公开(公告)号：US20210164932A1

公开(公告)日：2021-06-03

申请号：US17267772

申请日：2019-08-16

Applicant: LIFE TECHNOLOGIES CORPORATION

Inventor： PHIL WAGGONER ,  Jordan OWENS ,  Scott PARKER

IPC: G01N27/414 ,  H01L21/3065 ,  H01L21/28

Abstract: A method for manufacturing a sensor includes etching an insulator layer disposed over a substrate to define an opening exposing a sensor surface of a sensor disposed on the substrate, a native oxide forming on the sensor surface; sputtering the sensor surface with a noble gas to at least partially remove the native oxide from the sensor surface; and annealing the sensor surface in a hydrogen atmosphere.