic head slider including partial removal step of protecting film 有权制造磁头滑块的方法，包括保护薄膜的部分去除步骤公开(公告)号：US20100291294A1
公开(公告)日：2010-11-18
申请号：US12588911
申请日：2009-11-02
申请人： Kunihiro Ueda , Hong Xin Fang , Dong Wong
发明人： Kunihiro Ueda , Hong Xin Fang , Dong Wong
CPC分类号： G11B5/102 , G11B5/3106 , G11B5/3173 , G11B5/40 , G11B5/6082
摘要： The method of fabricating a magnetic head slider includes steps of: forming a first protective film on an air bearing surface of a magnetic head slider on which either a recording element or a reproduction element is formed or on which both a recording element and a reproduction element are formed; removing a portion of the first protective film to reduce the thickness of the first protective film and forming a second protective film over the first protective film that has been reduced in thickness; and forming an uneven portion for controlling the flying characteristics of the magnetic head slider on the air bearing surface of the magnetic head slider; wherein the formation of the uneven portion is carried out after the first protective film has been formed and before the second protective film is formed, or after the second protective film has been formed.
摘要翻译： 制造磁头滑动器的方法包括以下步骤：在其上形成有记录元件或再现元件的磁头滑动器的空气支承表面上形成第一保护膜，或者在记录元件和再现元件 形成; 去除所述第一保护膜的一部分以减小所述第一保护膜的厚度并在已经减小厚度的所述第一保护膜上形成第二保护膜; 并且形成用于控制磁头滑块的空气轴承表面上的磁头滑块的飞行特性的不平坦部分; 在形成第一保护膜之后，在形成第二保护膜之前，或在形成第二保护膜之后，进行不平坦部的形成。
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公开(公告)号：US20090135521A1
公开(公告)日：2009-05-28
申请号：US12232091
申请日：2008-09-10
申请人： Kunihiro Ueda , Hong Xin Fang , Dong Wang , Yoshiyuki Konishi , Satoko Ueno , Shigenobu Okada
发明人： Kunihiro Ueda , Hong Xin Fang , Dong Wang , Yoshiyuki Konishi , Satoko Ueno , Shigenobu Okada
CPC分类号： G11B5/3106 , C23C16/0272 , C23C16/26 , G11B5/3173 , G11B5/40 , G11B5/6082
摘要： To provide a high-quality protection target by forming a protective film that is thin and excellent in corrosion resistance. Provided is a protective film forming method for forming a protective film at least on a surface of a protection target. The method comprises: a base film forming step for forming a base film on the surface of the protection target; and a DLC film forming step for forming a diamond-like carbon film on the base film. The base film forming step forms the base film on the surface of the protection target for a plurality of times by repeating a process of depositing the base film in a prescribed thickness and eliminating a part of or a whole part of the base film. Further, the method comprises, before the DLC film forming step, an insulating layer forming step for forming an insulating layer on the surface of the base film on which the diamond-like carbon film is to be formed.
摘要翻译： 通过形成薄且耐腐蚀性优异的保护膜来提供高质量的保护目标。 提供了至少在保护对象的表面上形成保护膜的保护膜形成方法。 该方法包括：在保护目标表面上形成基膜的基膜形成步骤; 以及在基膜上形成类金刚石碳膜的DLC膜形成工序。 基底膜形成步骤通过重复以预定厚度沉积基膜的过程，并且去除基膜的一部分或全部而在保护对象的表面上形成基膜多次。 此外，该方法包括在DLC膜形成步骤之前，在要形成类金刚石碳膜的基膜的表面上形成绝缘层的绝缘层形成步骤。
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4.发明授权Method of fabricating magnetic head slider including partial removal step of protecting film 有权制造磁头滑块的方法，包括保护薄膜的部分去除步骤公开(公告)号：US08420159B2
公开(公告)日：2013-04-16
申请号：US12588911
申请日：2009-11-02
申请人： Kunihiro Ueda , Hong Xin Fang , Dong Wong
发明人： Kunihiro Ueda , Hong Xin Fang , Dong Wong
IPC分类号： G11B20/00
CPC分类号： G11B5/102 , G11B5/3106 , G11B5/3173 , G11B5/40 , G11B5/6082
摘要： The method of fabricating a magnetic head slider includes steps of: forming a first protective film on an air bearing surface of a magnetic head slider on which either a recording element or a reproduction element is formed or on which both a recording element and a reproduction element are formed; removing a portion of the first protective film to reduce the thickness of the first protective film and forming a second protective film over the first protective film that has been reduced in thickness; and forming an uneven portion for controlling the flying characteristics of the magnetic head slider on the air bearing surface of the magnetic head slider; wherein the formation of the uneven portion is carried out after the first protective film has been formed and before the second protective film is formed, or after the second protective film has been formed.
摘要翻译： 制造磁头滑动器的方法包括以下步骤：在其上形成有记录元件或再现元件的磁头滑动器的空气支承表面上形成第一保护膜，或者在记录元件和再现元件 形成; 去除所述第一保护膜的一部分以减小所述第一保护膜的厚度并在已经减小厚度的所述第一保护膜上形成第二保护膜; 并且形成用于控制磁头滑块的空气轴承表面上的磁头滑块的飞行特性的不平坦部分; 在形成第一保护膜之后，在形成第二保护膜之前，或在形成第二保护膜之后，进行不平坦部的形成。
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公开(公告)号：US08310788B2
公开(公告)日：2012-11-13
申请号：US12232091
申请日：2008-09-10
申请人： Kunihiro Ueda , Hong Xin Fang , Dong Wang , Yoshiyuki Konishi , Satoko Ueno , Shigenobu Okada
发明人： Kunihiro Ueda , Hong Xin Fang , Dong Wang , Yoshiyuki Konishi , Satoko Ueno , Shigenobu Okada
IPC分类号： G11B5/39
CPC分类号： G11B5/3106 , C23C16/0272 , C23C16/26 , G11B5/3173 , G11B5/40 , G11B5/6082
摘要： To provide a high-quality protection target by forming a protective film that is thin and excellent in corrosion resistance. Provided is a protective film forming method for forming a protective film at least on a surface of a protection target. The method comprises: a base film forming step for forming a base film on the surface of the protection target; and a DLC film forming step for forming a diamond-like carbon film on the base film. The base film forming step forms the base film on the surface of the protection target for a plurality of times by repeating a process of depositing the base film in a prescribed thickness and eliminating a part of or a whole part of the base film. Further, the method comprises, before the DLC film forming step, an insulating layer forming step for forming an insulating layer on the surface of the base film on which the diamond-like carbon film is to be formed.
摘要翻译： 通过形成薄且耐腐蚀性优异的保护膜来提供高质量的保护目标。 提供了至少在保护对象的表面上形成保护膜的保护膜形成方法。 该方法包括：在保护目标表面上形成基膜的基膜形成步骤; 以及在基膜上形成类金刚石碳膜的DLC膜形成工序。 基底膜形成步骤通过重复以预定厚度沉积基膜的过程，并且去除基膜的一部分或全部而在保护对象的表面上形成基膜多次。 此外，该方法包括在DLC膜形成步骤之前，在要形成类金刚石碳膜的基膜的表面上形成绝缘层的绝缘层形成步骤。
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