公开(公告)号：US10442680B2

公开(公告)日：2019-10-15

申请号：US15182389

申请日：2016-06-14

Applicant: MEMS DRIVE, INC.

Inventor： Xiaolei Liu ,  Kegang Huang ,  Guiqin Wang ,  Matthew Ng ,  Benson Mai ,  Changgeng Liu

IPC: H02N2/02 ,  B81B3/00 ,  H01L41/09

Abstract: Electric connection flexures for moving stages of microelectromechanical systems (MEMS) devices are disclosed. The disclosed flexures may provide an electrical and mechanical connection between a fixed frame and a moving frame, and are flexible in the moving frame's plane of motion. In implementations, the flexures are formed using a process that embeds the two ends of each flexure in the fixed frame and moving frame, respectively.