公开(公告)号：US20150108031A1

公开(公告)日：2015-04-23

申请号：US14579349

申请日：2014-12-22

申请人： MITSUBISHI HEAVY INDUSTRIES FOOD & PACKAGING MACHINERY CO., LTD. ,  KIRIN BEER KABUSHIKI KAISHA

发明人： Yuji ASAHARA ,  Hideo YAMAKOSHI ,  Minoru DANNO ,  Seiji GOTO ,  Akira SHIRAKURA ,  Masaki NAKAYA ,  Kiyoshi HIROYA

IPC分类号： C23C16/503 ,  B65D25/14

CPC分类号： C23C16/503 ,  B65D23/02 ,  B65D25/14 ,  C23C16/045 ,  C23C16/509 ,  H01J37/32348 ,  H01J37/32623 ,  H05H1/24 ,  H05H1/2406 ,  H05H2001/2412

摘要： A barrier-film forming apparatus that forms a barrier film on an inner face of a container having a concave or convex portion as a processing target, including: a dielectric member having a cavity sized to enclose the container, an external electrode covering an outer circumference of the dielectric member, an exhaust unit installed on an end face of the external electrode on a side where a mouth of the container is located, with an insulating member interposed therebetween, and depressurizing inside of the container through an exhaust pipe, an internal electrode inserted from a side of the exhaust pipe and also serving as a gas blowout unit that blows out medium gas for generating a barrier film into the container, and an electric-field applying unit that applies an electric field for generating exhaust between the external electrode and a ground electrode.

摘要翻译： 一种阻隔膜形成装置，其在具有凹部或凸部的容器的内表面上形成阻挡膜作为加工对象，所述阻挡膜形成装置包括：电介质构件，其具有用于封闭所述容器的尺寸的空腔，覆盖外周的外部电极 所述绝缘构件安装在所述外部电极的位于所述容器的口侧的端面上的排气单元，其间具有绝缘构件，并且通过排气管对所述容器的内部进行减压，所述内部电极 从排气管的一侧插入并且还用作将用于产生阻挡膜的介质气体吹出到容器中的气体吹出单元，以及电场施加单元，其在外部电极和外部电极之间施加用于产生排气的电场 接地电极。