公开(公告)号：US20150241201A1

公开(公告)日：2015-08-27

申请号：US14621691

申请日：2015-02-13

Applicant: MITUTOYO CORPORATION

Inventor： Yoshimasa SUZUKI ,  Reiya OTAO

IPC: G01B9/02 ,  G01B11/24

CPC classification number: G01B9/02022 ,  G01B9/02067 ,  G01B11/2441

Abstract: A grazing incidence interferometer is configured to measure a profile of a target surface using a measurement beam radiated on the target surface in a direction oblique to a normal line of the target surface and reflected on the target surface to cause an interference with a reference beam. The grazing incidence interferometer includes: a light source to emit light; a first polarization beam splitter that splits the light from the light source into the reference beam and the measurement beam; a ratio changer that changes a light amount ratio between the reference beam and the measurement beam; a second polarization beam splitter that synthesizes the measurement beam reflected on the target surface and the reference beam; and an image capturing camera that receives the synthesized beam of the reference beam and the measurement beam.

Abstract translation: 放射入射干涉仪被配置为使用辐射在目标表面上的测量光束在与目标表面的法线相反的方向上倾斜并在目标表面上反射以引起与参考光束的干涉来测量目标表面的轮廓。 掠入射干涉仪包括：发光的光源; 第一偏振分束器，其将来自光源的光分成参考光束和测量光束; 改变参考光束和测量光束之间的光量比的比率变换器; 第二偏振分束器，其合成在目标表面上反射的测量光束和参考光束; 以及接收参考光束和测量光束的合成光束的摄像摄像机。

公开(公告)号：US20150226538A1

公开(公告)日：2015-08-13

申请号：US14617018

申请日：2015-02-09

Applicant: MITUTOYO CORPORATION

Inventor： Reiya OTAO ,  Yutaka KURIYAMA

IPC: G01B9/02 ,  G01B11/24

CPC classification number: G01B9/02022 ,  G01B9/02081 ,  G01B9/02085 ,  G01B11/2441 ,  G01B11/306

Abstract: A grazing incidence interferometer includes: a graduated instrument showing an index at an overlapping area where adjacent ones of measurement areas overlap with each other; and a measuring unit including: an image acquiring unit that acquires interference fringe images at image-capturing positions for the measurement areas, individually, the interference fringe images each showing each of the measurement areas and the index; and a profile computing unit that combines measurement results based on the interference fringe images of the adjacent ones of the measurement areas in a manner that images of the index included in common in the interference fringe images of the adjacent ones of the measurement areas are superimposed on each other.

Abstract translation: 放射入射干涉仪包括：显示在相邻测量区域彼此重叠的重叠区域处的折射率的刻度仪; 以及测量单元，包括：图像获取单元，分别获取测量区域的图像拍摄位置处的干涉条纹图像，每个干涉条纹图像分别示出每个测量区域和索引; 以及轮廓计算单元，其以相邻测量区域的干涉条纹图像中共同包含的索引的图像叠加在一起的方式组合基于相邻测量区域的干涉条纹图像的测量结果 彼此。