公开(公告)号：US20040027504A1

公开(公告)日：2004-02-12

申请号：US10608376

申请日：2003-06-30

Applicant: LG.Philips LCD Co., Ltd.

Inventor： Chang Kuk Yang ,  Hwan Kim ,  Ki Choon Park

IPC: G02F001/136

CPC classification number: H01L27/1288 ,  G02F1/1368 ,  H01L27/1214 ,  H01L29/42384 ,  H01L29/66765

Abstract: A method for manufacturing a liquid crystal display device includes forming a gate line and a gate electrode on a substrate, forming a gate insulating layer on an entire surface of the substrate including the gate line, forming a semiconductor layer on the gate insulating layer above the gate electrode, depositing a metal layer on an entire surface of the gate insulating layer including the semiconductor layer, forming a mask pattern for patterning a data line and source and drain electrodes on the metal layer, and forming a data line perpendicular to the gate line, and the source and drain electrodes by simultaneously removing portions of the metal layer with the mask pattern and removing a first thickness of the gate insulating layer.

Abstract translation: 液晶显示装置的制造方法包括在基板上形成栅极线和栅电极，在包括栅极线的基板的整个表面上形成栅极绝缘层，在栅极绝缘层的上方形成半导体层 栅电极，在包括半导体层的栅极绝缘层的整个表面上沉积金属层，形成用于图案化数据线的掩模图案和金属层上的源极和漏极，以及形成垂直于栅极线的数据线 以及源电极和漏电极，通过用掩模图案同时去除金属层的部分并去除栅极绝缘层的第一厚度。