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1.发明申请公开(公告)号：US20200217657A1
公开(公告)日：2020-07-09
申请号：US16238891
申请日：2019-01-03
Applicant: LAM RESEARCH CORPORATION
Inventor： Mark E. EMERSON , Nick Ray LINEBARGER, JR.
Abstract: A substrate processing system includes a laser triangulation sensor configured to transmit and receive light through a window of an exterior wall of a substrate processing chamber. A controller is configured to: position the laser triangulation sensor such that the laser triangulation sensor transmits light onto a measurement feature arranged between a first surface of a substrate support and a second surface of a gas distribution device, where the second surface faces the first surface; and while the laser triangulation sensor transmits light onto the measurement feature, determine a first distance between the first and second surfaces based on a difference between: a second distance between the laser triangulation sensor and the first surface measured using the laser triangulation sensor; and a third distance between the laser triangulation sensor and the second surface measured using the laser triangulation sensor.
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2.发明申请公开(公告)号：US20220364858A1
公开(公告)日：2022-11-17
申请号：US17877170
申请日：2022-07-29
Applicant: Lam Research Corporation
Inventor： Mark E. EMERSON , Nick Ray LINEBARGER, JR.
Abstract: A substrate processing system includes a laser triangulation sensor configured to transmit and receive light through a window of an exterior wall of a substrate processing chamber. A controller is configured to: position the laser triangulation sensor such that the laser triangulation sensor transmits light onto a measurement feature arranged between a first surface of a substrate support and a second surface of a gas distribution device, where the second surface faces the first surface; and while the laser triangulation sensor transmits light onto the measurement feature, determine a first distance between the first and second surfaces based on a difference between: a second distance between the laser triangulation sensor and the first surface measured using the laser triangulation sensor; and a third distance between the laser triangulation sensor and the second surface measured using the laser triangulation sensor.
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公开(公告)号：US20220134568A1
公开(公告)日：2022-05-05
申请号：US17435020
申请日：2020-02-27
Applicant: LAM RESEARCH CORPORATION
Inventor： Richard BLANK , Aravind ALWAN , Behnam BEHZIZ , Peter THAULAD , Mark E. EMERSON
Abstract: A robot calibration system includes a calibration fixture configured to be mounted on a substrate processing chamber. The calibration fixture includes at least one camera arranged to capture an image including an outer edge of a test substrate and an edge ring surrounding the test substrate. A controller is configured to receive the captured image, analyze the captured image to measure a distance between the outer edge of the test substrate and the edge ring, calculate a center of the test substrate based on the measured distance, and calibrate a robot configured to transfer substrate to and from the substrate processing chamber based on the calculated center of the test substrate.
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