摘要:
Provided are an illumination apparatus and an illumination method capable of uniformly illuminating a visual field region detected by a detector. The present disclosure provides an illumination apparatus including: a drive unit configured to drive an optical member such that illumination light scans, in one direction, a visual field region that is a region extending in the one direction on a sample; and a control unit configured to control the drive unit to cause the illumination light to scan in synchronization with a transfer of a sensor that receives light from the visual field region illuminated by the illumination light.
摘要:
A light source module includes a light source; an optical fiber configured to guide light output from the light source; a pair of holding members configured to hold both ends of a first portion of the optical fiber such that the first portion extends linearly; a first vibrator configured to vibrate the first portion along a first direction intersecting an extending direction of the first portion; and a second vibrator configured to vibrate the first portion along a second direction intersecting the extending direction and differing from the first direction.
摘要:
A method of processing by controlling one or more beam characteristics of an optical beam may include: launching the optical beam into a first length of fiber having a first refractive-index profile (RIP); coupling the optical beam from the first length of fiber into a second length of fiber having a second RIP and one or more confinement regions; modifying the one or more beam characteristics of the optical beam in the first length of fiber, in the second length of fiber, or in the first and second lengths of fiber; confining the modified one or more beam characteristics of the optical beam within the one or more confinement regions of the second length of fiber; and/or generating an output beam, having the modified one or more beam characteristics of the optical beam, from the second length of fiber. The first RIP may differ from the second RIP.
摘要:
A light deflector includes a fixed part, a movable part provided with a reflection plane, a pair of elastic supporting units configured to support the movable part, a pair of connecting parts configured to connect between the pair of elastic supporting units and the fixed part, and a driving unit configured to deform the pair of connecting parts to make the movable part oscillate. The pair of connecting parts are supported by the fixed part in a cantilevered state, and each one of the pair of connecting parts having a folded structure. An optical scanning system includes the light deflector. An image projection device includes the light deflector.
摘要:
An optical beam delivery device, such as an optical fiber, includes: a first length of fiber having a first refractive index profile (RIP) to enable modification of one or more beam characteristics of an optical beam having a first wavelength; and a second length of fiber having at least one wavelength-modifying confinement region and situated to receive the optical beam from the first length of fiber.
摘要:
An optical beam delivery device formed of optical fibers that are configured to produce an output exhibiting an intensity distribution profile having non-zero ellipticity includes a first length of fiber through which an incident optical beam having beam characteristics propagates and which has a first refractive index profile (RIP). The first RIP enables, in response to an applied perturbation, modification of the beam characteristics of the optical beam to form an adjusted beam having modified beam characteristics relative to the beam characteristics of the optical beam. A second length of fiber is coupled to the first length of fiber and formed with a set of one or more confinement regions that define a second RIP and confine at least a portion of the adjusted beam to generate, at an output of the second length of fiber, an intensity distribution profile having non-zero ellipticity.
摘要:
The present invention provides a display panel, comprising a brightness enhancement film, a light guide plate and a backlight source, and the brightness enhancement film is located to stack with the light guide plate, and the backlight source is located at a lateral side of the light guide plate, wherein the display panel further comprises a MEMS reflective plate located at a bottom of the light guide plate, and the MEMS reflective plate comprises a control substrate and reflective units, and the control substrate is employed to control working statuses of the reflective units, and the reflective unit comprises a driving unit located at the control substrate and a reflective sheet rotatably connected to the driving unit, and the driving unit is employed to drive the reflective sheet to rotate.
摘要:
A defect observation method for observing a defect on a sample detected by another inspection device with a scanning electron microscope including the steps of: optically detecting the defect using the position information for the defect: illuminating the sample including the defect with an illumination intensity pattern having periodic intensity variation in two dimensions by irradiating a plurality of illumination light beams onto the surface of the sample while phase modulating the light beams in a single direction and successively moving the light beams in small movements in a direction different from the single direction, imaging the surface of the sample that is illuminated by the illumination intensity pattern having periodic intensity variation in two dimensions and includes the defect detected by the other inspection device, and detecting the defect detected by the other inspection device from the image obtained through the imaging of the surface of the sample.
摘要:
A device for shaping and scanning an ultrafast laser beam including a laser source configured to output a pulsed laser beam containing different frequency spectrum; a digital micromirror device (DMD) consisting of a plurality of micromirrors, configured to receive the laser beam and shape the received laser beam with a first angular dispersion; and a dispersion compensation unit, arranged before or after the DMD, configured to transfer the laser beam from the laser source to the DMD with a second angular dispersion for neutralizing the first angular dispersion.
摘要:
An illumination device includes a diffusion member having an anisotropic diffusion surface, a rotary shaft member configured to rotate the anisotropic diffusion surface while a coherent light beam from a light source is illuminated on the anisotropic diffusion surface, and an optical device that further diffuses a coherent light beam diffused on the anisotropic diffusion surface, wherein the coherent light beam diffused on the anisotropic diffusion surface is diffused in a form of line and the diffused coherent light beam in the form of line is configured to move to draw a locus of rotation in one direction in accordance with the rotation of the anisotropic diffusion surface.