公开(公告)号：US20130234597A1

公开(公告)日：2013-09-12

申请号：US13788005

申请日：2013-03-07

Applicant: LASERTEC CORPORATION

Inventor： Haruhiko KUSUNOSE ,  Kiwamu TAKEHISA ,  Tomohiro SUZUKI ,  Hiroki MIYAI

IPC: H01J1/52 ,  H05H1/24

CPC classification number: H01J1/52 ,  G03F7/70033 ,  G03F7/70916 ,  H05G2/003 ,  H05G2/005 ,  H05H1/24

Abstract: The plasma shield device (13) comprises a hollow structure (40) made of monocrystal body of silicon carbide and having an inside space (40a) and a first and second openings (40b,40c) which are opposed to each other across the inside space. During operation of the plasma generation apparatus, the internal space of the hollow structure forms a discharge zone in which the plasma is generated. Discharge gas is supplied to the internal space of the hollow structure through the first opening and the EUV radiation is mainly emitted through the second opening.

Abstract translation: 等离子体屏蔽装置（13）包括由碳化硅单晶体制成的具有内部空间（40a）和第一和第二开口（40b，40c）的中空结构（40），所述内部空间（40a）和第二开口（40b，40c） 。 在等离子体产生装置的操作期间，中空结构的内部空间形成其中产生等离子体的放电区。 排出气体通过第一开口供应到中空结构的内部空间，并且EUV辐射主要通过第二开口排出。

公开(公告)号：US20190277772A1

公开(公告)日：2019-09-12

申请号：US16295870

申请日：2019-03-07

Applicant: Lasertec Corporation

Inventor： Masayasu NISHIZAWA ,  Haruhiko KUSUNOSE ,  Tomohiro SUZUKI

IPC: G01N21/88 ,  G01N21/956 ,  H05G2/00 ,  G03F7/20

Abstract: An inspection device according to the present disclosure includes a detector for inspection that includes a plurality of pixels arranged on a light receiving surface and acquires image data by transferring charge produced by light received by the plurality of pixels in a transfer direction at a specified transfer timing, a light source that emits illumination light including pulsed light, a pulse enable circuit that controls emission timing for the light source to emit the illumination light based on the transfer timing, an illumination optical system that illuminates an object to be inspected with the illumination light, a condensing optical system that condenses, on the detector for inspection, light from the object to be inspected illuminated with the illumination light, and a processing unit that inspects the object to be inspected by using the image data of the object to be inspected.