公开(公告)号：US08680490B2

公开(公告)日：2014-03-25

申请号：US13626707

申请日：2012-09-25

Applicant: LG Electronics Inc.

Inventor： Gyeayoung Kwag ,  Sungbong Ma ,  Sungyeon Cho ,  Myungjun Shin ,  Taeyoung Kwon ,  Haejong Cho

IPC: H01J37/317

CPC classification number: H01J37/3171 ,  H01J37/317 ,  H01J2237/31703 ,  H01J2237/31711 ,  H01L31/068 ,  H01L31/1804 ,  Y02E10/547 ,  Y02P70/521

Abstract: A solar cell, a solar cell manufacturing device, and a method for manufacturing the solar cell are discussed. The solar cell manufacturing device includes a chamber; an ion implantation unit configured to implant ions into a substrate inside the chamber and a mask positioned between the ion implantation unit and the substrate. The mask includes a first opening to form a lightly doped region having a first concentration at one surface of the substrate, a second opening to form a heavily doped region having a second concentration higher than the first concentration at the one surface of the substrate, and at least one connector formed to cross the second opening. The second opening includes finger openings formed in a first direction, and bus openings formed in a second direction crossing the first direction.

Abstract translation: 讨论太阳能电池，太阳能电池制造装置和太阳能电池的制造方法。 太阳能电池制造装置包括：室; 离子注入单元，被配置为将离子注入到腔室内的衬底中，以及掩模，其位于离子注入单元和衬底之间。 掩模包括第一开口以形成在衬底的一个表面处具有第一浓度的轻掺杂区域，第二开口以形成在衬底的一个表面处具有高于第一浓度的第二浓度的重掺杂区域，以及 形成为穿过第二开口的至少一个连接器。 第二开口包括沿第一方向形成的指形开口和沿与第一方向交叉的第二方向形成的总线开口。