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    REDUCED FOOTPRINT PLATFORM ARCHITECTURE WITH LINEAR VACUUM TRANSFER MODULE
    1.
    发明申请
    REDUCED FOOTPRINT PLATFORM ARCHITECTURE WITH LINEAR VACUUM TRANSFER MODULE 审中-公开

    公开(公告)号：US20200083071A1

    公开(公告)日：2020-03-12

    申请号：US16493145

    申请日：2018-03-14

    Applicant: LAM RESEARCH CORPORATION

    Inventor： Richard H. GOULD ,  Richard BLANK

    IPC: H01L21/67 ,  H01L21/677

    Abstract: An atmosphere-to-vacuum (ATV) transfer module for a substrate processing tool includes a first side configured to interface with at least one loading station, a transfer robot assembly arranged within the ATV transfer module, and a second side opposite the first side. The transfer robot assembly is configured to transfer substrates between the at least one loading station and at least one load lock arranged between the ATV transfer module and a vacuum transfer module (VTM). The second side is configured to interface with the at least one load lock. The transfer robot assembly is arranged adjacent to the second side, and the at least one load lock extends through the second side into an interior volume of the ATV transfer module.

    MECHANICAL INDEXER FOR MULTI-STATION PROCESS MODULE
    4.
    发明申请
    MECHANICAL INDEXER FOR MULTI-STATION PROCESS MODULE 有权

    公开(公告)号：US20210320029A1

    公开(公告)日：2021-10-14

    申请号：US17306226

    申请日：2021-05-03

    Applicant: Lam Research Corporation

    Inventor： Michael NORDIN ,  Karl Frederick LEESER ,  Richard BLANK ,  Robert SCULAC ,  Damien Martin SLEVIN

    IPC: H01L21/687 ,  H01L21/67 ,  H01L21/677

    Abstract: A process module for a substrate processing tool includes a plurality of processing stations each configured to perform a process on a substrate and a mechanical indexer arranged within the process module. The mechanical indexer includes a plurality of end effectors including at least a first end effector, a second end effector, and a third end effector. Each of the plurality of end effectors extends in a radial direction from a central axis of the mechanical indexer and is configured to rotate about the central axis within the process module. The mechanical indexer is configured to position each of the plurality of end effectors at any one of the plurality of processing stations within the process module. The mechanical indexer is configured to position more than one of the plurality of end effectors at a same one of the plurality of processing stations at a same time.

    SHOWERHEAD TO PEDESTAL GAPPING WITH DIFFERENTIAL CAPACITIVE SENSOR SUBSTRATE
    5.
    发明公开
    SHOWERHEAD TO PEDESTAL GAPPING WITH DIFFERENTIAL CAPACITIVE SENSOR SUBSTRATE 审中-公开

    公开(公告)号：US20240353217A1

    公开(公告)日：2024-10-24

    申请号：US18684086

    申请日：2022-08-02

    Applicant: LAM RESEARCH CORPORATION

    Inventor： Jacob L. HIESTER ,  Richard BLANK

    IPC: G01B7/14 ,  C23C16/507 ,  C23C16/52 ,  H01L21/67

    CPC classification number: G01B7/14 ,  C23C16/507 ,  C23C16/52 ,  H01L21/67259

    Abstract: A sensor disc configured to measure a gap between a first structure and a second structure in a processing chamber of a substrate processing system includes an upper surface, at least one first capacitive sensor arranged on the upper surface of the sensor disc that is configured to generate a first measurement signal indicative of a first distance between the upper surface of the sensor disc and the first structure, a lower surface, and at least one second capacitive sensor arranged on the lower surface of the sensor disc that is configured to generate a second measurement signal indicative of a second distance between the lower surface of the sensor disc and the second structure.

    FIXTURE FOR AUTOMATIC CALIBRATION OF SUBSTRATE TRANSFER ROBOT
    6.
    发明申请
    FIXTURE FOR AUTOMATIC CALIBRATION OF SUBSTRATE TRANSFER ROBOT 有权

    公开(公告)号：US20220134568A1

    公开(公告)日：2022-05-05

    申请号：US17435020

    申请日：2020-02-27

    Applicant: LAM RESEARCH CORPORATION

    Inventor： Richard BLANK ,  Aravind ALWAN ,  Behnam BEHZIZ ,  Peter THAULAD ,  Mark E. EMERSON

    IPC: B25J9/16 ,  B25J21/00 ,  B25J11/00

    Abstract: A robot calibration system includes a calibration fixture configured to be mounted on a substrate processing chamber. The calibration fixture includes at least one camera arranged to capture an image including an outer edge of a test substrate and an edge ring surrounding the test substrate. A controller is configured to receive the captured image, analyze the captured image to measure a distance between the outer edge of the test substrate and the edge ring, calculate a center of the test substrate based on the measured distance, and calibrate a robot configured to transfer substrate to and from the substrate processing chamber based on the calculated center of the test substrate.

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