公开(公告)号：US06906607B1

公开(公告)日：2005-06-14

申请号：US10129682

申请日：2000-11-08

申请人： Lutz Weber ,  Matthias Nienhaus ,  Stephan Kleen ,  Wolfgang Ehrfeld

发明人： Lutz Weber ,  Matthias Nienhaus ,  Stephan Kleen ,  Wolfgang Ehrfeld

IPC分类号： H01F7/02 ,  H01F41/02

CPC分类号： H01F7/0221 ,  H01F41/0266

摘要： The object of the invention is to produce multipole magnetic systems that are composed of a plurality of individual magnetic components that preferably are made of rare-earth magnetic material. The invention relates to a method for producing and magazining at least one individual magnetic component, a magazine for at least one individual magnetic component by molding and for conventionally magnetizing the same. The invention further relates to a method of assembly for producing a magnetic system and to the resulting magnetic systems. The invention teaches that extremely flat multipole magnetic systems in the form of magnet rings or magnet strips and three-dimensional magnet bodies such as a magnetic scale, for example, can be produced by means of individual magnetic components that are directly adjacent to each other or are arranged at a distance by means of a molding material, for example. The magnetic systems taught by the invention are provided with a particularly high level of integration of the individual magnetic components and a uniform overall magnetization of the magnet segments which, acting as permanent magnet components, can be used in electromagnetic drives, magnetic path and angle measuring systems, magnetic couplings and valves, for example.

摘要翻译： 本发明的目的是制造由多个单独的磁性部件组成的多极磁性体系，该多个磁性部件优选由稀土类磁性材料制成。 本发明涉及一种用于通过模制生产和杂交至少一个单独的磁性部件，用于至少一个单独的磁性部件并用于常规磁化的磁带的方法。 本发明还涉及一种用于制造磁系统和所得磁系统的组装方法。 本发明教导了例如可以通过直接相邻的单个磁性部件来产生磁环或磁条形式的非常平坦的多极磁体系统，例如磁标尺的三维磁体，或 通过例如模制材料一定距离地布置。 由本发明教导的磁系统具有特别高水平的各个磁性部件的集成度和磁体段的均匀的整体磁化作用，其作为永磁体部件可用于电磁驱动，磁路和角度测量 系统，磁耦合和阀门。

公开(公告)号：US06700278B1

公开(公告)日：2004-03-02

申请号：US09889500

申请日：2001-10-05

申请人： Wolfgang Ehrfeld ,  Hans-Dieter Stölting ,  Frank Michel ,  Matthias Nienhaus ,  Stephan Kleen

发明人： Wolfgang Ehrfeld ,  Hans-Dieter Stölting ,  Frank Michel ,  Matthias Nienhaus ,  Stephan Kleen

IPC分类号： H02K2900

CPC分类号： H02K5/1737 ,  H02K1/27 ,  H02K3/47 ,  H02K15/03 ,  H02K21/24

摘要： The invention relates to a disk motor with an armature disk, which is rotatably mounted and provided with permanent magnets, and with a stator which comprises a stator plate which is equipped with coils. The aim of the invention is to provide a disk motor that is as flat as possible and that is characterized by an improved smoothness of running. To this end, an annular soft-magnetic prestressing device is arranged concentrically on the stator plate in such a manner that at least one section of the prestressing device is located below the coil window of the coils in the axial direction. The armature disk may support an annular flux-return element opposite which the annular prestressing device is located in the radial direction. Said prestressing device has a cross-sectional contour that guides the magnetic lines of electric flux from the annular flux-return element to the coil window.

摘要翻译： 本发明涉及一种具有电枢盘的盘式电动机，该电动机可旋转地安装并设置有永磁体，并且具有定子，该定子包括具有线圈的定子板。 本发明的目的是提供尽可能平坦的盘式电动机，其特征在于提高了运行的平滑度。 为此，将环形软磁预应力装置同心地布置在定子板上，使得预应力装置的至少一个部分沿着轴向位于线圈的线圈窗下方。 电枢盘可以支撑与环形预应力装置位于径向方向相对的环形磁通返回元件。 所述预应力装置具有将来自环形磁通返回元件的电流的磁线引导到线圈窗的横截面轮廓。

公开(公告)号：US07086145B2

公开(公告)日：2006-08-08

申请号：US10220210

申请日：2001-02-27

申请人： Wolfgang Ehrfeld ,  Matthias Nienhaus ,  Udo Berg ,  Felix Schmitz ,  Marc Begemann ,  Yannick Ansel

发明人： Wolfgang Ehrfeld ,  Matthias Nienhaus ,  Udo Berg ,  Felix Schmitz ,  Marc Begemann ,  Yannick Ansel

IPC分类号： B23Q7/10

CPC分类号： B81C3/008 ,  B23P19/04 ,  Y10T29/49 ,  Y10T29/5313 ,  Y10T29/53261 ,  Y10T29/53478 ,  Y10T29/53513

摘要： The invention relates to an assembly device for microcomponents that are disposed in a magazine. The inventive assembly device does not require any optical systems and allows for an exact positioning of the microcomponents. The assembly will also be unaffected by any position changes of the microcomponents caused by wastage. The assembly device is provided with mechanical alignment devices that engage with or act upon adjustment structures of the magazine. The assembly device further comprises clamping devices for fixing the magazine and at least one plunger for ejecting at least one microcomponent from the magazine. An assembly platform is provided in the upper tool or in the lower tool of the assembly device and receives the microcomponents in a defined position. The invention further relates to a method for assembling microcomponents and to a corresponding magazine.

摘要翻译： 本发明涉及一种微型组件的组装装置，它们设置在盒体中。 本发明的装配装置不需要任何光学系统并且允许微型部件的精确定位。 组装也不会受到浪费造成的微型零件的任何位置变化的影响。 组装装置设置有与仓库的调整结构接合或作用于机架的调节结构的机械对准装置。 组装装置还包括用于固定盒的夹紧装置和用于从盒中排出至少一个微组件的至少一个柱塞。 组装平台设置在组装装置的上部工具或下部工具中，并将微组件接收在限定位置。 本发明还涉及一种用于组装微型组件和相应的盒子的方法。

公开(公告)号：US07041433B1

公开(公告)日：2006-05-09

申请号：US10130221

申请日：2000-11-17

申请人： Felix Schmitz ,  Matthias Nienhaus ,  Manfred Lacher

发明人： Felix Schmitz ,  Matthias Nienhaus ,  Manfred Lacher

IPC分类号： G03F7/00

CPC分类号： B81C99/008 ,  B81B2201/034 ,  B81C2201/032 ,  G03F7/00 ,  G03F7/0035 ,  H01F17/0006 ,  H01F41/042

摘要： The invention relates to a flat coil and to a lthographic method for producing microcomponents with metal component sources in the sub-millimeter range. According to the inventive method, a resist material is structured by means of selective exposition and removing the unexposed zones and filling in the gaps between the resist structures with metal by means of a galvanic method to produe the metal component structures. The aim of the invention is to improve such a method so that the microcomponents can be subdivided during said process. To this end, a structured three-dimensional sacrificial metal layer is produced during the production of the microcomponent, said sacrificial layer delimiting the microcomponent and being removed once the microcomponent is due to be subdivided. The invention also relates to a method for producing microcomponents with component structures of cross-linkable resist material and to a flat coil for micromotors with at least one coil layer with strip conductors in the sub-millimeter range.

摘要翻译： 本发明涉及一种扁平线圈以及用于制造具有亚毫米范围内的金属成分源的微型部件的印刷方法。 根据本发明的方法，通过选择性地曝光和去除未曝光的区域并通过电镀方法用金属填充抗蚀剂结构之间的间隙来制造抗蚀剂材料，以产生金属组分结构。 本发明的目的是改进这种方法，使得微组件可以在所述方法期间细分。 为此，在微组件的制造期间产生结构化的三维牺牲金属层，所述牺牲层限定微组件，并且一旦微元件被细分就被移除。 本发明还涉及一种用于制造具有可交联抗蚀剂材料的组分结构的微组件和具有至少一个带子导体在亚毫米范围内的线圈层的微型电动机的扁平线圈的方法。

公开(公告)号：US06746819B1

公开(公告)日：2004-06-08

申请号：US10130223

申请日：2002-08-05

申请人： Felix Schmitz ,  Matthias Nienhaus

发明人： Felix Schmitz ,  Matthias Nienhaus

IPC分类号： G03F711

CPC分类号： B81C3/001 ,  B81C2201/019 ,  G03F7/11 ,  H01L21/76802 ,  H01L21/76879

摘要： The invention relates to a lithographic method for producing microcomponents with component structures in the submillimeter range. According to the inventive method, a structured adhesive layer is applied to a metal layer and then a photostructured epoxy resin layer is applied to said adhesive layer. Said epoxide resin is structured by means of selective exposition and removing the unexposed zones and filling in the gaps between the resin structures with metal by electroplating. The aim of the invention is to provide an adhesive layer that is suitable for photostructured epoxy resins, especially for SU-8 resist material and that prevents the resist material from being detached. To this end, the adhesive layer consists of polyimide or a polyimide mixture.

摘要翻译： 本发明涉及用于生产具有亚毫米范围内的组分结构的微组件的光刻方法。 根据本发明的方法，将结构化粘合剂层施加到金属层，然后将光致结构的环氧树脂层施加到所述粘合剂层。 所述环氧树脂通过选择性曝光和去除未曝光区域并通过电镀用金属填充树脂结构之间的间隙来构成。 本发明的目的是提供一种适用于光结构环氧树脂的粘合剂层，特别是用于SU-8抗蚀剂材料，并且防止抗蚀剂材料脱落。 为此，粘合剂层由聚酰亚胺或聚酰亚胺混合物组成。