公开(公告)号：US09766063B2

公开(公告)日：2017-09-19

申请号：US14855242

申请日：2015-09-15

申请人： Lam Research Corporation

发明人： Amir Yasseri ,  Duane Outka ,  Michael Lopez

IPC分类号： G01B11/30 ,  H01J37/32

CPC分类号： G01B11/30 ,  H01J37/32009 ,  H01J37/32119 ,  H01J37/32935

摘要： A method for treating a nonhomogeneous material surface of an object is provided. A plurality of test patches of the surface is treated for different amounts of time wherein the plurality of test patches have a total surface area. A property of each test patch is measured. A calibration curve of the property is generated with respect to time. The calibration curve and a target property are used to obtain a target time. A surface of the object with a surface area, which is greater than the total surface area of the plurality of test patches, is treated for the target time.

公开(公告)号：US20170074646A1

公开(公告)日：2017-03-16

申请号：US14855242

申请日：2015-09-15

申请人： Lam Research Corporation

发明人： Amir Yasseri ,  Duane Outka ,  Michael Lopez

IPC分类号： G01B11/30 ,  H01J37/32

CPC分类号： G01B11/30 ,  H01J37/32009 ,  H01J37/32119 ,  H01J37/32935

摘要： A method for treating a nonhomogeneous material surface of an object is provided. A plurality of test patches of the surface is treated for different amounts of time wherein the plurality of test patches have a total surface area. A property of each test patch is measured. A calibration curve of the property is generated with respect to time. The calibration curve and a target property are used to obtain a target time. A surface of the object with a surface area, which is greater than the total surface area of the plurality of test patches, is treated for the target time.

摘要翻译： 提供了一种用于处理物体的非均匀材料表面的方法。 将多个表面的测试贴片处理不同的时间量，其中多个测试贴片具有总表面积。 测量每个测试补丁的属性。 产生相对于时间的属性的校准曲线。 使用校准曲线和目标属性来获得目标时间。 处理具有大于多个测试片的总表面积的表面积的物体的表面，以达到目标时间。