Chemical sensor with air via
    1.
    发明授权

    公开(公告)号:US11231388B2

    公开(公告)日:2022-01-25

    申请号:US16544106

    申请日:2019-08-19

    Abstract: In one embodiment, a chemical sensor is described. The chemical sensor includes a chemically-sensitive field effect transistor including a floating gate conductor having an upper surface, a first opening extending through a first material and through a portion of a second material located on the first material and a second opening extending from the bottom of the first opening to the top of a liner layer located on the upper surface of the floating gate conductor.

    Chemical sensor with air via
    2.
    发明授权

    公开(公告)号:US10386328B2

    公开(公告)日:2019-08-20

    申请号:US15700630

    申请日:2017-09-11

    Abstract: In one embodiment, a chemical sensor is described. The chemical sensor includes a chemically-sensitive field effect transistor including a floating gate conductor having an upper surface, a first opening extending through a first material and through a portion of a second material located on the first material and a second opening extending from the bottom of the first opening to the top of a liner layer located on the upper surface of the floating gate conductor.

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