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1.发明申请公开(公告)号：US20250117895A1
公开(公告)日：2025-04-10
申请号：US18904333
申请日：2024-10-02
Applicant: Lasertec Corporation
Inventor： Hiroki MIYAI , Takayuki MORISAWA
IPC: G06T5/70
Abstract: An image processing apparatus according to this embodiment includes: a specifying unit configured to specify, when parameter values of illumination parameters at a plurality of points corresponding to pixels of a photographed image obtained by photographing an object at a predetermined sampling time are compared with each other, a plurality of peak points each of which is a peak with respect to surrounding parameter values; a generation unit configured to generate, based on respective peak values of the parameter values at the specified plurality of peak points, the parameter values at a plurality of points between the peak points, and thereby generate a distribution of the parameter values; and a correction unit configured to correct the photographed image obtained at the predetermined sampling time by correcting the parameter values of at least one pixel of the photographed image.
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公开(公告)号：US20250012726A1
公开(公告)日：2025-01-09
申请号：US18765608
申请日：2024-07-08
Applicant: Lasertec Corporation
Inventor： Shota FUJIKI , Yoshihiro NISHIMURA
Abstract: An inspection apparatus according to an embodiment includes pulsed light generation means for generating pulsed light having a wavelength longer than a wavelength of light corresponding to a bandgap of a sample, the pulsed light subjecting the sample to multiphoton excitation, light focusing means including an objective lens, for focusing the pulsed light on the sample through the objective lens, and for passing, through the objective lens, light including photoluminescence light and Raman scattered light produced from the sample by irradiation with the pulsed light, first detection means for detecting the photoluminescence light passed through the objective lens, and second detection means for detecting the Raman scattered light passed through the objective lens.
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公开(公告)号：US20240302670A1
公开(公告)日：2024-09-12
申请号：US18599566
申请日：2024-03-08
Applicant: Lasertec Corporation
Inventor： Keitaro HAYASHIDA , Shinji TANAKA , Masaki KOICHI , Haruhiko KUSUNOSE
IPC: G02B27/09 , G02B5/08 , G02B26/08 , G02B26/10 , H04N23/72 , H04N23/74 , H04N23/75 , H04N25/71 , H05G2/00
CPC classification number: G02B27/0933 , G02B26/0816 , G02B26/10 , G02B27/0927 , G02B27/0977 , H04N23/72 , H04N23/74 , H04N23/75 , H04N25/71 , H05G2/008 , G02B5/0891
Abstract: Provided are an illumination apparatus and an illumination method capable of uniformly illuminating a visual field region detected by a detector. The present disclosure provides an illumination apparatus including: a drive unit configured to drive an optical member such that illumination light scans, in one direction, a visual field region that is a region extending in the one direction on a sample; and a control unit configured to control the drive unit to cause the illumination light to scan in synchronization with a transfer of a sensor that receives light from the visual field region illuminated by the illumination light.
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公开(公告)号：US12050184B2
公开(公告)日：2024-07-30
申请号：US17643151
申请日：2021-12-07
Applicant: Lasertec Corporation
Inventor： Keita Saito , Haruhiko Kusunose , Tsunehito Kohyama
IPC: G01N21/95 , G01N21/956
CPC classification number: G01N21/956 , G01N2021/95676
Abstract: Resolution is improved in a required direction while maintaining contrast in inspection of an anamorphic mask. A method for inspecting a mask with a reduction rate at the time of exposure in a longitudinal direction different from a reduction rate at the time of exposure in a lateral direction according to the present disclosure includes capturing an image of the mask using a photodetector including a rectangular pixel, a ratio of a dimension of the rectangular pixel in the longitudinal direction to a dimension of the rectangular pixel in the lateral direction being equal to an inverse ratio of the reduction rate in the longitudinal direction to the reduction rate in the lateral direction.
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公开(公告)号：US20230375816A1
公开(公告)日：2023-11-23
申请号：US18319266
申请日：2023-05-17
Applicant: Lasertec Corporation
Inventor： Yoshihiro NISHIMURA , Shota FUJIKI , Yoshihiro AOKI
CPC classification number: G02B21/0056 , G01N21/9501 , G02B21/0072 , G01N21/8851
Abstract: A calculation method, an image-capturing method, and an image-capturing apparatus are provided which can easily calculate a shear amount produced by an optical element arranged on an optical path of an interference optical system. A calculation method according to the present disclosure is a calculation method of calculating a shear amount produced by a predetermined optical element which is arranged on an optical path of an image-capturing optical system. The calculation method includes a step of capturing an interference contrast image of a quadric surface included in an object surface by the image-capturing optical system, a step of measuring a fringe interval of interference fringes included in the interference contrast image, and a step of calculating the shear amount based on a constant in a formula expressing the quadric surface and the fringe interval.
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Patent Agency Ranking
公开(公告)号：US11486693B2
公开(公告)日：2022-11-01
申请号：US16528509
申请日：2019-07-31
Applicant: Lasertec Corporation
Inventor： Ko Gondaira , Teruaki Yamazaki , Hideo Takizawa
Abstract: A measurement apparatus and a measurement method capable of speedily and accurately measuring an edge shape are provided. A measurement apparatus according to an aspect of the present disclosure includes an objective lens positioned so that its focal plane cuts across an edge part of a substrate, a detector including a plurality of pixels and configured to detect a reflected light from the edge part of the substrate through a confocal optical system, an optical head in which the objective lens and the detector are disposed, a moving mechanism configured to change a relative position of the optical head with respect to the substrate so that an inclination of the focal plane with respect to the substrate is changed, and a processing unit configured to measure a shape of the edge part.
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公开(公告)号：US11372222B2
公开(公告)日：2022-06-28
申请号：US16722823
申请日：2019-12-20
Applicant: LASERTEC CORPORATION
Inventor： Ko Gondaira
IPC: G02B21/00
Abstract: A confocal microscope includes a data acquisition unit configured to acquire a rough-shape data indicating a rough shape of a sample, an illumination light source configured to generate illumination light for illuminating the sample, an objective lens configured to concentrate the illumination light on the sample, an optical scanner configured to scan an illuminated place on the sample in a field of view of the objective lens, a stage configured to scan the illuminated place along the rough shape of the sample by changing a position of the objective lens relative to the sample, and an optical detector configured to detect reflected light through a confocal optical system, the reflected light being light that has been reflected on the sample and has passed through the objective lens.
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公开(公告)号：US10761400B2
公开(公告)日：2020-09-01
申请号：US16575122
申请日：2019-09-18
Applicant: Lasertec Corporation
Inventor： Akihiro Ando , Jun Sakuma
Abstract: A wavelength conversion apparatus and a wavelength conversion method that can stably output wavelength converted light for a long time are provided. A wavelength conversion apparatus 100 according to an aspect of the present disclosure includes a casing 10, a wavelength conversion element 25 disposed inside the casing 10 and configured to convert a wavelength of incident light and output light with the converted wavelength, a first port 11 that introduces a first gas containing 99.9% or more of a nitrogen gas inside the casing 10, and a second port 12 that introduces a second gas containing 1% or more of an oxygen gas.
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公开(公告)号：US20190277772A1
公开(公告)日：2019-09-12
申请号：US16295870
申请日：2019-03-07
Applicant: Lasertec Corporation
Inventor： Masayasu NISHIZAWA , Haruhiko KUSUNOSE , Tomohiro SUZUKI
IPC: G01N21/88 , G01N21/956 , H05G2/00 , G03F7/20
Abstract: An inspection device according to the present disclosure includes a detector for inspection that includes a plurality of pixels arranged on a light receiving surface and acquires image data by transferring charge produced by light received by the plurality of pixels in a transfer direction at a specified transfer timing, a light source that emits illumination light including pulsed light, a pulse enable circuit that controls emission timing for the light source to emit the illumination light based on the transfer timing, an illumination optical system that illuminates an object to be inspected with the illumination light, a condensing optical system that condenses, on the detector for inspection, light from the object to be inspected illuminated with the illumination light, and a processing unit that inspects the object to be inspected by using the image data of the object to be inspected.
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公开(公告)号：US09970885B2
公开(公告)日：2018-05-15
申请号：US14549625
申请日：2014-11-21
Applicant: Lasertec Corporation
Inventor： Hiroto Nozawa , Kuniaki Takeda , Kenshi Ishiwatari , Takamasa Tsubouchi , Ryoichiro Satoh
CPC classification number: G01N21/8851 , G01N21/9501 , G01N2021/8845 , G01N2021/8848 , G01N2021/9513 , G01N2021/95676 , G06T5/50 , G06T7/0004 , G06T2207/10152 , G06T2207/30148
Abstract: An inspection apparatus and an inspection method capable of performing an inspection more accurately are provided. An inspection apparatus according to the present invention includes a light source 10 that illuminates a sample 30 in which a pattern is formed, a detector 11 that detects light reflected from the sample 30 illuminated by the light source, and a processing device 50 that performs an inspection based on a correlation between a brightness value of a sample image obtained by the detector and a size in a surface shape or a size in a width direction of the pattern of the sample 30. The processing device 50 performs the inspection based on a summation value obtained by adding up brightness values of sample images with weights, the sample images being obtained under a plurality of shooting conditions.
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