公开(公告)号：US20190308871A1

公开(公告)日：2019-10-10

申请号：US16385486

申请日：2019-04-16

Applicant: MEMS Drive, Inc.

Inventor： Xiaolei Liu ,  Matthew Ng ,  Robert Calvet ,  Gerardo Morabito

IPC: B81B3/00 ,  B81B7/00 ,  H02N1/00

Abstract: Caging structures are disclosed for caging or otherwise reducing the mechanical shock pulse experienced by MEMS device beam structures during events that may cause mechanical shock to the MEMS device. The caging structures at least partially surround the beam such that they limit the motion of the beam in a direction perpendicular to the beam's longitudinal axis, thereby reducing stress on the beam during a mechanical shock event. The caging structures may be used in combination with mechanical shock-resistant beams.

公开(公告)号：US10322925B2

公开(公告)日：2019-06-18

申请号：US15165893

申请日：2016-05-26

Applicant: MEMS DRIVE, INC.

Inventor： Xiaolei Liu ,  Matthew Ng ,  Robert Calvet ,  Gerardo Morabito

IPC: B81B7/02 ,  H01H3/60 ,  B81B7/00 ,  B81B3/00 ,  H02N1/00

Abstract: Caging structures are disclosed for caging or otherwise reducing the mechanical shock pulse experienced by MEMS device beam structures during events that may cause mechanical shock to the MEMS device. The caging structures at least partially surround the beam such that they limit the motion of the beam in a direction perpendicular to the beam's longitudinal axis, thereby reducing stress on the beam during a mechanical shock event. The caging structures may be used in combination with mechanical shock-resistant beams.

公开(公告)号：US20170341928A1

公开(公告)日：2017-11-30

申请号：US15412488

申请日：2017-01-23

Applicant: MEMS Drive, Inc.

Inventor： Xiaolei Liu ,  Matthew Ng ,  Robert Calvet ,  Gerardo Morabito

IPC: B81B3/00 ,  H02N1/00 ,  B81B7/00

CPC classification number: B81B3/0021 ,  B81B3/0051 ,  B81B7/0016 ,  B81B7/0058 ,  B81B2201/033 ,  B81B2203/0118 ,  B81B2203/0136 ,  H02N1/008

Abstract: Caging structures are disclosed for caging or otherwise reducing the mechanical shock pulse experienced by MEMS device beam structures during events that may cause mechanical shock to the MEMS device. The caging structures at least partially surround the beam such that they limit the motion of the beam in a direction perpendicular to the beam's longitudinal axis, thereby reducing stress on the beam during a mechanical shock event. The caging structures may be used in combination with mechanical shock-resistant beams.

公开(公告)号：US10259702B2

公开(公告)日：2019-04-16

申请号：US15412488

申请日：2017-01-23

Applicant: MEMS Drive, Inc.

Inventor： Xiaolei Liu ,  Matthew Ng ,  Robert Calvet ,  Gerardo Morabito

IPC: H02N1/00 ,  B81B3/00 ,  B81B7/00

Abstract: Caging structures are disclosed for caging or otherwise reducing the mechanical shock pulse experienced by MEMS device beam structures during events that may cause mechanical shock to the MEMS device. The caging structures at least partially surround the beam such that they limit the motion of the beam in a direction perpendicular to the beam's longitudinal axis, thereby reducing stress on the beam during a mechanical shock event. The caging structures may be used in combination with mechanical shock-resistant beams.