公开(公告)号：US10415947B2

公开(公告)日：2019-09-17

申请号：US15647446

申请日：2017-07-12

Applicant: MITUTOYO CORPORATION

Inventor： Hideyuki Arai ,  Kazuya Iwasaki ,  Minoru Tanaka ,  Shuichi Kamiyama ,  Kazuhiko Hidaka

IPC: G01B5/016 ,  G01B5/00 ,  G01B5/02 ,  G01B5/12 ,  G01B5/14

Abstract: A probe includes a movable plate to which a stylus capable of contacting a measurable object is mounted, the movable plate displaceable in an X direction; a static plate arranged to overlap with the movable plate; a counter plate facing the movable plate and the static plate; an elastic movable side connection plate, the movable side connection plate connecting the counter plate at at least three places with each of a first end connector positioned toward a first end of the movable plate in the X direction and second end connectors positioned toward a second end in the X direction; and a static side connection plate which connects the static plate and the counter plate. An entire length of the first end connector in a Y direction orthogonal to the X direction is the same size as the entire length of the second end connectors in the Y direction.

公开(公告)号：US10113931B2

公开(公告)日：2018-10-30

申请号：US15092065

申请日：2016-04-06

Applicant: MITUTOYO CORPORATION

Inventor： Hideyuki Arai ,  Kazuhiko Hidaka ,  Minoru Tanaka ,  Tomoyuki Miyazaki ,  Takeshi Yamamoto

IPC: G01B7/008 ,  G01L25/00

Abstract: A stylus support portion moveable in an X direction is arranged separate from a fixed portion. A plate spring has a first end fixated to an end portion of the stylus support portion in an X (+) direction, a second end fixated to the fixed portion, and a principal surface facing the X direction. A plate spring has a first end fixated to an end portion of the stylus support portion in an X (−) direction, a second end fixated to the fixed portion, and a principal surface facing the X direction. A first permanent magnet is provided on the end portion of the stylus support portion in the X (+) direction. A second permanent magnet is provided on the end portion of the stylus support portion in the X (−) direction. A third permanent magnet is provided to the fixed portion so that a magnetic force in the X direction acts on an area between the first permanent magnet and the third permanent magnet. A fourth permanent magnet is provided to the fixed portion so that the magnetic force in the X direction acts on an area between the second permanent magnet and the fourth permanent magnet.