公开(公告)号：US20210003378A1

公开(公告)日：2021-01-07

申请号：US16650576

申请日：2018-09-26

申请人： MINEBEA MITSUMI Inc.

发明人： Toshiaki ASAKAWA ,  Shinichi NIWA ,  Yuta AIZAWA ,  Atsushi KITAMURA

IPC分类号： G01B7/16

摘要： A strain gauge includes a flexible substrate, and a resistor formed of material including at least one from among chromium and nickel, on or above the substrate. The substrate has an expansion coefficient in a range of from 7 ppm/K to 20 ppm/K.

公开(公告)号：US20220411915A1

公开(公告)日：2022-12-29

申请号：US17929830

申请日：2022-09-06

申请人： MINEBEA MITSUMI Inc.

发明人： Toshiaki ASAKAWA ,  Yuta AIZAWA ,  Shinya TODA ,  Shintaro TAKATA ,  Shinichi NIWA

IPC分类号： C23C14/20 ,  C23C14/10 ,  C23C14/06 ,  G01B7/16 ,  C23C14/08 ,  C23C14/00 ,  G01L1/22

摘要： A strain gauge includes a flexible substrate and a functional layer formed of a metal, an alloy, or a metal compound, the functional layer being directly on one surface of the substrate. The strain gauge includes a resistor formed of a film that includes Cr, CrN, and Cr2N and that is formed with α-Cr as a main component. The functional layer includes a function of promoting crystal growth of α-Cr and forming an α-Cr based film.

公开(公告)号：US20200343027A1

公开(公告)日：2020-10-29

申请号：US16758506

申请日：2018-10-30

申请人： MINEBEA MITSUMI Inc.

发明人： Toshiaki ASAKAWA ,  Shinichi NIWA ,  Shintaro TAKATA

IPC分类号： H01C10/10 ,  H01C1/01 ,  H01C1/14 ,  H01C17/12 ,  H01C17/28 ,  G01L1/22

摘要： The present strain gauge includes a substrate having flexibility; a resistor formed from a material containing at least one of chromium and nickel, on the substrate; and an oxidation impeding layer formed on a non-oxidized surface corresponding to an upper surface of the resistor.

公开(公告)号：US20200325571A1

公开(公告)日：2020-10-15

申请号：US16650560

申请日：2018-09-26

申请人： MINEBEA MITSUMI Inc.

发明人： Toshiaki ASAKAWA ,  Yuta AIZAWA ,  Shinya TODA ,  Shintaro TAKATA ,  Shinichi NIWA

IPC分类号： C23C14/20 ,  G01B7/16 ,  C23C14/00 ,  C23C14/06 ,  C23C14/10 ,  C23C14/08

摘要： A strain gauge includes a flexible substrate; a functional layer formed of a metal, an alloy, or a metal compound, on one surface of the substrate; and a resistor formed of material including at least one from among chromium and nickel, on one surface of the functional layer.

公开(公告)号：US20210018383A1

公开(公告)日：2021-01-21

申请号：US17043898

申请日：2019-04-01

申请人： MINEBEA MITSUMI Inc.

发明人： Toshiaki ASAKAWA ,  Shinichi NIWA ,  Shintaro TAKATA ,  Shinya TODA

IPC分类号： G01L1/22

摘要： A strain gauge includes a flexible substrate, and a resistor formed of material containing at least one from among chromium and nickel, on or above the substrate. The resistor includes a first layer that is a lowermost layer; and a second layer that is a surface layer laminated on or: above the first layer. The second layer is a layer having a higher density than the first layer.