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公开(公告)号:US20210305493A1
公开(公告)日:2021-09-30
申请号:US17146841
申请日:2021-01-12
发明人: Yasuhiko TSURU , Yuko YAMAMOTO , Takashi NAKANO , Kentaro JINNO , Misaki FUKUYAMA , Yuki ASAI
IPC分类号: H01L41/314 , G01B17/02 , H01L41/08
摘要: A method of manufacturing a dielectric film includes the steps of: adjusting a particle size distribution of particles of a dielectric substance to fall within a specified range; kneading the particles having the adjusted particle size distribution and a dispersion medium to obtain a slurry; and forming the slurry into a film shape to obtain a film-like compact.