公开(公告)号：US12168301B2

公开(公告)日：2024-12-17

申请号：US17435020

申请日：2020-02-27

Applicant: LAM RESEARCH CORPORATION

Inventor： Richard Blank ,  Aravind Alwan ,  Behnam Behziz ,  Peter Thaulad ,  Mark E. Emerson

IPC: B25J11/00 ,  B25J9/16 ,  B25J21/00

Abstract: A robot calibration system includes a calibration fixture configured to be mounted on a substrate processing chamber. The calibration fixture includes at least one camera arranged to capture an image including an outer edge of a test substrate and an edge ring surrounding the test substrate. A controller is configured to receive the captured image, analyze the captured image to measure a distance between the outer edge of the test substrate and the edge ring, calculate a center of the test substrate based on the measured distance, and calibrate a robot configured to transfer substrate to and from the substrate processing chamber based on the calculated center of the test substrate.