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6 条记录 (耗时 0.037 秒)

    Region based virtual fourier filter
    1.
    发明授权
    Region based virtual fourier filter 有权
    基于区域的虚拟傅里叶滤波器

    公开(公告)号：US08989479B2

    公开(公告)日：2015-03-24

    申请号：US13381696

    申请日：2011-08-01

    申请人： Lisheng Gao ,  Kenong Wu ,  Allen Park ,  Ellis Chang ,  Khurram Zafar ,  Junqing Huang ,  Ping Gu ,  Christopher Maher ,  Grace H. Chen ,  Songnian Rong ,  Liu-Ming Wu

    发明人： Lisheng Gao ,  Kenong Wu ,  Allen Park ,  Ellis Chang ,  Khurram Zafar ,  Junqing Huang ,  Ping Gu ,  Christopher Maher ,  Grace H. Chen ,  Songnian Rong ,  Liu-Ming Wu

    IPC分类号： G06K9/00 ,  G06T7/00

    CPC分类号： G06T7/001 ,  G06T2207/10061 ,  G06T2207/20021 ,  G06T2207/20056 ,  G06T2207/30148

    摘要： The present invention includes searching imagery data in order to identify one or more patterned regions on a semiconductor wafer, generating one or more virtual Fourier filter (VFF) working areas, acquiring an initial set of imagery data from the VFF working areas, defining VFF training blocks within the identified patterned regions of the VFF working areas utilizing the initial set of imagery data, wherein each VFF training block is defined to encompass a portion of the identified patterned region displaying a selected repeating pattern, calculating an initial spectrum for each VFF training block utilizing the initial set of imagery data from the VFF training blocks, and generating a VFF for each training block by identifying frequencies of the initial spectrum having maxima in the frequency domain, wherein the VFF is configured to null the magnitude of the initial spectrum at the frequencies identified to display spectral maxima.

    摘要翻译： 本发明包括搜索图像数据以便识别半导体晶片上的一个或多个图案化区域，生成一个或多个虚拟傅立叶滤波器（VFF）工作区域，从VFF工作区域获取初始图像数据集，定义VFF训练 利用初始的图像数据集，在VFF工作区域的所识别的图案化区域内的块，其中每个VFF训练块被定义为包含所识别的图案化区域的一部分，显示所选择的重复模式，计算每个VFF训练块的初始频谱 利用来自VFF训练块的初始图像数据组，以及通过识别在频域中具有最大值的初始频谱的频率，为每个训练块生成VFF，其中VFF被配置为在 识别出显示频谱最大值的频率。

    REGION BASED VIRTUAL FOURIER FILTER
    2.
    发明申请
    REGION BASED VIRTUAL FOURIER FILTER 有权
    基于区域的虚拟FOURIER过滤器

    公开(公告)号：US20120141013A1

    公开(公告)日：2012-06-07

    申请号：US13381696

    申请日：2011-08-01

    申请人： Lisheng Gao ,  Kenong Wu ,  Allen Park ,  Ellis Chang ,  Khurram Zafar ,  Junqing Huang ,  Ping Gu ,  Christopher Maher ,  Grace H. Chen ,  Songnian Rong ,  Liu-Ming Wu

    发明人： Lisheng Gao ,  Kenong Wu ,  Allen Park ,  Ellis Chang ,  Khurram Zafar ,  Junqing Huang ,  Ping Gu ,  Christopher Maher ,  Grace H. Chen ,  Songnian Rong ,  Liu-Ming Wu

    IPC分类号： G06K9/62

    CPC分类号： G06T7/001 ,  G06T2207/10061 ,  G06T2207/20021 ,  G06T2207/20056 ,  G06T2207/30148

    摘要： The present invention includes searching imagery data in order to identify one or more patterned regions on a semiconductor wafer, generating one or more virtual Fourier filter (VFF) working areas, acquiring an initial set of imagery data from the VFF working areas, defining VFF training blocks within the identified patterned regions of the VFF working areas utilizing the initial set of imagery data, wherein each VFF training block is defined to encompass a portion of the identified patterned region displaying a selected repeating pattern, calculating an initial spectrum for each VFF training block utilizing the initial set of imagery data from the VFF training blocks, and generating a VFF for each training block by identifying frequencies of the initial spectrum having maxima in the frequency domain, wherein the VFF is configured to null the magnitude of the initial spectrum at the frequencies identified to display spectral maxima.

    摘要翻译： 本发明包括搜索图像数据以便识别半导体晶片上的一个或多个图案化区域，生成一个或多个虚拟傅立叶滤波器（VFF）工作区域，从VFF工作区域获取初始图像数据集，定义VFF训练 利用初始的图像数据集，在VFF工作区域的所识别的图案化区域内的块，其中每个VFF训练块被定义为包含所识别的图案化区域的一部分，显示所选择的重复模式，计算每个VFF训练块的初始频谱 利用来自VFF训练块的初始图像数据组，以及通过识别在频域中具有最大值的初始频谱的频率，为每个训练块生成VFF，其中VFF被配置为在 识别出显示频谱最大值的频率。

    Automated Inspection Scenario Generation
    5.
    发明申请
    Automated Inspection Scenario Generation 有权
    自动检测情景生成

    公开(公告)号：US20140050389A1

    公开(公告)日：2014-02-20

    申请号：US13585115

    申请日：2012-08-14

    申请人： Mohan Mahadevan ,  Govind Thattaisundaram ,  Ajay Gupta ,  Chien-Huei (Adam) Chen ,  Jason Kirkwood ,  Ashok Kulkarni ,  Songnian Rong ,  Ernesto Escorcia ,  Eugene Shifrin

    发明人： Mohan Mahadevan ,  Govind Thattaisundaram ,  Ajay Gupta ,  Chien-Huei (Adam) Chen ,  Jason Kirkwood ,  Ashok Kulkarni ,  Songnian Rong ,  Ernesto Escorcia ,  Eugene Shifrin

    IPC分类号： G06K9/62

    CPC分类号： G06K9/6254 ,  G06T7/0004 ,  G06T2207/30148

    摘要： Methods and systems for determining inspection scenarios without input from a user are presented. Inspection scenarios include at least one acquisition mode, defect detection parameter values, and classification parameter values. In one example, a number of defect events are determined by a hot inspection of a wafer surface. The defect events are classified and attributes associated with each defect event are identified. The defect events are labeled with this information. Based on the identified attributes and classification, inspection scenarios are determined. The inspection scenarios are solutions in a mathematical space formed by the identified attributes. In some examples, a plurality of inspection scenarios are determined and a desired inspection scenario is selected from the plurality based on the number of defects of interest and the number of nuisance events captured by the selected inspection scenario.

    摘要翻译： 提出了用于确定用户无需输入的检测情景的方法和系统。 检查场景包括至少一个采集模式，缺陷检测参数值和分类参数值。 在一个示例中，通过晶片表面的热检查来确定多个缺陷事件。 对缺陷事件进行分类，并识别与每个缺陷事件相关的属性。 缺陷事件用此信息标记。 根据确定的属性和分类，确定检验情况。 检查方案是由所识别的属性形成的数学空间中的解决方案。 在一些示例中，确定多个检查情景，并且基于感兴趣的缺陷的数量和由所选择的检查情景捕获的滋扰事件的数量，从多个中选择期望的检查情景。

    Automated inspection scenario generation
    6.
    发明授权
    Automated inspection scenario generation 有权
    自动检测场景生成

    公开(公告)号：US09053390B2

    公开(公告)日：2015-06-09

    申请号：US13585115

    申请日：2012-08-14

    申请人： Mohan Mahadevan ,  Govind Thattaisundaram ,  Ajay Gupta ,  Chien-Huei (Adam) Chen ,  Jason Kirkwood ,  Ashok Kulkarni ,  Songnian Rong ,  Ernesto Escorcia ,  Eugene Shifrin

    发明人： Mohan Mahadevan ,  Govind Thattaisundaram ,  Ajay Gupta ,  Chien-Huei (Adam) Chen ,  Jason Kirkwood ,  Ashok Kulkarni ,  Songnian Rong ,  Ernesto Escorcia ,  Eugene Shifrin

    IPC分类号： G06K9/00 ,  G06K9/62 ,  G06T7/00

    CPC分类号： G06K9/6254 ,  G06T7/0004 ,  G06T2207/30148

    摘要： Methods and systems for determining inspection scenarios without input from a user are presented. Inspection scenarios include at least one acquisition mode, defect detection parameter values, and classification parameter values. In one example, a number of defect events are determined by a hot inspection of a wafer surface. The defect events are classified and attributes associated with each defect event are identified. The defect events are labeled with this information. Based on the identified attributes and classification, inspection scenarios are determined. The inspection scenarios are solutions in a mathematical space formed by the identified attributes. In some examples, a plurality of inspection scenarios are determined and a desired inspection scenario is selected from the plurality based on the number of defects of interest and the number of nuisance events captured by the selected inspection scenario.

    摘要翻译： 提出了用于确定用户无需输入的检测情景的方法和系统。 检查场景包括至少一个采集模式，缺陷检测参数值和分类参数值。 在一个示例中，通过晶片表面的热检查来确定多个缺陷事件。 对缺陷事件进行分类，并识别与每个缺陷事件相关的属性。 缺陷事件用此信息标记。 根据确定的属性和分类，确定检验情况。 检查方案是由所识别的属性形成的数学空间中的解决方案。 在一些示例中，确定多个检查情景，并且基于感兴趣的缺陷的数量和由所选择的检查情景捕获的滋扰事件的数量，从多个中选择期望的检查情景。