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公开(公告)号：US07751030B2
公开(公告)日：2010-07-06
申请号：US11341381
申请日：2006-01-30
IPC分类号： G03B27/54
CPC分类号： G03F7/70408
摘要： A lithographic projection apparatus includes an illumination system, an interchangeable upper optics module, and a lower optics module. The illumination system provides a beam of radiation. The interchangeable upper optics module receives the beam and includes, sequentially, a beam splitter that splits the beam into portions, an aperture plate, and a plurality of reflecting surfaces. The lower optics module receives portions of the beam from respective ones the reflecting surfaces and directs the portions of the beam onto a substrate. Interference fringes or contact hole patterns are formed on the substrate using the portions of the beam.
摘要翻译： 光刻投影设备包括照明系统，可互换的上部光学模块和下部光学模块。 照明系统提供辐射束。 可互换的上光学模块接收光束，并且依次包括将光束分成多个部分的光束分离器，孔板和多个反射表面。 下部光学模块从相应的反射表面接收光束的部分并将光束的部分引导到衬底上。 使用梁的部分在基板上形成干涉条纹或接触孔图案。
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公开(公告)号：US20070070321A1
公开(公告)日：2007-03-29
申请号：US11561238
申请日：2006-11-17
IPC分类号： G03B27/54
CPC分类号： G03F7/70408 , G03F7/70341 , G03F7/7035 , G03F7/70383 , G03F7/70516
摘要： A lithographic system includes a source of a laser beam; a beamsplitter dividing the laser beam into a plurality of beams; and a plurality of reflecting surfaces that forms interference fringes on a substrate using the plurality of beams. Resolution of the lithographic system is adjustable by adjusting angular orientation of the reflecting surfaces. The beamsplitter is movable along the optical path to adjust the resolution. The reflecting surfaces may be facets of a prism. Each reflecting surface corresponds to a particular beamsplitter position along the optical path, and/or to a particular resolution. The beamsplitter includes a linear grating or a checkerboard grating. The beams are N-way symmetric. A numerical aperture of the system is adjustable by moving the beamsplitter along the optical path. A liquid can be between the substrate and the prism.
摘要翻译： 光刻系统包括激光束源; 分束器将激光束分成多个光束; 以及多个反射表面，其使用所述多个光束在基板上形成干涉条纹。 光刻系统的分辨率可通过调整反射表面的角度方向来调节。 分束器可沿着光路移动以调节分辨率。 反射面可以是棱镜的面。 每个反射表面对应于沿着光路的特定分束器位置和/或特定分辨率。 分束器包括线性光栅或棋盘格栅。 梁是N路对称的。 通过沿着光路移动分束器来调节系统的数值孔径。 液体可以在基板和棱镜之间。
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公开(公告)号：US20060232753A1
公开(公告)日：2006-10-19
申请号：US11108673
申请日：2005-04-19
IPC分类号： G03B27/52
CPC分类号： G03F7/70341
摘要： A liquid immersion lithography system including a projection optical system for directing electromagnetic radiation onto a substrate, and a showerhead for delivering liquid flow between the projection optical system and the substrate. The showerhead includes an injection nozzle and a retrieval nozzle located at different heights. The liquid flow is tilted relative to the substrate. A direction from the injection nozzle to the retrieval nozzle is tilted at approximately 1 to 2 degrees relative to the substrate.
摘要翻译： 一种液浸光刻系统，包括用于将电磁辐射引导到基板上的投影光学系统，以及用于在投影光学系统和基板之间输送液体流的喷头。 喷头包括位于不同高度的注射喷嘴和拾取喷嘴。 液体流动相对于基底倾斜。 从注射喷嘴到回收喷嘴的方向相对于基板倾斜约1至2度。
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公开(公告)号：US20060044539A1
公开(公告)日：2006-03-02
申请号：US10927309
申请日：2004-08-27
IPC分类号： G03B27/54
CPC分类号： G03F7/70408 , G03F7/70341 , G03F7/7035 , G03F7/70383 , G03F7/70516
摘要： A lithographic system includes a laser outputting a laser beam; a beamsplitter dividing the laser beam into a plurality of beams; and a prism for forming interference fringes on a substrate using the plurality of beams. Resolution of the lithographic system is adjustable without replacing any optical components in an optical path of the lithographic system. The beamsplitter is movable along the optical path to adjust the resolution. The prism includes a plurality of sets of facets, each set of facets corresponding to a particular resolution. Each set of facets corresponds to a particular beamsplitter position along the optical path, and/or to a particular resolution. The beamsplitter includes a linear grating or a checkerboard grating. The beams are N-way symmetric. The resolution is adjustable. A numerical aperture of the system is adjustable by moving the beamsplitter along the optical path. A liquid can be between the substrate and the prism.
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公开(公告)号：US07474385B2
公开(公告)日：2009-01-06
申请号：US11561238
申请日：2006-11-17
CPC分类号： G03F7/70408 , G03F7/70341 , G03F7/7035 , G03F7/70383 , G03F7/70516
摘要： A lithographic system includes a source of a laser beam; a beamsplitter dividing the laser beam into a plurality of beams; and a plurality of reflecting surfaces that forms interference fringes on a substrate using the plurality of beams. Resolution of the lithographic system is adjustable by adjusting angular orientation of the reflecting surfaces. The beamsplitter is movable along the optical path to adjust the resolution. The reflecting surfaces may be facets of a prism. Each reflecting surface corresponds to a particular beamsplitter position along the optical path, and/or to a particular resolution. The beamsplitter includes a linear grating or a checkerboard grating. The beams are N-way symmetric. A numerical aperture of the system is adjustable by moving the beamsplitter along the optical path. A liquid can be between the substrate and the prism.
摘要翻译： 光刻系统包括激光束源; 分束器将激光束分成多个光束; 以及多个反射表面，其使用所述多个光束在基板上形成干涉条纹。 光刻系统的分辨率可通过调整反射表面的角度方向来调节。 分束器可沿着光路移动以调节分辨率。 反射面可以是棱镜的面。 每个反射表面对应于沿着光路的特定分束器位置和/或特定分辨率。 分束器包括线性光栅或棋盘格栅。 梁是N路对称的。 通过沿着光路移动分束器来调节系统的数值孔径。 液体可以在基板和棱镜之间。
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公开(公告)号：US20070041002A1
公开(公告)日：2007-02-22
申请号：US11586639
申请日：2006-10-26
IPC分类号： G03B27/42
CPC分类号： G03F7/70341
摘要： A liquid immersion lithography system including a projection optical system for directing electromagnetic radiation onto a substrate, and a showerhead for delivering liquid flow between the projection optical system and the substrate. The showerhead includes an injection nozzle and a retrieval nozzle located at different heights. The liquid flow is tilted relative to the substrate. A direction from the injection nozzle to the retrieval nozzle is tilted at approximately 1 to 2 degrees relative to the substrate.
摘要翻译： 一种液浸光刻系统，包括用于将电磁辐射引导到基板上的投影光学系统，以及用于在投影光学系统和基板之间输送液体流的喷头。 喷头包括位于不同高度的注射喷嘴和拾取喷嘴。 液体流动相对于基底倾斜。 从注射喷嘴到回收喷嘴的方向相对于基板倾斜约1至2度。
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公开(公告)号：US20060170896A1
公开(公告)日：2006-08-03
申请号：US11341381
申请日：2006-01-30
IPC分类号： G03B27/54
CPC分类号： G03F7/70408
摘要： A lithographic projection apparatus includes an illumination system, an interchangeable upper optics module, and a lower optics module. The illumination system provides a beam of radiation. The interchangeable upper optics module receives the beam and includes, sequentially, a beam splitter that splits the beam into portions, an aperture plate, and a plurality of reflecting surfaces. The lower optics module receives portions of the beam from respective ones the reflecting surfaces and directs the portions of the beam onto a substrate. Interference fringes or contact hole patterns are formed on the substrate using the portions of the beam.
摘要翻译： 光刻投影设备包括照明系统，可互换的上部光学模块和下部光学模块。 照明系统提供辐射束。 可互换的上光学模块接收光束，并且依次包括将光束分成多个部分的光束分离器，孔板和多个反射表面。 下部光学模块从相应的反射表面接收光束的部分并将光束的部分引导到衬底上。 使用梁的部分在基板上形成干涉条纹或接触孔图案。
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公开(公告)号：US07492442B2
公开(公告)日：2009-02-17
申请号：US10927309
申请日：2004-08-27
CPC分类号： G03F7/70408 , G03F7/70341 , G03F7/7035 , G03F7/70383 , G03F7/70516
摘要： A lithographic system includes a laser outputting a laser beam; a beamsplitter dividing the laser beam into a plurality of beams; and a prism for forming interference fringes on a substrate using the plurality of beams. Resolution of the lithographic system is adjustable without replacing any optical components in an optical path of the lithographic system. The beamsplitter is movable along the optical path to adjust the resolution. The prism includes a plurality of sets of facets, each set of facets corresponding to a particular resolution. Each set of facets corresponds to a particular beamsplitter position along the optical path, and/or to a particular resolution. The beamsplitter includes a linear grating or a checkerboard grating. The beams are N-way symmetric. The resolution is adjustable. A numerical aperture of the system is adjustable by moving the beamsplitter along the optical path. A liquid can be between the substrate and the prism.
摘要翻译： 光刻系统包括输出激光束的激光; 分束器将激光束分成多个光束; 以及用于使用所述多个光束在基板上形成干涉条纹的棱镜。 光刻系统的分辨率是可调节的，而不替代光刻系统的光路中的任何光学部件。 分束器可沿着光路移动以调节分辨率。 棱镜包括多组小平面，每组面对应于特定分辨率。 每组小平面对应于沿着光路的特定分束器位置和/或特定分辨率。 分束器包括线性光栅或棋盘格栅。 梁是N路对称的。 分辨率可调。 通过沿着光路移动分束器来调节系统的数值孔径。 液体可以在基板和棱镜之间。
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公开(公告)号：US07253879B2
公开(公告)日：2007-08-07
申请号：US11586639
申请日：2006-10-26
CPC分类号： G03F7/70341
摘要： A liquid immersion lithography system including a projection optical system for directing electromagnetic radiation onto a substrate, and a showerhead for delivering liquid flow between the projection optical system and the substrate. The showerhead includes an injection nozzle and a retrieval nozzle located at different heights. The liquid flow is tilted relative to the substrate. A direction from the injection nozzle to the retrieval nozzle is tilted at approximately 1 to 2 degrees relative to the substrate.
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10.发明申请Liquid immersion lithography system having a tilted showerhead relative to a substrate 有权液浸光刻系统相对于基底具有倾斜的喷头公开(公告)号：US20060238721A1
公开(公告)日：2006-10-26
申请号：US11403196
申请日：2006-04-13
IPC分类号： G03B21/18
CPC分类号： G03F7/70341
摘要： A liquid immersion lithography system includes projection optics and a showerhead. The projection optics are configured to expose a substrate with a patterned beam. The showerhead includes a first nozzle and a second nozzle that are configured to be at different distances from a surface of the substrate during an exposure operation.
摘要翻译： 液浸光刻系统包括投影光学元件和喷头。 投影光学器件被配置为用图案化的光束曝光衬底。 喷头包括第一喷嘴和第二喷嘴，其被配置为在曝光操作期间与基板的表面不同的距离。
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