公开(公告)号：US20240302670A1

公开(公告)日：2024-09-12

申请号：US18599566

申请日：2024-03-08

申请人： Lasertec Corporation

发明人： Keitaro HAYASHIDA ,  Shinji TANAKA ,  Masaki KOICHI ,  Haruhiko KUSUNOSE

IPC分类号： G02B27/09 ,  G02B5/08 ,  G02B26/08 ,  G02B26/10 ,  H04N23/72 ,  H04N23/74 ,  H04N23/75 ,  H04N25/71 ,  H05G2/00

CPC分类号： G02B27/0933 ,  G02B26/0816 ,  G02B26/10 ,  G02B27/0927 ,  G02B27/0977 ,  H04N23/72 ,  H04N23/74 ,  H04N23/75 ,  H04N25/71 ,  H05G2/008 ,  G02B5/0891

摘要： Provided are an illumination apparatus and an illumination method capable of uniformly illuminating a visual field region detected by a detector. The present disclosure provides an illumination apparatus including: a drive unit configured to drive an optical member such that illumination light scans, in one direction, a visual field region that is a region extending in the one direction on a sample; and a control unit configured to control the drive unit to cause the illumination light to scan in synchronization with a transfer of a sensor that receives light from the visual field region illuminated by the illumination light.