公开(公告)号：US12094739B2

公开(公告)日：2024-09-17

申请号：US17767248

申请日：2020-10-05

Applicant: LAM RESEARCH CORPORATION

Inventor： Adam Patrick Bateman ,  Travis R. Taylor

IPC: H01L21/67 ,  B08B5/02 ,  B08B13/00 ,  B08B15/04

CPC classification number: H01L21/67201 ,  B08B5/02 ,  B08B13/00 ,  B08B15/04

Abstract: A method for cleaning a load lock in a substrate processing system includes, in a first period, opening a first valve in fluid communication with a gas source to supply gas through a first vent into a gas volume of the load lock. The gas is supplied at a pressure and flow rate sufficient to disturb particles from surfaces of the load lock. The method includes, in a second period subsequent to the first period and with the first valve opened, opening a second valve in fluid communication with a pump and turning on the pump to flush the gas and particles from the gas volume of the load lock, and, in a third period subsequent to the second period, closing the first valve while continuing to pump the gas and the particles from the gas volume of the load lock via the second valve.