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4 条记录 (耗时 0.014 秒)

    All dual damascene oxide etch process steps in one confined plasma chamber
    2.
    发明授权
    All dual damascene oxide etch process steps in one confined plasma chamber 失效
    在一个限制等离子体室中的所有双重镶嵌氧化物蚀刻工艺步骤

    公开(公告)号：US06559049B2

    公开(公告)日：2003-05-06

    申请号：US10210612

    申请日：2002-07-31

    申请人： Lawrence Chen ,  Chang-Tai Chiao ,  Young Tong Tsai ,  Francis Ko ,  Chuan-Kai Lo

    发明人： Lawrence Chen ,  Chang-Tai Chiao ,  Young Tong Tsai ,  Francis Ko ,  Chuan-Kai Lo

    IPC分类号： H01L214763

    CPC分类号： H01L21/31116 ,  H01L21/31138 ,  H01L21/76807 ,  H01L21/76808 ,  H01L21/76813

    摘要： The present invention reveals a semiconductor dual damascene etching process, which uses a confined plasma etching chamber to integrate all dual damascene steps such as via hole etching, photoresist stripping and barrier layer removal which originally performed in various reactors as a continuous procedure in the confined plasma chamber. The confined plasma chamber including a confinement ring surrounding a wafer and an anti-etching upper electrode plate performs the steps mentioned above under clean mode. The present invention can not only reduce the time period required by the semiconductor dual damascene process but also greatly reduce the manufacturing cost.

    摘要翻译： 本发明揭示了半导体双镶嵌蚀刻工艺，其使用限定等离子体蚀刻室来整合所有双镶嵌步骤，例如通孔蚀刻，光致抗蚀剂剥离和阻挡层去除，其最初在各种反应器中作为连续过程在约束等离子体 房间。 包含晶圆周围的限制环和防蚀刻上电极板的受限等离子体室在清洁模式下进行上述步骤。 本发明不仅可以减少半导体双镶嵌工艺所需的时间，而且可以大大降低制造成本。

    Shutter mounting adjuster
    3.
    发明授权
    Shutter mounting adjuster 有权
    快门安装调节器

    公开(公告)号：US07159362B2

    公开(公告)日：2007-01-09

    申请号：US10414248

    申请日：2003-04-16

    申请人： Lawrence Chen

    发明人： Lawrence Chen

    IPC分类号： E06B1/04

    CPC分类号： E06B1/6069 ,  E06B1/6084

    摘要： A shutter mounting adjuster provided between a non-vertical peripheral wall of a shutter opening and a hanging strip hinged to a shutter to support the shutter in the shutter opening. A slider movably mounted in a longitudinal groove of the hanging strip of the shutter, and an arched spring strip fixed on the slider for movement with the slider along the longitudinal groove for enaging the non-vertical peripheral wall to postion the hanging strip vertically in the shutter opening.

    摘要翻译： 一种快门安装调节器，设置在快门开口的非垂直周边壁与铰链到快门的悬挂条之间，以支撑快门开口中的快门。 滑动件可移动地安装在活门悬挂条的纵向槽中，以及固定在滑动件上的弓形弹簧条，用于沿着纵向槽与滑块一起移动，用于引导非垂直周边壁，以垂直于垂直方向 快门打开。