公开(公告)号：US10415947B2

公开(公告)日：2019-09-17

申请号：US15647446

申请日：2017-07-12

Applicant: MITUTOYO CORPORATION

Inventor： Hideyuki Arai ,  Kazuya Iwasaki ,  Minoru Tanaka ,  Shuichi Kamiyama ,  Kazuhiko Hidaka

IPC: G01B5/016 ,  G01B5/00 ,  G01B5/02 ,  G01B5/12 ,  G01B5/14

Abstract: A probe includes a movable plate to which a stylus capable of contacting a measurable object is mounted, the movable plate displaceable in an X direction; a static plate arranged to overlap with the movable plate; a counter plate facing the movable plate and the static plate; an elastic movable side connection plate, the movable side connection plate connecting the counter plate at at least three places with each of a first end connector positioned toward a first end of the movable plate in the X direction and second end connectors positioned toward a second end in the X direction; and a static side connection plate which connects the static plate and the counter plate. An entire length of the first end connector in a Y direction orthogonal to the X direction is the same size as the entire length of the second end connectors in the Y direction.