公开(公告)号：US20150235889A1

公开(公告)日：2015-08-20

申请号：US14704602

申请日：2015-05-05

Applicant: Lam Research Corporation

Inventor： Hong Shih ,  Tuochuan Huang ,  David Schaefer ,  Ambarish Chhatre ,  John Daugherty ,  MingHang Wu ,  Clifford La Croix

IPC: H01L21/683

CPC classification number: H01L21/6833 ,  B05D5/12 ,  B05D7/52 ,  C23C8/02 ,  C23C22/66 ,  H01L21/6831 ,  Y10T279/23

Abstract: A method is provided for treating a bipolar ESC having a front surface and a back surface, the front surface including an anodized layer. The method includes eliminating the anodized layer, disposing a new anodized layer onto the front surface, and treating the new anodized layer with water to seal the new anodized layer.

Abstract translation: 提供了一种用于处理具有前表面和后表面的双极ESC的方法，前表面包括阳极氧化层。 该方法包括消除阳极氧化层，将新的阳极氧化层设置在前表面上，以及用水处理新的阳极氧化层以密封新的阳极氧化层。