公开(公告)号：US20090267223A1

公开(公告)日：2009-10-29

申请号：US12337320

申请日：2008-12-17

Applicant: Kurt P. WACHTLER ,  Wei-Yan SHIH ,  Gregory E. HOWARD

Inventor： Kurt P. WACHTLER ,  Wei-Yan SHIH ,  Gregory E. HOWARD

IPC: H01L23/10

CPC classification number: H01L23/10 ,  B81B7/0077 ,  B81C1/00333 ,  B81C2203/0127 ,  B81C2203/0163 ,  H01L2924/0002 ,  H01L2924/01079 ,  H01L2924/00

Abstract: A hermetic MEMS device (100) comprising a carrier (110) having a surface (111) including a device (101) and an attachment stripe (122), the stripe spaced from the device and surrounding the device; a metallic foil (102) having a central bulge portion (103) and a peripheral rim portion (104) meeting the stripe, the bulge cross section parallel to the carrier monotonically decreasing from the rim (104) towards the bulge apex (105); and the foil positioned over the carrier surface so that the bulge arches over the device and the rim forms a seal with the stripe.

Abstract translation: 一种密封MEMS装置（100），包括具有包括装置（101）和附接条（122）的表面（111）的载体（110），所述条与所述装置间隔开并围绕所述装置; 具有中心凸起部分（103）的金属箔（102）和与所述条纹相遇的周边边缘部分（104），所述凸起横截面平行于所述载体从所述边缘（104）向凸起顶点（105）单调递减; 并且所述箔定位在所述载体表面上方，使得所述装置和所述边缘上的凸起拱形物与所述条纹形成密封。