公开(公告)号：US20220134568A1

公开(公告)日：2022-05-05

申请号：US17435020

申请日：2020-02-27

Applicant: LAM RESEARCH CORPORATION

Inventor： Richard BLANK ,  Aravind ALWAN ,  Behnam BEHZIZ ,  Peter THAULAD ,  Mark E. EMERSON

IPC: B25J9/16 ,  B25J21/00 ,  B25J11/00

Abstract: A robot calibration system includes a calibration fixture configured to be mounted on a substrate processing chamber. The calibration fixture includes at least one camera arranged to capture an image including an outer edge of a test substrate and an edge ring surrounding the test substrate. A controller is configured to receive the captured image, analyze the captured image to measure a distance between the outer edge of the test substrate and the edge ring, calculate a center of the test substrate based on the measured distance, and calibrate a robot configured to transfer substrate to and from the substrate processing chamber based on the calculated center of the test substrate.

公开(公告)号：US20250062149A1

公开(公告)日：2025-02-20

申请号：US18721910

申请日：2022-12-15

Applicant: LAM RESEARCH CORPORATION

Inventor： Kadthala R. NARENDRNATH ,  Behnam BEHZIZ ,  Benny WU ,  Moreshwar Narayan PURANDARE

IPC: H01L21/683 ,  H01J37/32 ,  H01L21/687

Abstract: An electrostatic chuck for a substrate includes a baseplate including a first surface and a cavity arranged on the first surface. A top plate includes a first plug. A first spring member is arranged in the cavity. A second plug is arranged between the top plate and the first spring member. A bonding material attaches the top plate to the first surface of the baseplate.