Pad backer
    1.
    发明授权
    Pad backer 有权
    垫垫

    公开(公告)号:US06921324B1

    公开(公告)日:2005-07-26

    申请号:US10710819

    申请日:2004-08-05

    IPC分类号: B24B37/04 B24B41/06 B24B29/00

    CPC分类号: B24B37/30 B24B37/32

    摘要: A pad backer is described, comprising a backing plate, an elastomer layer and a pad backing ring. The elastomer layer has a bottom surface bonded to the backing plate and an upper surface with a protrudent part at the edge portion thereof. The pad backing ring has an inner bottom surface with a recessed part thereon matching with the protrudent part on the upper surface of the elastomer layer, such that the elastomer layer is fixed onto the pad backing ring through engagement of the protrudent part and the recessed part.

    摘要翻译: 描述垫衬垫,其包括背板,弹性体层和衬垫背衬环。 弹性体层具有与背板接合的底表面和在其边缘部分具有突出部分的上表面。 垫衬环具有内底面,其内部的凹部与弹性体层的上表面上的突出部分匹配,使得弹性体层通过突出部和凹部的接合而固定到垫衬环上 。

    PAD BACKER AND CMP PROCESS USING THE SAME
    2.
    发明申请
    PAD BACKER AND CMP PROCESS USING THE SAME 有权
    使用相同的PAD BACKER和CMP工艺

    公开(公告)号:US20060030241A1

    公开(公告)日:2006-02-09

    申请号:US10908781

    申请日:2005-05-26

    IPC分类号: B24B7/30

    CPC分类号: B24B37/32 B24B37/30

    摘要: A pad backer is described, comprising a backing plate, an elastomer layer and a pad backing ring. The elastomer layer has a bottom surface bonded to the backing plate and an upper surface with a protrudent part at the edge portion thereof. The pad backing ring has an inner bottom surface with a recessed part thereon matching with the protrudent part on the upper surface of the elastomer layer, such that the elastomer layer is fixed onto the pad backing ring through engagement of the protrudent part and the recessed part.

    摘要翻译: 描述垫衬垫,其包括背板,弹性体层和衬垫背衬环。 弹性体层具有与背板接合的底表面和在其边缘部分具有突出部分的上表面。 垫衬环具有内底面,其内部的凹部与弹性体层的上表面上的突出部分匹配,使得弹性体层通过突出部和凹部的接合而固定到垫衬环上 。

    Pad backer and CMP process using the same
    3.
    发明授权
    Pad backer and CMP process using the same 有权
    垫片支架和CMP工艺使用相同

    公开(公告)号:US07048615B2

    公开(公告)日:2006-05-23

    申请号:US10908781

    申请日:2005-05-26

    IPC分类号: B24B29/00

    CPC分类号: B24B37/32 B24B37/30

    摘要: A pad backer is described, comprising a backing plate, an elastomer layer and a pad backing ring. The elastomer layer has a bottom surface bonded to the backing plate and an upper surface with a protrudent part at the edge portion thereof. The pad backing ring has an inner bottom surface with a recessed part thereon matching with the protrudent part on the upper surface of the elastomer layer, such that the elastomer layer is fixed onto the pad backing ring through engagement of the protrudent part and the recessed part.

    摘要翻译: 描述垫衬垫,其包括背板,弹性体层和衬垫背衬环。 弹性体层具有与背板接合的底表面和在其边缘部分具有突出部分的上表面。 垫衬环具有内底面,其内部的凹部与弹性体层的上表面上的突出部分匹配,使得弹性体层通过突出部和凹部的接合而固定到垫衬环上 。

    Chemical-liquid controlling apparatus
    4.
    发明授权
    Chemical-liquid controlling apparatus 有权
    化学液体控制装置

    公开(公告)号:US6165255A

    公开(公告)日:2000-12-26

    申请号:US267845

    申请日:1999-03-12

    IPC分类号: B01D19/00

    CPC分类号: B01D19/0042 B01D19/0068

    摘要: A chemical-liquid controlling apparatus is described. The chemical-liquid controlling apparatus is mounted between a chemical-liquid container and an exhaust apparatus. During a chemical-liquid refilling process, once the chemical liquid is drawn out of the container by the exhaust apparatus, the chemical liquid first enters the chemical-liquid controlling apparatus. The chemical-liquid controlling apparatus separates the chemical liquid from a nitrogen gas and a chemical gas. In addition, the chemical-liquid refilling process is stopped by a signal transmitted from a leak sensor.

    摘要翻译: 描述了一种药液控制装置。 药液控制装置安装在药液容器和排气装置之间。 在化学液体再填充过程中,一旦化学液体被排气装置从容器中抽出,化学液体首先进入化学液体控制装置。 药液控制装置将化学液体与氮气和化学气体分离。 此外,通过从泄漏传感器传输的信号来停止药液补充过程。

    Broadband antenna and an electronic device having the broadband antenna
    5.
    发明申请
    Broadband antenna and an electronic device having the broadband antenna 审中-公开
    宽带天线和具有宽带天线的电子设备

    公开(公告)号:US20100026593A1

    公开(公告)日:2010-02-04

    申请号:US12453089

    申请日:2009-04-29

    IPC分类号: H01Q9/04 H01Q1/24 H01Q5/00

    摘要: A broadband antenna for wireless signal transmission of an electronic device is disclosed. The broadband antenna has a radiation area, a ground area, a feeding point, a first tuning bar, and a second tuning bar. The feeding point is disposed on the radiation area and is used for feeding a signal. The first tuning bar is used for adjusting a high frequency bandwidth of the broadband antenna. The second tuning bar is used for adjusting a low frequency bandwidth of the broadband antenna. The length of the first tuning bar is less than the length of the second tuning bar.

    摘要翻译: 公开了一种用于电子设备的无线信号传输的宽带天线。 宽带天线具有辐射区域,接地区域,馈电点,第一调谐条和第二调谐条。 馈电点设置在辐射区域上,用于馈送信号。 第一个调音杆用于调整宽带天线的高频带宽。 第二个调音杆用于调整宽带天线的低频带宽。 第一调谐条的长度小于第二调谐条的长度。