公开(公告)号：US20200166336A1

公开(公告)日：2020-05-28

申请号：US16690613

申请日：2019-11-21

Applicant: MITUTOYO CORPORATION

Inventor： Satoshi KOGA ,  Akinori SAITO ,  Hiroyuki KANAMORI

IPC: G01B21/04 ,  G01B5/012 ,  G01B3/20

Abstract: In a probe unit having a measuring probe, a signal processing circuit includes: a signal synthesizing portion configured to process an output of a detection element to output a composite signal obtained by synthesizing displacement components of a contact part in three directions perpendicular to one another; and a signal outputting portion configured to output a digital touch signal to the outside of the probe unit when the composite signal satisfies a predetermined threshold condition. The signal outputting portion includes three comparing portions each configured to compare a threshold condition with the composite signal. When the measuring probe measures the object to be measured, the signal outputting portion outputs the digital touch signal corresponding to outputs of the first and second comparing portions. Thus, there can be provided a probe unit and a measuring system that can stably make measurements with high accuracy while keeping high noise resistance.

公开(公告)号：US20170248400A1

公开(公告)日：2017-08-31

申请号：US15440440

申请日：2017-02-23

Applicant: MITUTOYO CORPORATION

Inventor： Satoshi KOGA ,  Akinori SAITO ,  Hiroyuki KANAMORI ,  Yutaka KURIYAMA ,  Nobuhiro ISHIKAWA

IPC: G01B5/30 ,  G01B5/016

CPC classification number: G01B5/30 ,  G01B5/016 ,  G01B7/001 ,  G01B7/012

Abstract: A measuring probe includes: a stylus having a contact part to be brought into contact with an object to be measured; a probe housing capable of supporting the stylus on an axial center; and a detection element capable of detecting a movement of the contact part. The measuring probe further includes: two supporting members disposed in an axial direction of the probe housing, the supporting member allowing for an attitude change of the stylus; and a coupling shaft for coupling the two supporting members together. The detection element is disposed in one of the two supporting members that is farthest away from a rotational center position of rotation generated in the stylus when a measuring force is applied to the contact part from a direction perpendicular to the axial direction, to detect a strain amount of the one of the two supporting members.

公开(公告)号：US20130321821A1

公开(公告)日：2013-12-05

申请号：US13903472

申请日：2013-05-28

Applicant: MITUTOYO CORPORATION

Inventor： Yoshimasa SUZUKI ,  Akinori SAITO

IPC: G01B9/02

CPC classification number: G01B9/02056 ,  G01B9/02091

Abstract: A profile measuring instrument includes: a fixed member of which position relative to a workpiece having a surface to be profile-measured is fixed; a scanning member supported by the fixed member and movable in a scan direction along the surface of the workpiece relative to the fixed member; a laser interferometer that detects a displacement of the surface of the workpiece along the scan direction. The laser interferometer includes: a polarizing beamsplitter provided to the scanning member; a reference mirror fixed to the fixed member; a measurement optical path extending from the polarizing beamsplitter to the workpiece; and a reference optical path extending from the polarizing beamsplitter to the reference mirror. A difference between an optical path length of the measurement optical path and an optical path length of the reference optical path is a predetermined tolerable error or less.

Abstract translation: 型材测量仪器包括：固定部件，其固定部件，其相对于具有要被轮廓测量的表面的工件的位置; 扫描构件，其由所述固定构件支撑并且沿着所述工件的相对于所述固定构件的表面的扫描方向可移动; 激光干涉仪，其检测沿着扫描方向的工件表面的位移。 激光干涉仪包括：偏振分束器，设置在扫描部件上; 固定在固定件上的参考镜; 从偏振分束器延伸到工件的测量光路; 以及从偏振分束器延伸到参考反射镜的参考光路。 测量光路的光路长度与基准光路的光程长度之间的差是预定的可容许误差以下。

公开(公告)号：US20170248402A1

公开(公告)日：2017-08-31

申请号：US15440280

申请日：2017-02-23

Applicant: MITUTOYO CORPORATION

Inventor： Satoshi KOGA ,  Akinori SAITO ,  Hiroyuki KANAMORI ,  Yutaka KURIYAMA ,  Nobuhiro ISHIKAWA

IPC: G01B7/012

Abstract: A measuring probe includes two supporting members, each having a rotationally symmetric shape and allowing for an attitude change of a stylus, in an axial direction of a probe housing. Four detection elements are disposed at fourfold symmetric positions in one of the two supporting members that includes four deformable arm parts. A signal processing circuit includes a first processing part that processes outputs of the detection elements to output three displacement signals representing displacement components of a contact part in mutually perpendicular three directions, respectively. The measuring probe capable of reducing measurement directional dependency of sensitivity with a simple configuration while maintaining high sensitivity is thus provided.