公开(公告)号：US20210063573A1

公开(公告)日：2021-03-04

申请号：US16997823

申请日：2020-08-19

Applicant: Mitutoyo Corporation

Inventor： Yoshimasa SUZUKI ,  Shinichi HARA ,  Hiroki UJIHARA

IPC: G01S17/34 ,  G01S7/4912 ,  G01S7/4913

Abstract: A measurement apparatus includes a laser apparatus, a branch that branches a frequency-modulated laser beam into a reference light and a measurement light, a beat signal generator that generates a beat signal by mixing the reference light and a reflected light that is the measurement light radiated onto an object to be measured, a first analyzer that analyses a first signal component corresponding to a difference in a propagation distance between the reference light and the measurement light on the basis of the beat signal, a second analyzer that analyses a second signal component corresponding to a cavity frequency of an optical cavity on the basis of the beat signal, and calculation circuitry that calculates the difference in the propagation distance between the reference light and the measurement light.

公开(公告)号：US20200379112A1

公开(公告)日：2020-12-03

申请号：US16887941

申请日：2020-05-29

Applicant: Mitutoyo Corporation

Inventor： Hiroki UJIHARA ,  Yoshimasa SUZUKI ,  Shinichi HARA

IPC: G01S17/34 ,  G01S7/48 ,  G01S7/481

Abstract: A measurement apparatus, including: a laser apparatus that outputs a frequency-modulated laser beam with a plurality of modes; a branching part that branches the frequency-modulated laser beam into a reference light and a measurement light; a beat signal generation part that generates a plurality of beat signals by mixing the reference light and a reflected light that is reflected by radiating the measurement light onto an object to be measured; a conversion part that converts the plurality of beat signals into digital signals by sampling the beat signals at a frequency greater than or equal to four times a resonator frequency of the laser resonator; and a calculation part that calculates a distance from the measurement apparatus to the object to be measured on the basis of the digital signals is provided.

公开(公告)号：US20220057512A1

公开(公告)日：2022-02-24

申请号：US17397850

申请日：2021-08-09

Applicant: Mitutoyo Corporation

Inventor： Shinji KOMATSUZAKI ,  Yoshimasa SUZUKI ,  Tomotaka TAKAHASHI

IPC: G01S17/34 ,  G01S7/4912

Abstract: A measurement apparatus including: a laser that outputs a frequency-modulated laser beam; a branch that splits the frequency-modulated laser beam into a reference light and a measurement light; a beat signal generator that generates a beat signal by mixing the reference light and a reflected light that is reflected by radiating the measurement light onto an object to be measured; a frequency analyzer that frequency-analyzes the beat signal; a storage that stores a reference frequency signal which is a frequency signal obtained by converting a reference signal output by the beat signal generator in a state without the object to be measured; and calculation circuitry that calculates a difference between propagation distances of the reference light and the measurement light.

公开(公告)号：US20150241201A1

公开(公告)日：2015-08-27

申请号：US14621691

申请日：2015-02-13

Applicant: MITUTOYO CORPORATION

Inventor： Yoshimasa SUZUKI ,  Reiya OTAO

IPC: G01B9/02 ,  G01B11/24

CPC classification number: G01B9/02022 ,  G01B9/02067 ,  G01B11/2441

Abstract: A grazing incidence interferometer is configured to measure a profile of a target surface using a measurement beam radiated on the target surface in a direction oblique to a normal line of the target surface and reflected on the target surface to cause an interference with a reference beam. The grazing incidence interferometer includes: a light source to emit light; a first polarization beam splitter that splits the light from the light source into the reference beam and the measurement beam; a ratio changer that changes a light amount ratio between the reference beam and the measurement beam; a second polarization beam splitter that synthesizes the measurement beam reflected on the target surface and the reference beam; and an image capturing camera that receives the synthesized beam of the reference beam and the measurement beam.

Abstract translation: 放射入射干涉仪被配置为使用辐射在目标表面上的测量光束在与目标表面的法线相反的方向上倾斜并在目标表面上反射以引起与参考光束的干涉来测量目标表面的轮廓。 掠入射干涉仪包括：发光的光源; 第一偏振分束器，其将来自光源的光分成参考光束和测量光束; 改变参考光束和测量光束之间的光量比的比率变换器; 第二偏振分束器，其合成在目标表面上反射的测量光束和参考光束; 以及接收参考光束和测量光束的合成光束的摄像摄像机。

公开(公告)号：US20130321821A1

公开(公告)日：2013-12-05

申请号：US13903472

申请日：2013-05-28

Applicant: MITUTOYO CORPORATION

Inventor： Yoshimasa SUZUKI ,  Akinori SAITO

IPC: G01B9/02

CPC classification number: G01B9/02056 ,  G01B9/02091

Abstract: A profile measuring instrument includes: a fixed member of which position relative to a workpiece having a surface to be profile-measured is fixed; a scanning member supported by the fixed member and movable in a scan direction along the surface of the workpiece relative to the fixed member; a laser interferometer that detects a displacement of the surface of the workpiece along the scan direction. The laser interferometer includes: a polarizing beamsplitter provided to the scanning member; a reference mirror fixed to the fixed member; a measurement optical path extending from the polarizing beamsplitter to the workpiece; and a reference optical path extending from the polarizing beamsplitter to the reference mirror. A difference between an optical path length of the measurement optical path and an optical path length of the reference optical path is a predetermined tolerable error or less.

Abstract translation: 型材测量仪器包括：固定部件，其固定部件，其相对于具有要被轮廓测量的表面的工件的位置; 扫描构件，其由所述固定构件支撑并且沿着所述工件的相对于所述固定构件的表面的扫描方向可移动; 激光干涉仪，其检测沿着扫描方向的工件表面的位移。 激光干涉仪包括：偏振分束器，设置在扫描部件上; 固定在固定件上的参考镜; 从偏振分束器延伸到工件的测量光路; 以及从偏振分束器延伸到参考反射镜的参考光路。 测量光路的光路长度与基准光路的光程长度之间的差是预定的可容许误差以下。