公开(公告)号：US20170248402A1

公开(公告)日：2017-08-31

申请号：US15440280

申请日：2017-02-23

Applicant: MITUTOYO CORPORATION

Inventor： Satoshi KOGA ,  Akinori SAITO ,  Hiroyuki KANAMORI ,  Yutaka KURIYAMA ,  Nobuhiro ISHIKAWA

IPC: G01B7/012

Abstract: A measuring probe includes two supporting members, each having a rotationally symmetric shape and allowing for an attitude change of a stylus, in an axial direction of a probe housing. Four detection elements are disposed at fourfold symmetric positions in one of the two supporting members that includes four deformable arm parts. A signal processing circuit includes a first processing part that processes outputs of the detection elements to output three displacement signals representing displacement components of a contact part in mutually perpendicular three directions, respectively. The measuring probe capable of reducing measurement directional dependency of sensitivity with a simple configuration while maintaining high sensitivity is thus provided.

公开(公告)号：US20170248400A1

公开(公告)日：2017-08-31

申请号：US15440440

申请日：2017-02-23

Applicant: MITUTOYO CORPORATION

Inventor： Satoshi KOGA ,  Akinori SAITO ,  Hiroyuki KANAMORI ,  Yutaka KURIYAMA ,  Nobuhiro ISHIKAWA

IPC: G01B5/30 ,  G01B5/016

CPC classification number: G01B5/30 ,  G01B5/016 ,  G01B7/001 ,  G01B7/012

Abstract: A measuring probe includes: a stylus having a contact part to be brought into contact with an object to be measured; a probe housing capable of supporting the stylus on an axial center; and a detection element capable of detecting a movement of the contact part. The measuring probe further includes: two supporting members disposed in an axial direction of the probe housing, the supporting member allowing for an attitude change of the stylus; and a coupling shaft for coupling the two supporting members together. The detection element is disposed in one of the two supporting members that is farthest away from a rotational center position of rotation generated in the stylus when a measuring force is applied to the contact part from a direction perpendicular to the axial direction, to detect a strain amount of the one of the two supporting members.

公开(公告)号：US20150226538A1

公开(公告)日：2015-08-13

申请号：US14617018

申请日：2015-02-09

Applicant: MITUTOYO CORPORATION

Inventor： Reiya OTAO ,  Yutaka KURIYAMA

IPC: G01B9/02 ,  G01B11/24

CPC classification number: G01B9/02022 ,  G01B9/02081 ,  G01B9/02085 ,  G01B11/2441 ,  G01B11/306

Abstract: A grazing incidence interferometer includes: a graduated instrument showing an index at an overlapping area where adjacent ones of measurement areas overlap with each other; and a measuring unit including: an image acquiring unit that acquires interference fringe images at image-capturing positions for the measurement areas, individually, the interference fringe images each showing each of the measurement areas and the index; and a profile computing unit that combines measurement results based on the interference fringe images of the adjacent ones of the measurement areas in a manner that images of the index included in common in the interference fringe images of the adjacent ones of the measurement areas are superimposed on each other.

Abstract translation: 放射入射干涉仪包括：显示在相邻测量区域彼此重叠的重叠区域处的折射率的刻度仪; 以及测量单元，包括：图像获取单元，分别获取测量区域的图像拍摄位置处的干涉条纹图像，每个干涉条纹图像分别示出每个测量区域和索引; 以及轮廓计算单元，其以相邻测量区域的干涉条纹图像中共同包含的索引的图像叠加在一起的方式组合基于相邻测量区域的干涉条纹图像的测量结果 彼此。

公开(公告)号：US20170089683A1

公开(公告)日：2017-03-30

申请号：US15271593

申请日：2016-09-21

Applicant: MITUTOYO CORPORATION

Inventor： Yuichiro YOKOYAMA ,  Takeshi HAGINO ,  Yutaka KURIYAMA

IPC: G01B5/008

CPC classification number: G01B5/008 ,  G01N25/16

Abstract: A measurement target and a reference gauge are placed in parallel in an inside of a temperature-controlled chamber. After an interior temperature of the temperature-controlled chamber is set at a first temperature, a relative measurement of a length from a first surface to a second surface of the measurement target is performed with reference to a length from a first reference surface to a second reference surface of the reference gauge. Then, the interior temperature of the temperature-controlled chamber is set at a second temperature and a relative measurement of the length from the first surface to the second surface is similarly performed with reference to the length from the first reference surface to the second reference surface. A CTE of the measurement target is calculated based on the length of the measurement target at the first temperature and the length of the measurement target at the second temperature.